{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2017:AQFB2QC35SXNFT3MAB4XTWCJEK","short_pith_number":"pith:AQFB2QC3","schema_version":"1.0","canonical_sha256":"040a1d405becaed2cf6c007979d8492283ee8e76488854fd5d5b8df0d16895ef","source":{"kind":"arxiv","id":"1710.11254","version":2},"attestation_state":"computed","paper":{"title":"Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.plasm-ph","authors_text":"Abhijit Sen, Alexander Khrabrov, Igor Kaganovich, Predhiman Kaw, Sarveshwar Sharma","submitted_at":"2017-10-30T21:50:16Z","abstract_excerpt":"An independent control of the flux and energy of ions impacting on an object immersed in a plasma is often desirable for many industrial processes such as microelectronics manufacturing. We demonstrate that a simultaneous control of these quantities is possible by a suitable choice of a static magnetic field applied parallel to the plane electrodes in a standard single frequency capacitively coupled plasma device. Our particle-in-cell simulations show a 60% reduction in the sheath width (that improves control of ion energy) and a four fold increase in the ion flux at the electrode as a consequ"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1710.11254","kind":"arxiv","version":2},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.plasm-ph","submitted_at":"2017-10-30T21:50:16Z","cross_cats_sorted":[],"title_canon_sha256":"368544424d858d5f3c30ce714bb7c5d01e9a7f375e19606aac2ede12315979b0","abstract_canon_sha256":"0c52442fd723bf77d22b936b7cbad0a00c4cef16c696c4f9fe9d37d84fabab22"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T00:07:11.671214Z","signature_b64":"LQ7nbLQC9ALNGflZcmoOcnFjVZ7l7H7ZnfoA1YZrQ9lqUlu/oNIvIQeFLmiBIs9yPxbqgZdXJaaGLk4v28NqDA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"040a1d405becaed2cf6c007979d8492283ee8e76488854fd5d5b8df0d16895ef","last_reissued_at":"2026-05-18T00:07:11.670523Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T00:07:11.670523Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.plasm-ph","authors_text":"Abhijit Sen, Alexander Khrabrov, Igor Kaganovich, Predhiman Kaw, Sarveshwar Sharma","submitted_at":"2017-10-30T21:50:16Z","abstract_excerpt":"An independent control of the flux and energy of ions impacting on an object immersed in a plasma is often desirable for many industrial processes such as microelectronics manufacturing. We demonstrate that a simultaneous control of these quantities is possible by a suitable choice of a static magnetic field applied parallel to the plane electrodes in a standard single frequency capacitively coupled plasma device. Our particle-in-cell simulations show a 60% reduction in the sheath width (that improves control of ion energy) and a four fold increase in the ion flux at the electrode as a consequ"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1710.11254","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1710.11254","created_at":"2026-05-18T00:07:11.670624+00:00"},{"alias_kind":"arxiv_version","alias_value":"1710.11254v2","created_at":"2026-05-18T00:07:11.670624+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1710.11254","created_at":"2026-05-18T00:07:11.670624+00:00"},{"alias_kind":"pith_short_12","alias_value":"AQFB2QC35SXN","created_at":"2026-05-18T12:31:05.417338+00:00"},{"alias_kind":"pith_short_16","alias_value":"AQFB2QC35SXNFT3M","created_at":"2026-05-18T12:31:05.417338+00:00"},{"alias_kind":"pith_short_8","alias_value":"AQFB2QC3","created_at":"2026-05-18T12:31:05.417338+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/AQFB2QC35SXNFT3MAB4XTWCJEK","json":"https://pith.science/pith/AQFB2QC35SXNFT3MAB4XTWCJEK.json","graph_json":"https://pith.science/api/pith-number/AQFB2QC35SXNFT3MAB4XTWCJEK/graph.json","events_json":"https://pith.science/api/pith-number/AQFB2QC35SXNFT3MAB4XTWCJEK/events.json","paper":"https://pith.science/paper/AQFB2QC3"},"agent_actions":{"view_html":"https://pith.science/pith/AQFB2QC35SXNFT3MAB4XTWCJEK","download_json":"https://pith.science/pith/AQFB2QC35SXNFT3MAB4XTWCJEK.json","view_paper":"https://pith.science/paper/AQFB2QC3","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1710.11254&json=true","fetch_graph":"https://pith.science/api/pith-number/AQFB2QC35SXNFT3MAB4XTWCJEK/graph.json","fetch_events":"https://pith.science/api/pith-number/AQFB2QC35SXNFT3MAB4XTWCJEK/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/AQFB2QC35SXNFT3MAB4XTWCJEK/action/timestamp_anchor","attest_storage":"https://pith.science/pith/AQFB2QC35SXNFT3MAB4XTWCJEK/action/storage_attestation","attest_author":"https://pith.science/pith/AQFB2QC35SXNFT3MAB4XTWCJEK/action/author_attestation","sign_citation":"https://pith.science/pith/AQFB2QC35SXNFT3MAB4XTWCJEK/action/citation_signature","submit_replication":"https://pith.science/pith/AQFB2QC35SXNFT3MAB4XTWCJEK/action/replication_record"}},"created_at":"2026-05-18T00:07:11.670624+00:00","updated_at":"2026-05-18T00:07:11.670624+00:00"}