{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2017:CX67ASW7FGTOQOLZFD24I7AIHW","short_pith_number":"pith:CX67ASW7","schema_version":"1.0","canonical_sha256":"15fdf04adf29a6e8397928f5c47c083da1f639188e46a6537317673cbfcfe1d8","source":{"kind":"arxiv","id":"1706.10065","version":1},"attestation_state":"computed","paper":{"title":"Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.comp-ph"],"primary_cat":"cond-mat.mes-hall","authors_text":"A. F\\\"orster, C. Wagner, J. Schuster, S. Gemming","submitted_at":"2017-06-30T08:47:50Z","abstract_excerpt":"We present theoretical investigations of a k-restore process for damaged pourous ultra-low-k (ULK) materials. The process is based on plasma enhanced fragmented silylation precursors to replace k-value damaging, polar Si-OH and Si-H bonds by k-value lowering Si-CH$_{3}$ bonds. We employ density functional theory (DFT) to determine the favored fragments of silylation precursors and show the successful repair of damaged bonds on our model system. This model system consists of a small set of ULK-fragments which represent various damaged states of ULK materials. Our approach provides a fast scanni"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1706.10065","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mes-hall","submitted_at":"2017-06-30T08:47:50Z","cross_cats_sorted":["physics.comp-ph"],"title_canon_sha256":"2aa8fad3e90c32988fb91b4c07df576cc5aa6107c128fbeb1fe214aab9b65934","abstract_canon_sha256":"4d3fe0fc91821f839f743fca011ec5974c0e8417f9053fcce18ac57f59287a0a"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T00:41:11.532863Z","signature_b64":"rHVXuxg/ERpuqpOhahn0o3sejFMGVnFvxgBhwc9TCU5ZHFpAoHyyLGE+nW2PaBs1dlY/YKZCeX8oO9g1dxrXDA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"15fdf04adf29a6e8397928f5c47c083da1f639188e46a6537317673cbfcfe1d8","last_reissued_at":"2026-05-18T00:41:11.532142Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T00:41:11.532142Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.comp-ph"],"primary_cat":"cond-mat.mes-hall","authors_text":"A. F\\\"orster, C. Wagner, J. Schuster, S. Gemming","submitted_at":"2017-06-30T08:47:50Z","abstract_excerpt":"We present theoretical investigations of a k-restore process for damaged pourous ultra-low-k (ULK) materials. The process is based on plasma enhanced fragmented silylation precursors to replace k-value damaging, polar Si-OH and Si-H bonds by k-value lowering Si-CH$_{3}$ bonds. We employ density functional theory (DFT) to determine the favored fragments of silylation precursors and show the successful repair of damaged bonds on our model system. This model system consists of a small set of ULK-fragments which represent various damaged states of ULK materials. Our approach provides a fast scanni"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1706.10065","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1706.10065","created_at":"2026-05-18T00:41:11.532262+00:00"},{"alias_kind":"arxiv_version","alias_value":"1706.10065v1","created_at":"2026-05-18T00:41:11.532262+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1706.10065","created_at":"2026-05-18T00:41:11.532262+00:00"},{"alias_kind":"pith_short_12","alias_value":"CX67ASW7FGTO","created_at":"2026-05-18T12:31:10.602751+00:00"},{"alias_kind":"pith_short_16","alias_value":"CX67ASW7FGTOQOLZ","created_at":"2026-05-18T12:31:10.602751+00:00"},{"alias_kind":"pith_short_8","alias_value":"CX67ASW7","created_at":"2026-05-18T12:31:10.602751+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/CX67ASW7FGTOQOLZFD24I7AIHW","json":"https://pith.science/pith/CX67ASW7FGTOQOLZFD24I7AIHW.json","graph_json":"https://pith.science/api/pith-number/CX67ASW7FGTOQOLZFD24I7AIHW/graph.json","events_json":"https://pith.science/api/pith-number/CX67ASW7FGTOQOLZFD24I7AIHW/events.json","paper":"https://pith.science/paper/CX67ASW7"},"agent_actions":{"view_html":"https://pith.science/pith/CX67ASW7FGTOQOLZFD24I7AIHW","download_json":"https://pith.science/pith/CX67ASW7FGTOQOLZFD24I7AIHW.json","view_paper":"https://pith.science/paper/CX67ASW7","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1706.10065&json=true","fetch_graph":"https://pith.science/api/pith-number/CX67ASW7FGTOQOLZFD24I7AIHW/graph.json","fetch_events":"https://pith.science/api/pith-number/CX67ASW7FGTOQOLZFD24I7AIHW/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/CX67ASW7FGTOQOLZFD24I7AIHW/action/timestamp_anchor","attest_storage":"https://pith.science/pith/CX67ASW7FGTOQOLZFD24I7AIHW/action/storage_attestation","attest_author":"https://pith.science/pith/CX67ASW7FGTOQOLZFD24I7AIHW/action/author_attestation","sign_citation":"https://pith.science/pith/CX67ASW7FGTOQOLZFD24I7AIHW/action/citation_signature","submit_replication":"https://pith.science/pith/CX67ASW7FGTOQOLZFD24I7AIHW/action/replication_record"}},"created_at":"2026-05-18T00:41:11.532262+00:00","updated_at":"2026-05-18T00:41:11.532262+00:00"}