{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2019:BALTQ47UXZV4AUJKREOT7LHHUN","short_pith_number":"pith:BALTQ47U","schema_version":"1.0","canonical_sha256":"08173873f4be6bc0512a891d3face7a3745a2b1a8d8e13ac75bc675b7e449279","source":{"kind":"arxiv","id":"1901.01682","version":1},"attestation_state":"computed","paper":{"title":"A wet etching method for few-layer black phosphorus with an atomic accuracy and compatibility with major lithography techniques","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Guangrui (Maggie) Xia, Karen Kavanagh, Tao Fang, Teren Liu","submitted_at":"2019-01-07T07:06:13Z","abstract_excerpt":"This paper reports a few-layer black phosphorus thickness pattern fabricated by a top-down nanofabrication approach. This was achieved by a new wet etching process that can etch selected regions of few-layer black phosphorus with an atomic layer accuracy. This method is deep-UV and e-beam lithography process compatible,and is free of oxygen and other common doping sources. It provides a feasible patterning approach for largescale manufacturing of few-layer BP materials and devices."},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1901.01682","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2019-01-07T07:06:13Z","cross_cats_sorted":[],"title_canon_sha256":"ecce1c4b664b2642988716565b6cf4766e2fcd2c18b029ce91c1d75d65c4b8b5","abstract_canon_sha256":"895f355c2024e9f76e58802cb6c3a861e51b9d04895c9b9ba9fe1eb130f516b5"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-17T23:56:51.467796Z","signature_b64":"wXzUhWX74PxsaJoiisVKrkaUiBFlxeAL4j2yZ+KrylVXZrn4sL9zK9yu+Q+I6UYvbVx9AGiS6K97dP+Hm+ehDA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"08173873f4be6bc0512a891d3face7a3745a2b1a8d8e13ac75bc675b7e449279","last_reissued_at":"2026-05-17T23:56:51.467418Z","signature_status":"signed_v1","first_computed_at":"2026-05-17T23:56:51.467418Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"A wet etching method for few-layer black phosphorus with an atomic accuracy and compatibility with major lithography techniques","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Guangrui (Maggie) Xia, Karen Kavanagh, Tao Fang, Teren Liu","submitted_at":"2019-01-07T07:06:13Z","abstract_excerpt":"This paper reports a few-layer black phosphorus thickness pattern fabricated by a top-down nanofabrication approach. This was achieved by a new wet etching process that can etch selected regions of few-layer black phosphorus with an atomic layer accuracy. This method is deep-UV and e-beam lithography process compatible,and is free of oxygen and other common doping sources. It provides a feasible patterning approach for largescale manufacturing of few-layer BP materials and devices."},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1901.01682","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1901.01682","created_at":"2026-05-17T23:56:51.467476+00:00"},{"alias_kind":"arxiv_version","alias_value":"1901.01682v1","created_at":"2026-05-17T23:56:51.467476+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1901.01682","created_at":"2026-05-17T23:56:51.467476+00:00"},{"alias_kind":"pith_short_12","alias_value":"BALTQ47UXZV4","created_at":"2026-05-18T12:33:12.712433+00:00"},{"alias_kind":"pith_short_16","alias_value":"BALTQ47UXZV4AUJK","created_at":"2026-05-18T12:33:12.712433+00:00"},{"alias_kind":"pith_short_8","alias_value":"BALTQ47U","created_at":"2026-05-18T12:33:12.712433+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/BALTQ47UXZV4AUJKREOT7LHHUN","json":"https://pith.science/pith/BALTQ47UXZV4AUJKREOT7LHHUN.json","graph_json":"https://pith.science/api/pith-number/BALTQ47UXZV4AUJKREOT7LHHUN/graph.json","events_json":"https://pith.science/api/pith-number/BALTQ47UXZV4AUJKREOT7LHHUN/events.json","paper":"https://pith.science/paper/BALTQ47U"},"agent_actions":{"view_html":"https://pith.science/pith/BALTQ47UXZV4AUJKREOT7LHHUN","download_json":"https://pith.science/pith/BALTQ47UXZV4AUJKREOT7LHHUN.json","view_paper":"https://pith.science/paper/BALTQ47U","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1901.01682&json=true","fetch_graph":"https://pith.science/api/pith-number/BALTQ47UXZV4AUJKREOT7LHHUN/graph.json","fetch_events":"https://pith.science/api/pith-number/BALTQ47UXZV4AUJKREOT7LHHUN/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/BALTQ47UXZV4AUJKREOT7LHHUN/action/timestamp_anchor","attest_storage":"https://pith.science/pith/BALTQ47UXZV4AUJKREOT7LHHUN/action/storage_attestation","attest_author":"https://pith.science/pith/BALTQ47UXZV4AUJKREOT7LHHUN/action/author_attestation","sign_citation":"https://pith.science/pith/BALTQ47UXZV4AUJKREOT7LHHUN/action/citation_signature","submit_replication":"https://pith.science/pith/BALTQ47UXZV4AUJKREOT7LHHUN/action/replication_record"}},"created_at":"2026-05-17T23:56:51.467476+00:00","updated_at":"2026-05-17T23:56:51.467476+00:00"}