{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2026:57UWO7AA4FZ3SO4YZPJGUQ3H4B","short_pith_number":"pith:57UWO7AA","schema_version":"1.0","canonical_sha256":"efe9677c00e173b93b98cbd26a4367e06444d6baaf1b4c5c69ffa89bc9b09f54","source":{"kind":"arxiv","id":"2607.14978","version":1},"attestation_state":"computed","paper":{"title":"Scalable Fabrication of Diamond-on-Silica Heterostructures via High-Selectivity Deep ICP-RIE and Room-Temperature Bonding","license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"A. Hammouti, J. Le Pouliquen, P. Huillery, P. Pirasteh, R. Chembra Vasudevan, T. Batte, Y. Dumeige","submitted_at":"2026-07-16T13:30:52Z","abstract_excerpt":"Single-crystal diamond is a leading material platform for high-power electronics and solid-state quantum technologies, yet many device architectures require micrometer-scale membranes with deeply etched features, patterned from commercially available substrates. In this work, we demonstrate a complete through-etch of a 16 {\\mu}m -thick NV-doped single-crystal diamond membrane using a single-layer SiO2 hard mask combined with a multi-step oxygen-based ICPRIE process. With a diamond-to-SiO2 selectivity of 15:1, this non-metallic mask strategy can achieve etch depths of few tens of {\\mu}m with we"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"2607.14978","kind":"arxiv","version":1},"metadata":{"license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2026-07-16T13:30:52Z","cross_cats_sorted":[],"title_canon_sha256":"bd967a5fe1a893b12f1a228a8d6308cacc06c77785fe5ad820da055d73830735","abstract_canon_sha256":"f5d8142130af51861bfbc68b173271ee702dfe90cb77df7eebff7e1f6260257c"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-17T01:22:02.079250Z","signature_b64":"2gKarTFteVvOyTs3lCcq9xQ49Jh0FnkjE7Liceh0cx7FRDg+645KANGYt2DLcQzAIk3NF/acMDzHzGxn9NMgBw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"efe9677c00e173b93b98cbd26a4367e06444d6baaf1b4c5c69ffa89bc9b09f54","last_reissued_at":"2026-07-17T01:22:02.078408Z","signature_status":"signed_v1","first_computed_at":"2026-07-17T01:22:02.078408Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Scalable Fabrication of Diamond-on-Silica Heterostructures via High-Selectivity Deep ICP-RIE and Room-Temperature Bonding","license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"A. Hammouti, J. Le Pouliquen, P. Huillery, P. Pirasteh, R. Chembra Vasudevan, T. Batte, Y. Dumeige","submitted_at":"2026-07-16T13:30:52Z","abstract_excerpt":"Single-crystal diamond is a leading material platform for high-power electronics and solid-state quantum technologies, yet many device architectures require micrometer-scale membranes with deeply etched features, patterned from commercially available substrates. In this work, we demonstrate a complete through-etch of a 16 {\\mu}m -thick NV-doped single-crystal diamond membrane using a single-layer SiO2 hard mask combined with a multi-step oxygen-based ICPRIE process. With a diamond-to-SiO2 selectivity of 15:1, this non-metallic mask strategy can achieve etch depths of few tens of {\\mu}m with we"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2607.14978","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2607.14978/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"2607.14978","created_at":"2026-07-17T01:22:02.078846+00:00"},{"alias_kind":"arxiv_version","alias_value":"2607.14978v1","created_at":"2026-07-17T01:22:02.078846+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2607.14978","created_at":"2026-07-17T01:22:02.078846+00:00"},{"alias_kind":"pith_short_12","alias_value":"57UWO7AA4FZ3","created_at":"2026-07-17T01:22:02.078846+00:00"},{"alias_kind":"pith_short_16","alias_value":"57UWO7AA4FZ3SO4Y","created_at":"2026-07-17T01:22:02.078846+00:00"},{"alias_kind":"pith_short_8","alias_value":"57UWO7AA","created_at":"2026-07-17T01:22:02.078846+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/57UWO7AA4FZ3SO4YZPJGUQ3H4B","json":"https://pith.science/pith/57UWO7AA4FZ3SO4YZPJGUQ3H4B.json","graph_json":"https://pith.science/api/pith-number/57UWO7AA4FZ3SO4YZPJGUQ3H4B/graph.json","events_json":"https://pith.science/api/pith-number/57UWO7AA4FZ3SO4YZPJGUQ3H4B/events.json","paper":"https://pith.science/paper/57UWO7AA"},"agent_actions":{"view_html":"https://pith.science/pith/57UWO7AA4FZ3SO4YZPJGUQ3H4B","download_json":"https://pith.science/pith/57UWO7AA4FZ3SO4YZPJGUQ3H4B.json","view_paper":"https://pith.science/paper/57UWO7AA","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=2607.14978&json=true","fetch_graph":"https://pith.science/api/pith-number/57UWO7AA4FZ3SO4YZPJGUQ3H4B/graph.json","fetch_events":"https://pith.science/api/pith-number/57UWO7AA4FZ3SO4YZPJGUQ3H4B/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/57UWO7AA4FZ3SO4YZPJGUQ3H4B/action/timestamp_anchor","attest_storage":"https://pith.science/pith/57UWO7AA4FZ3SO4YZPJGUQ3H4B/action/storage_attestation","attest_author":"https://pith.science/pith/57UWO7AA4FZ3SO4YZPJGUQ3H4B/action/author_attestation","sign_citation":"https://pith.science/pith/57UWO7AA4FZ3SO4YZPJGUQ3H4B/action/citation_signature","submit_replication":"https://pith.science/pith/57UWO7AA4FZ3SO4YZPJGUQ3H4B/action/replication_record"}},"created_at":"2026-07-17T01:22:02.078846+00:00","updated_at":"2026-07-17T01:22:02.078846+00:00"}