{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2023:B55QTYGKZ6O7FKNW4SP55IBZM7","short_pith_number":"pith:B55QTYGK","schema_version":"1.0","canonical_sha256":"0f7b09e0cacf9df2a9b6e49fdea03967c0b8038f5709f5ebb3a514c816d78db0","source":{"kind":"arxiv","id":"2303.14335","version":1},"attestation_state":"computed","paper":{"title":"GPU-accelerated Matrix Cover Algorithm for Multiple Patterning Layout Decomposition","license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","headline":"","cross_cats":["cs.AR"],"primary_cat":"cs.AI","authors_text":"Bei Yu, Guojin Chen, Haoyu Yang","submitted_at":"2023-03-25T02:51:12Z","abstract_excerpt":"Multiple patterning lithography (MPL) is regarded as one of the most promising ways of overcoming the resolution limitations of conventional optical lithography due to the delay of next-generation lithography technology. As the feature size continues to decrease, layout decomposition for multiple patterning lithography (MPLD) technology is becoming increasingly crucial for improving the manufacturability in advanced nodes. The decomposition process refers to assigning the layout features to different mask layers according to the design rules and density requirements. When the number of masks $"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"2303.14335","kind":"arxiv","version":1},"metadata":{"license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","primary_cat":"cs.AI","submitted_at":"2023-03-25T02:51:12Z","cross_cats_sorted":["cs.AR"],"title_canon_sha256":"feda26ce6df13675694b9ab13b5d7c4021f6d2d7d47ec74384430566c06dd075","abstract_canon_sha256":"fa0e0488c28904804af36d91a12fc58db0cb4f27e2a4d28345f48d80f18a67c1"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T05:54:39.884758Z","signature_b64":"Iras0eEwlBQ4d8bwnsVXhwXns0GUj//Xw6i5YeT0eGUcvqa02hI1y83mpOGuv4/z/j0Q3JDGZpS4t5JlU7ITCw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"0f7b09e0cacf9df2a9b6e49fdea03967c0b8038f5709f5ebb3a514c816d78db0","last_reissued_at":"2026-07-05T05:54:39.884325Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T05:54:39.884325Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"GPU-accelerated Matrix Cover Algorithm for Multiple Patterning Layout Decomposition","license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","headline":"","cross_cats":["cs.AR"],"primary_cat":"cs.AI","authors_text":"Bei Yu, Guojin Chen, Haoyu Yang","submitted_at":"2023-03-25T02:51:12Z","abstract_excerpt":"Multiple patterning lithography (MPL) is regarded as one of the most promising ways of overcoming the resolution limitations of conventional optical lithography due to the delay of next-generation lithography technology. As the feature size continues to decrease, layout decomposition for multiple patterning lithography (MPLD) technology is becoming increasingly crucial for improving the manufacturability in advanced nodes. The decomposition process refers to assigning the layout features to different mask layers according to the design rules and density requirements. When the number of masks $"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2303.14335","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2303.14335/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"2303.14335","created_at":"2026-07-05T05:54:39.884386+00:00"},{"alias_kind":"arxiv_version","alias_value":"2303.14335v1","created_at":"2026-07-05T05:54:39.884386+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2303.14335","created_at":"2026-07-05T05:54:39.884386+00:00"},{"alias_kind":"pith_short_12","alias_value":"B55QTYGKZ6O7","created_at":"2026-07-05T05:54:39.884386+00:00"},{"alias_kind":"pith_short_16","alias_value":"B55QTYGKZ6O7FKNW","created_at":"2026-07-05T05:54:39.884386+00:00"},{"alias_kind":"pith_short_8","alias_value":"B55QTYGK","created_at":"2026-07-05T05:54:39.884386+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/B55QTYGKZ6O7FKNW4SP55IBZM7","json":"https://pith.science/pith/B55QTYGKZ6O7FKNW4SP55IBZM7.json","graph_json":"https://pith.science/api/pith-number/B55QTYGKZ6O7FKNW4SP55IBZM7/graph.json","events_json":"https://pith.science/api/pith-number/B55QTYGKZ6O7FKNW4SP55IBZM7/events.json","paper":"https://pith.science/paper/B55QTYGK"},"agent_actions":{"view_html":"https://pith.science/pith/B55QTYGKZ6O7FKNW4SP55IBZM7","download_json":"https://pith.science/pith/B55QTYGKZ6O7FKNW4SP55IBZM7.json","view_paper":"https://pith.science/paper/B55QTYGK","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=2303.14335&json=true","fetch_graph":"https://pith.science/api/pith-number/B55QTYGKZ6O7FKNW4SP55IBZM7/graph.json","fetch_events":"https://pith.science/api/pith-number/B55QTYGKZ6O7FKNW4SP55IBZM7/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/B55QTYGKZ6O7FKNW4SP55IBZM7/action/timestamp_anchor","attest_storage":"https://pith.science/pith/B55QTYGKZ6O7FKNW4SP55IBZM7/action/storage_attestation","attest_author":"https://pith.science/pith/B55QTYGKZ6O7FKNW4SP55IBZM7/action/author_attestation","sign_citation":"https://pith.science/pith/B55QTYGKZ6O7FKNW4SP55IBZM7/action/citation_signature","submit_replication":"https://pith.science/pith/B55QTYGKZ6O7FKNW4SP55IBZM7/action/replication_record"}},"created_at":"2026-07-05T05:54:39.884386+00:00","updated_at":"2026-07-05T05:54:39.884386+00:00"}