{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2011:ABODDA7SD4VMU7HLPMBKOD46RG","short_pith_number":"pith:ABODDA7S","canonical_record":{"source":{"id":"1104.3518","kind":"arxiv","version":1},"metadata":{"license":"http://creativecommons.org/licenses/publicdomain/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2011-04-18T15:27:52Z","cross_cats_sorted":["astro-ph.IM"],"title_canon_sha256":"575b6365411c096cc9c306cac317c6834c6b5fd3336e71f74924a83becccc580","abstract_canon_sha256":"e748becf2a219641faf7e378be1b8274c6c979146cc25f61038b70ca3c18a4a6"},"schema_version":"1.0"},"canonical_sha256":"005c3183f21f2aca7ceb7b02a70f9e89be3164b530b1fc59cd4b5d10e31ad6f4","source":{"kind":"arxiv","id":"1104.3518","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1104.3518","created_at":"2026-05-18T04:24:04Z"},{"alias_kind":"arxiv_version","alias_value":"1104.3518v1","created_at":"2026-05-18T04:24:04Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1104.3518","created_at":"2026-05-18T04:24:04Z"},{"alias_kind":"pith_short_12","alias_value":"ABODDA7SD4VM","created_at":"2026-05-18T12:26:24Z"},{"alias_kind":"pith_short_16","alias_value":"ABODDA7SD4VMU7HL","created_at":"2026-05-18T12:26:24Z"},{"alias_kind":"pith_short_8","alias_value":"ABODDA7S","created_at":"2026-05-18T12:26:24Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2011:ABODDA7SD4VMU7HLPMBKOD46RG","target":"record","payload":{"canonical_record":{"source":{"id":"1104.3518","kind":"arxiv","version":1},"metadata":{"license":"http://creativecommons.org/licenses/publicdomain/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2011-04-18T15:27:52Z","cross_cats_sorted":["astro-ph.IM"],"title_canon_sha256":"575b6365411c096cc9c306cac317c6834c6b5fd3336e71f74924a83becccc580","abstract_canon_sha256":"e748becf2a219641faf7e378be1b8274c6c979146cc25f61038b70ca3c18a4a6"},"schema_version":"1.0"},"canonical_sha256":"005c3183f21f2aca7ceb7b02a70f9e89be3164b530b1fc59cd4b5d10e31ad6f4","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T04:24:04.575716Z","signature_b64":"/Fbzb4kx1LBU+2CZLIpU4bGXczeSGOI1sxar5NHmaa0bRgtwcEKX2fgicNemmEx4pLuMrr7j55dgWOxVCymzAg==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"005c3183f21f2aca7ceb7b02a70f9e89be3164b530b1fc59cd4b5d10e31ad6f4","last_reissued_at":"2026-05-18T04:24:04.574994Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T04:24:04.574994Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"1104.3518","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-05-18T04:24:04Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"VJeQsAvnPNmH3pb5WJsAfv0oLXD9tCXVUQ+OxeuEC1yBjhKqgbKTnNvWHxsx0vJuFHztvwyvb9GjZ6cK9tCtBA==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-05-26T10:23:54.438800Z"},"content_sha256":"f51fef6a16e73b22c9c4166b164ff89b817ea757d2c700a1ac1af19419abaeb5","schema_version":"1.0","event_id":"sha256:f51fef6a16e73b22c9c4166b164ff89b817ea757d2c700a1ac1af19419abaeb5"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2011:ABODDA7SD4VMU7HLPMBKOD46RG","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Atomic layer deposition and superconducting properties of NbSi films","license":"http://creativecommons.org/licenses/publicdomain/","headline":"","cross_cats":["astro-ph.IM"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Helmut Claus, Jeffrey A. Klug, Jeffrey W. Elam, Michael Pellin, Nicholas G. Becker, Thomas Proslier","submitted_at":"2011-04-18T15:27:52Z","abstract_excerpt":"Atomic layer deposition was used to synthesize niobium silicide (NbSi) films with a 1:1 stoichiometry, using NbF5 and Si2H6 as precursors. The growth mechanism at 200oC was examined by in-situ quartz crystal microbalance (QCM) and quadrupole mass spectrometer (QMS). This study revealed a self-limiting reaction with a growth rate of 4.5 {\\AA}/cycle. NbSi was found to grow only on oxide-free films prepared using halogenated precursors. The electronic properties, growth rate, chemical composition, and structure of the films were studied over the deposition temperature range 150-400oC. For all tem"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1104.3518","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-05-18T04:24:04Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"k/rW5zMDZLATpVm0crTGjgDWINg0oilHbww1m2xs6PL4dxsHRueD7Hsuxb8wS89PGMCWEE4rHxE3pQ03La7IBw==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-05-26T10:23:54.439462Z"},"content_sha256":"011c22e59b1fc0d3b078b62560393108033c9d9df232b43e64e7717c0bf8e987","schema_version":"1.0","event_id":"sha256:011c22e59b1fc0d3b078b62560393108033c9d9df232b43e64e7717c0bf8e987"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/ABODDA7SD4VMU7HLPMBKOD46RG/bundle.json","state_url":"https://pith.science/pith/ABODDA7SD4VMU7HLPMBKOD46RG/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/ABODDA7SD4VMU7HLPMBKOD46RG/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-05-26T10:23:54Z","links":{"resolver":"https://pith.science/pith/ABODDA7SD4VMU7HLPMBKOD46RG","bundle":"https://pith.science/pith/ABODDA7SD4VMU7HLPMBKOD46RG/bundle.json","state":"https://pith.science/pith/ABODDA7SD4VMU7HLPMBKOD46RG/state.json","well_known_bundle":"https://pith.science/.well-known/pith/ABODDA7SD4VMU7HLPMBKOD46RG/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2011:ABODDA7SD4VMU7HLPMBKOD46RG","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"e748becf2a219641faf7e378be1b8274c6c979146cc25f61038b70ca3c18a4a6","cross_cats_sorted":["astro-ph.IM"],"license":"http://creativecommons.org/licenses/publicdomain/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2011-04-18T15:27:52Z","title_canon_sha256":"575b6365411c096cc9c306cac317c6834c6b5fd3336e71f74924a83becccc580"},"schema_version":"1.0","source":{"id":"1104.3518","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1104.3518","created_at":"2026-05-18T04:24:04Z"},{"alias_kind":"arxiv_version","alias_value":"1104.3518v1","created_at":"2026-05-18T04:24:04Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1104.3518","created_at":"2026-05-18T04:24:04Z"},{"alias_kind":"pith_short_12","alias_value":"ABODDA7SD4VM","created_at":"2026-05-18T12:26:24Z"},{"alias_kind":"pith_short_16","alias_value":"ABODDA7SD4VMU7HL","created_at":"2026-05-18T12:26:24Z"},{"alias_kind":"pith_short_8","alias_value":"ABODDA7S","created_at":"2026-05-18T12:26:24Z"}],"graph_snapshots":[{"event_id":"sha256:011c22e59b1fc0d3b078b62560393108033c9d9df232b43e64e7717c0bf8e987","target":"graph","created_at":"2026-05-18T04:24:04Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"paper":{"abstract_excerpt":"Atomic layer deposition was used to synthesize niobium silicide (NbSi) films with a 1:1 stoichiometry, using NbF5 and Si2H6 as precursors. The growth mechanism at 200oC was examined by in-situ quartz crystal microbalance (QCM) and quadrupole mass spectrometer (QMS). This study revealed a self-limiting reaction with a growth rate of 4.5 {\\AA}/cycle. NbSi was found to grow only on oxide-free films prepared using halogenated precursors. The electronic properties, growth rate, chemical composition, and structure of the films were studied over the deposition temperature range 150-400oC. For all tem","authors_text":"Helmut Claus, Jeffrey A. Klug, Jeffrey W. Elam, Michael Pellin, Nicholas G. Becker, Thomas Proslier","cross_cats":["astro-ph.IM"],"headline":"","license":"http://creativecommons.org/licenses/publicdomain/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2011-04-18T15:27:52Z","title":"Atomic layer deposition and superconducting properties of NbSi films"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1104.3518","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:f51fef6a16e73b22c9c4166b164ff89b817ea757d2c700a1ac1af19419abaeb5","target":"record","created_at":"2026-05-18T04:24:04Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"e748becf2a219641faf7e378be1b8274c6c979146cc25f61038b70ca3c18a4a6","cross_cats_sorted":["astro-ph.IM"],"license":"http://creativecommons.org/licenses/publicdomain/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2011-04-18T15:27:52Z","title_canon_sha256":"575b6365411c096cc9c306cac317c6834c6b5fd3336e71f74924a83becccc580"},"schema_version":"1.0","source":{"id":"1104.3518","kind":"arxiv","version":1}},"canonical_sha256":"005c3183f21f2aca7ceb7b02a70f9e89be3164b530b1fc59cd4b5d10e31ad6f4","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"005c3183f21f2aca7ceb7b02a70f9e89be3164b530b1fc59cd4b5d10e31ad6f4","first_computed_at":"2026-05-18T04:24:04.574994Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-05-18T04:24:04.574994Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"/Fbzb4kx1LBU+2CZLIpU4bGXczeSGOI1sxar5NHmaa0bRgtwcEKX2fgicNemmEx4pLuMrr7j55dgWOxVCymzAg==","signature_status":"signed_v1","signed_at":"2026-05-18T04:24:04.575716Z","signed_message":"canonical_sha256_bytes"},"source_id":"1104.3518","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:f51fef6a16e73b22c9c4166b164ff89b817ea757d2c700a1ac1af19419abaeb5","sha256:011c22e59b1fc0d3b078b62560393108033c9d9df232b43e64e7717c0bf8e987"],"state_sha256":"d18aa68caafb45c42f67cc3abe3c846e119e6b257d70c26eedb248c72cd8159f"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"F3fQqRUgya5yt85RpuiuTb13wO/VWpP5h7/sEWIxAhu1TPulxxtCkTUzQYw4bi/7x5clpK06niQJZH3rgksAAQ==","signed_message":"bundle_sha256_bytes","signed_at":"2026-05-26T10:23:54.442644Z","bundle_sha256":"68fab23666d74cfda67cfc0625538a9ec8157c288224e44f80c52e44f3efc158"}}