{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2012:AZVB77EZGDQFJQZQY44AXNL7CM","short_pith_number":"pith:AZVB77EZ","schema_version":"1.0","canonical_sha256":"066a1ffc9930e054c330c7380bb57f13113dce252f6dd803c80b97379f556e89","source":{"kind":"arxiv","id":"1205.4045","version":1},"attestation_state":"computed","paper":{"title":"Measuring roughness of buried interfaces by sputter depth profiling","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.chem-ph"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"A.V. Zinovev, C.E. Tripa, I.V. Veryovkin, J.A. Klug, J.W. Elam, S.V. Baryshev","submitted_at":"2012-05-17T21:26:25Z","abstract_excerpt":"In this communication, we report results of a high resolution sputter depth profiling analysis of a stack of 16 alternating MgO and ZnO nanolayers grown by atomic layer deposition (ALD) with thickness of ~5.5 nm per layer. We used an improved dual beam approach featuring a low energy normally incident direct current sputtering ion beam (first beam). Intensities of 24Mg+ and 64Zn+ secondary ions generated by a pulsed analysis ion beam (second beam) were measured as a function of sample depth by time-of-flight secondary ion mass spectrometry (TOF SIMS). Experimental results of this dual beam TOF"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1205.4045","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2012-05-17T21:26:25Z","cross_cats_sorted":["physics.chem-ph"],"title_canon_sha256":"78261d699ed5ad5f87082a4f1ce4af7a3bca1d8d42b6797d15484fe41d6827a7","abstract_canon_sha256":"570db39be6a9c30462bc4ad6e5ea93948f2629ad87e4fea79f015cb479b95673"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T02:56:04.088415Z","signature_b64":"MAhc9LJsKJWvfANVZM11jUjdceNxFQa9ah7+EPTFv3sFv5DAHq7EANK7QdVRRhYKbiXOK3jU1rmTQML34Fl/Bw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"066a1ffc9930e054c330c7380bb57f13113dce252f6dd803c80b97379f556e89","last_reissued_at":"2026-05-18T02:56:04.087888Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T02:56:04.087888Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Measuring roughness of buried interfaces by sputter depth profiling","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.chem-ph"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"A.V. Zinovev, C.E. Tripa, I.V. Veryovkin, J.A. Klug, J.W. Elam, S.V. Baryshev","submitted_at":"2012-05-17T21:26:25Z","abstract_excerpt":"In this communication, we report results of a high resolution sputter depth profiling analysis of a stack of 16 alternating MgO and ZnO nanolayers grown by atomic layer deposition (ALD) with thickness of ~5.5 nm per layer. We used an improved dual beam approach featuring a low energy normally incident direct current sputtering ion beam (first beam). Intensities of 24Mg+ and 64Zn+ secondary ions generated by a pulsed analysis ion beam (second beam) were measured as a function of sample depth by time-of-flight secondary ion mass spectrometry (TOF SIMS). Experimental results of this dual beam TOF"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1205.4045","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1205.4045","created_at":"2026-05-18T02:56:04.087978+00:00"},{"alias_kind":"arxiv_version","alias_value":"1205.4045v1","created_at":"2026-05-18T02:56:04.087978+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1205.4045","created_at":"2026-05-18T02:56:04.087978+00:00"},{"alias_kind":"pith_short_12","alias_value":"AZVB77EZGDQF","created_at":"2026-05-18T12:26:58.693483+00:00"},{"alias_kind":"pith_short_16","alias_value":"AZVB77EZGDQFJQZQ","created_at":"2026-05-18T12:26:58.693483+00:00"},{"alias_kind":"pith_short_8","alias_value":"AZVB77EZ","created_at":"2026-05-18T12:26:58.693483+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/AZVB77EZGDQFJQZQY44AXNL7CM","json":"https://pith.science/pith/AZVB77EZGDQFJQZQY44AXNL7CM.json","graph_json":"https://pith.science/api/pith-number/AZVB77EZGDQFJQZQY44AXNL7CM/graph.json","events_json":"https://pith.science/api/pith-number/AZVB77EZGDQFJQZQY44AXNL7CM/events.json","paper":"https://pith.science/paper/AZVB77EZ"},"agent_actions":{"view_html":"https://pith.science/pith/AZVB77EZGDQFJQZQY44AXNL7CM","download_json":"https://pith.science/pith/AZVB77EZGDQFJQZQY44AXNL7CM.json","view_paper":"https://pith.science/paper/AZVB77EZ","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1205.4045&json=true","fetch_graph":"https://pith.science/api/pith-number/AZVB77EZGDQFJQZQY44AXNL7CM/graph.json","fetch_events":"https://pith.science/api/pith-number/AZVB77EZGDQFJQZQY44AXNL7CM/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/AZVB77EZGDQFJQZQY44AXNL7CM/action/timestamp_anchor","attest_storage":"https://pith.science/pith/AZVB77EZGDQFJQZQY44AXNL7CM/action/storage_attestation","attest_author":"https://pith.science/pith/AZVB77EZGDQFJQZQY44AXNL7CM/action/author_attestation","sign_citation":"https://pith.science/pith/AZVB77EZGDQFJQZQY44AXNL7CM/action/citation_signature","submit_replication":"https://pith.science/pith/AZVB77EZGDQFJQZQY44AXNL7CM/action/replication_record"}},"created_at":"2026-05-18T02:56:04.087978+00:00","updated_at":"2026-05-18T02:56:04.087978+00:00"}