{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2025:372NZVSKZFI7ADXYTOJVUBYKEO","short_pith_number":"pith:372NZVSK","canonical_record":{"source":{"id":"2505.03826","kind":"arxiv","version":1},"metadata":{"license":"http://creativecommons.org/licenses/by/4.0/","primary_cat":"cs.CV","submitted_at":"2025-05-03T14:43:19Z","cross_cats_sorted":["cs.AI"],"title_canon_sha256":"263285b701845cb35186af0db2e89cdc2855cb261fd570358fb2addb5635542d","abstract_canon_sha256":"96b2c396bbd8e7338c4b88cebbab102a27769c23afb9bf9033ecf99acb9401e0"},"schema_version":"1.0"},"canonical_sha256":"dff4dcd64ac951f00ef89b935a070a239163ef6e0aac97e49161f815305f9a43","source":{"kind":"arxiv","id":"2505.03826","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2505.03826","created_at":"2026-07-05T10:59:32Z"},{"alias_kind":"arxiv_version","alias_value":"2505.03826v1","created_at":"2026-07-05T10:59:32Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2505.03826","created_at":"2026-07-05T10:59:32Z"},{"alias_kind":"pith_short_12","alias_value":"372NZVSKZFI7","created_at":"2026-07-05T10:59:32Z"},{"alias_kind":"pith_short_16","alias_value":"372NZVSKZFI7ADXY","created_at":"2026-07-05T10:59:32Z"},{"alias_kind":"pith_short_8","alias_value":"372NZVSK","created_at":"2026-07-05T10:59:32Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2025:372NZVSKZFI7ADXYTOJVUBYKEO","target":"record","payload":{"canonical_record":{"source":{"id":"2505.03826","kind":"arxiv","version":1},"metadata":{"license":"http://creativecommons.org/licenses/by/4.0/","primary_cat":"cs.CV","submitted_at":"2025-05-03T14:43:19Z","cross_cats_sorted":["cs.AI"],"title_canon_sha256":"263285b701845cb35186af0db2e89cdc2855cb261fd570358fb2addb5635542d","abstract_canon_sha256":"96b2c396bbd8e7338c4b88cebbab102a27769c23afb9bf9033ecf99acb9401e0"},"schema_version":"1.0"},"canonical_sha256":"dff4dcd64ac951f00ef89b935a070a239163ef6e0aac97e49161f815305f9a43","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T10:59:32.164308Z","signature_b64":"21YRSYfZLND/SNDmMzKg8GohVoinmvwyiTNDn3JThlTbQhtrccxVAnTJoiU2f3UrQvY9LKAysRJoFodon7a4BA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"dff4dcd64ac951f00ef89b935a070a239163ef6e0aac97e49161f815305f9a43","last_reissued_at":"2026-07-05T10:59:32.163792Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T10:59:32.163792Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"2505.03826","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T10:59:32Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"nZnHNTO+fPAGNfYaZJ3yi43qA/Tij39JC7o0gzdCznJ3EkRXL5YTMNQA+T0hVDt03xtc7GRITk07NQPJM8BgCQ==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-03T15:54:30.680743Z"},"content_sha256":"4a35f7335eaac0e2a731b30f9433257d05a747c002b431571805c54ce395d3cc","schema_version":"1.0","event_id":"sha256:4a35f7335eaac0e2a731b30f9433257d05a747c002b431571805c54ce395d3cc"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2025:372NZVSKZFI7ADXYTOJVUBYKEO","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["cs.AI"],"primary_cat":"cs.CV","authors_text":"Donghyeon Paek, Eunseo Go, Geon Lim, Hyeong-U Kim, Jaehyun Kim, Jaekwang Kim, Minji Kang, Min Sup Choi, Muyoung Kim, Seongho Kim, Soyeun Kim, Sung Kyu Jang, Woo Seok Kang","submitted_at":"2025-05-03T14:43:19Z","abstract_excerpt":"Precise monitoring of etch depth and the thickness of insulating materials, such as Silicon dioxide and silicon nitride, is critical to ensuring device performance and yield in semiconductor manufacturing. While conventional ex-situ analysis methods are accurate, they are constrained by time delays and contamination risks. To address these limitations, this study proposes a non-contact, in-situ etch depth prediction framework based on machine learning (ML) techniques. Two scenarios are explored. In the first scenario, an artificial neural network (ANN) is trained to predict average etch depth "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2505.03826","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2505.03826/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T10:59:32Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"hJV4JOCFQNJEkpkyqpu11ppQ8IqdUXfrvjjqwtaKpIgGdsNKiilOgqVDjnW+I0AQHh7gNeqk4+IeKl1mubVVDg==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-03T15:54:30.681715Z"},"content_sha256":"9791081c6f09d6058b007a41e6badd03be79b3875ba3563b002826be432b49a3","schema_version":"1.0","event_id":"sha256:9791081c6f09d6058b007a41e6badd03be79b3875ba3563b002826be432b49a3"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/372NZVSKZFI7ADXYTOJVUBYKEO/bundle.json","state_url":"https://pith.science/pith/372NZVSKZFI7ADXYTOJVUBYKEO/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/372NZVSKZFI7ADXYTOJVUBYKEO/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-08-03T15:54:30Z","links":{"resolver":"https://pith.science/pith/372NZVSKZFI7ADXYTOJVUBYKEO","bundle":"https://pith.science/pith/372NZVSKZFI7ADXYTOJVUBYKEO/bundle.json","state":"https://pith.science/pith/372NZVSKZFI7ADXYTOJVUBYKEO/state.json","well_known_bundle":"https://pith.science/.well-known/pith/372NZVSKZFI7ADXYTOJVUBYKEO/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2025:372NZVSKZFI7ADXYTOJVUBYKEO","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"96b2c396bbd8e7338c4b88cebbab102a27769c23afb9bf9033ecf99acb9401e0","cross_cats_sorted":["cs.AI"],"license":"http://creativecommons.org/licenses/by/4.0/","primary_cat":"cs.CV","submitted_at":"2025-05-03T14:43:19Z","title_canon_sha256":"263285b701845cb35186af0db2e89cdc2855cb261fd570358fb2addb5635542d"},"schema_version":"1.0","source":{"id":"2505.03826","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2505.03826","created_at":"2026-07-05T10:59:32Z"},{"alias_kind":"arxiv_version","alias_value":"2505.03826v1","created_at":"2026-07-05T10:59:32Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2505.03826","created_at":"2026-07-05T10:59:32Z"},{"alias_kind":"pith_short_12","alias_value":"372NZVSKZFI7","created_at":"2026-07-05T10:59:32Z"},{"alias_kind":"pith_short_16","alias_value":"372NZVSKZFI7ADXY","created_at":"2026-07-05T10:59:32Z"},{"alias_kind":"pith_short_8","alias_value":"372NZVSK","created_at":"2026-07-05T10:59:32Z"}],"graph_snapshots":[{"event_id":"sha256:9791081c6f09d6058b007a41e6badd03be79b3875ba3563b002826be432b49a3","target":"graph","created_at":"2026-07-05T10:59:32Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/2505.03826/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"Precise monitoring of etch depth and the thickness of insulating materials, such as Silicon dioxide and silicon nitride, is critical to ensuring device performance and yield in semiconductor manufacturing. While conventional ex-situ analysis methods are accurate, they are constrained by time delays and contamination risks. To address these limitations, this study proposes a non-contact, in-situ etch depth prediction framework based on machine learning (ML) techniques. Two scenarios are explored. In the first scenario, an artificial neural network (ANN) is trained to predict average etch depth ","authors_text":"Donghyeon Paek, Eunseo Go, Geon Lim, Hyeong-U Kim, Jaehyun Kim, Jaekwang Kim, Minji Kang, Min Sup Choi, Muyoung Kim, Seongho Kim, Soyeun Kim, Sung Kyu Jang, Woo Seok Kang","cross_cats":["cs.AI"],"headline":"","license":"http://creativecommons.org/licenses/by/4.0/","primary_cat":"cs.CV","submitted_at":"2025-05-03T14:43:19Z","title":"In-situ and Non-contact Etch Depth Prediction in Plasma Etching via Machine Learning (ANN & BNN) and Digital Image Colorimetry"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2505.03826","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:4a35f7335eaac0e2a731b30f9433257d05a747c002b431571805c54ce395d3cc","target":"record","created_at":"2026-07-05T10:59:32Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"96b2c396bbd8e7338c4b88cebbab102a27769c23afb9bf9033ecf99acb9401e0","cross_cats_sorted":["cs.AI"],"license":"http://creativecommons.org/licenses/by/4.0/","primary_cat":"cs.CV","submitted_at":"2025-05-03T14:43:19Z","title_canon_sha256":"263285b701845cb35186af0db2e89cdc2855cb261fd570358fb2addb5635542d"},"schema_version":"1.0","source":{"id":"2505.03826","kind":"arxiv","version":1}},"canonical_sha256":"dff4dcd64ac951f00ef89b935a070a239163ef6e0aac97e49161f815305f9a43","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"dff4dcd64ac951f00ef89b935a070a239163ef6e0aac97e49161f815305f9a43","first_computed_at":"2026-07-05T10:59:32.163792Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-07-05T10:59:32.163792Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"21YRSYfZLND/SNDmMzKg8GohVoinmvwyiTNDn3JThlTbQhtrccxVAnTJoiU2f3UrQvY9LKAysRJoFodon7a4BA==","signature_status":"signed_v1","signed_at":"2026-07-05T10:59:32.164308Z","signed_message":"canonical_sha256_bytes"},"source_id":"2505.03826","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:4a35f7335eaac0e2a731b30f9433257d05a747c002b431571805c54ce395d3cc","sha256:9791081c6f09d6058b007a41e6badd03be79b3875ba3563b002826be432b49a3"],"state_sha256":"433534ed3b40a8d7c485dbd9c29fc93c369f61131ad22f630e709ddf8d624949"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"kEKA0wDaykK3SDxtuMXnHI5Gkbu9kw6Cq2aPQ60+JZwfRdOIXgqPDwnf+nivR+Zln38ivI13a8uwS/E675gzDA==","signed_message":"bundle_sha256_bytes","signed_at":"2026-08-03T15:54:30.688773Z","bundle_sha256":"87f68bcd06031f0bf880fa2a5f4a3d7696fc15ee85daf27dfb3a12aea45d46d1"}}