{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2011:6WB3FV4ZV5T2Q4OAR6Q6RYNHKI","short_pith_number":"pith:6WB3FV4Z","canonical_record":{"source":{"id":"1108.2218","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2011-08-10T16:41:32Z","cross_cats_sorted":["physics.ins-det"],"title_canon_sha256":"25632accf60d2c9cf1952fe9051af3ff28e02553071bc20e7f899d1e27b6341d","abstract_canon_sha256":"027923ada165955d9b15953d43c5d6bb5cd1e8d601db7d818f781669bd186b02"},"schema_version":"1.0"},"canonical_sha256":"f583b2d799af67a871c08fa1e8e1a7521978a52d736780bc5a3d3fbd7b53ff67","source":{"kind":"arxiv","id":"1108.2218","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1108.2218","created_at":"2026-05-18T04:12:55Z"},{"alias_kind":"arxiv_version","alias_value":"1108.2218v1","created_at":"2026-05-18T04:12:55Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1108.2218","created_at":"2026-05-18T04:12:55Z"},{"alias_kind":"pith_short_12","alias_value":"6WB3FV4ZV5T2","created_at":"2026-05-18T12:26:22Z"},{"alias_kind":"pith_short_16","alias_value":"6WB3FV4ZV5T2Q4OA","created_at":"2026-05-18T12:26:22Z"},{"alias_kind":"pith_short_8","alias_value":"6WB3FV4Z","created_at":"2026-05-18T12:26:22Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2011:6WB3FV4ZV5T2Q4OAR6Q6RYNHKI","target":"record","payload":{"canonical_record":{"source":{"id":"1108.2218","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2011-08-10T16:41:32Z","cross_cats_sorted":["physics.ins-det"],"title_canon_sha256":"25632accf60d2c9cf1952fe9051af3ff28e02553071bc20e7f899d1e27b6341d","abstract_canon_sha256":"027923ada165955d9b15953d43c5d6bb5cd1e8d601db7d818f781669bd186b02"},"schema_version":"1.0"},"canonical_sha256":"f583b2d799af67a871c08fa1e8e1a7521978a52d736780bc5a3d3fbd7b53ff67","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T04:12:55.587567Z","signature_b64":"5pR/d2AUxc+LxfE+Kl/oOH1nXkxpufK1DocUoDbj18d6OlnVpj/nzlliBOLe5ESztY8P065gBkDEToW4PIkBCQ==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"f583b2d799af67a871c08fa1e8e1a7521978a52d736780bc5a3d3fbd7b53ff67","last_reissued_at":"2026-05-18T04:12:55.587098Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T04:12:55.587098Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"1108.2218","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-05-18T04:12:55Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"nd/QVGY1pbe2qiBQZl3OLpqvzxIlAg74YA6vkcrKMq5XCmzFLHZCGWlpG9KzpqcIN9iBqhlQmGBQnMXpwcHTBw==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-06-06T14:30:50.070207Z"},"content_sha256":"a7e00a529a4fff834a1b756d18c816ba19750979afc78452a0f226e15ec4c950","schema_version":"1.0","event_id":"sha256:a7e00a529a4fff834a1b756d18c816ba19750979afc78452a0f226e15ec4c950"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2011:6WB3FV4ZV5T2Q4OAR6Q6RYNHKI","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Noncontact dielectric constant metrology of low-k interconnect films using a near-field scanned microwave probe","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.ins-det"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Andr\\'e Scherz, Andrew R. Schwartz, Robert L. Moreland, Vladimir V. Talanov","submitted_at":"2011-08-10T16:41:32Z","abstract_excerpt":"We present a method for noncontact, noninvasive measurements of dielectric constant, k, of 100-nm- to 1.5-\\mu m-thick blanket low-k interconnect films on up to 300 mm in diameter wafers. The method has about 10 micron sampling spot size, and provides <0.3% precision and <2% accuracy for k-value. It is based on a microfabricated near-field scanned microwave probe formed by a 4 GHz parallel strip transmission line resonator tapered down to a few-micron tip size."},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1108.2218","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-05-18T04:12:55Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"OcCycwEMWR4pJ2fzUwpD/I+0ntu+9jGmjH1J3ux1k51Oo79ywYWdyM1TLUaBoiwyOGU86uZp1YgDVgWIK2uUBw==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-06-06T14:30:50.070904Z"},"content_sha256":"9a3d9e747439496502b339822cbf37c613eff17aac34ed5975773738855d6639","schema_version":"1.0","event_id":"sha256:9a3d9e747439496502b339822cbf37c613eff17aac34ed5975773738855d6639"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/6WB3FV4ZV5T2Q4OAR6Q6RYNHKI/bundle.json","state_url":"https://pith.science/pith/6WB3FV4ZV5T2Q4OAR6Q6RYNHKI/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/6WB3FV4ZV5T2Q4OAR6Q6RYNHKI/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-06-06T14:30:50Z","links":{"resolver":"https://pith.science/pith/6WB3FV4ZV5T2Q4OAR6Q6RYNHKI","bundle":"https://pith.science/pith/6WB3FV4ZV5T2Q4OAR6Q6RYNHKI/bundle.json","state":"https://pith.science/pith/6WB3FV4ZV5T2Q4OAR6Q6RYNHKI/state.json","well_known_bundle":"https://pith.science/.well-known/pith/6WB3FV4ZV5T2Q4OAR6Q6RYNHKI/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2011:6WB3FV4ZV5T2Q4OAR6Q6RYNHKI","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"027923ada165955d9b15953d43c5d6bb5cd1e8d601db7d818f781669bd186b02","cross_cats_sorted":["physics.ins-det"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2011-08-10T16:41:32Z","title_canon_sha256":"25632accf60d2c9cf1952fe9051af3ff28e02553071bc20e7f899d1e27b6341d"},"schema_version":"1.0","source":{"id":"1108.2218","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1108.2218","created_at":"2026-05-18T04:12:55Z"},{"alias_kind":"arxiv_version","alias_value":"1108.2218v1","created_at":"2026-05-18T04:12:55Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1108.2218","created_at":"2026-05-18T04:12:55Z"},{"alias_kind":"pith_short_12","alias_value":"6WB3FV4ZV5T2","created_at":"2026-05-18T12:26:22Z"},{"alias_kind":"pith_short_16","alias_value":"6WB3FV4ZV5T2Q4OA","created_at":"2026-05-18T12:26:22Z"},{"alias_kind":"pith_short_8","alias_value":"6WB3FV4Z","created_at":"2026-05-18T12:26:22Z"}],"graph_snapshots":[{"event_id":"sha256:9a3d9e747439496502b339822cbf37c613eff17aac34ed5975773738855d6639","target":"graph","created_at":"2026-05-18T04:12:55Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"paper":{"abstract_excerpt":"We present a method for noncontact, noninvasive measurements of dielectric constant, k, of 100-nm- to 1.5-\\mu m-thick blanket low-k interconnect films on up to 300 mm in diameter wafers. The method has about 10 micron sampling spot size, and provides <0.3% precision and <2% accuracy for k-value. It is based on a microfabricated near-field scanned microwave probe formed by a 4 GHz parallel strip transmission line resonator tapered down to a few-micron tip size.","authors_text":"Andr\\'e Scherz, Andrew R. Schwartz, Robert L. Moreland, Vladimir V. Talanov","cross_cats":["physics.ins-det"],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2011-08-10T16:41:32Z","title":"Noncontact dielectric constant metrology of low-k interconnect films using a near-field scanned microwave probe"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1108.2218","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:a7e00a529a4fff834a1b756d18c816ba19750979afc78452a0f226e15ec4c950","target":"record","created_at":"2026-05-18T04:12:55Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"027923ada165955d9b15953d43c5d6bb5cd1e8d601db7d818f781669bd186b02","cross_cats_sorted":["physics.ins-det"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2011-08-10T16:41:32Z","title_canon_sha256":"25632accf60d2c9cf1952fe9051af3ff28e02553071bc20e7f899d1e27b6341d"},"schema_version":"1.0","source":{"id":"1108.2218","kind":"arxiv","version":1}},"canonical_sha256":"f583b2d799af67a871c08fa1e8e1a7521978a52d736780bc5a3d3fbd7b53ff67","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"f583b2d799af67a871c08fa1e8e1a7521978a52d736780bc5a3d3fbd7b53ff67","first_computed_at":"2026-05-18T04:12:55.587098Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-05-18T04:12:55.587098Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"5pR/d2AUxc+LxfE+Kl/oOH1nXkxpufK1DocUoDbj18d6OlnVpj/nzlliBOLe5ESztY8P065gBkDEToW4PIkBCQ==","signature_status":"signed_v1","signed_at":"2026-05-18T04:12:55.587567Z","signed_message":"canonical_sha256_bytes"},"source_id":"1108.2218","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:a7e00a529a4fff834a1b756d18c816ba19750979afc78452a0f226e15ec4c950","sha256:9a3d9e747439496502b339822cbf37c613eff17aac34ed5975773738855d6639"],"state_sha256":"f171c151ded611794f706fb39aa7ef84c9acdb74778f843b2149906e6688be9c"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"p7gYut0lbHgQ7+N4CF4WSo3wxbkznQDDpakOVTAI9C1f4nPfhMrx51iTgNXpKelcztVy7f22ubUwFYMWJ4X0BA==","signed_message":"bundle_sha256_bytes","signed_at":"2026-06-06T14:30:50.074203Z","bundle_sha256":"717a6ed7f9493935c8169444df422a9ff6991c124e11d07ae87d1cf890ad20b0"}}