{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2019:DZZAQGEBLNG2LX2SWXYS2GM2BT","short_pith_number":"pith:DZZAQGEB","schema_version":"1.0","canonical_sha256":"1e720818815b4da5df52b5f12d199a0cc8343b630bad70464e760a8593af339b","source":{"kind":"arxiv","id":"1911.06490","version":3},"attestation_state":"computed","paper":{"title":"Resist and Transfer Free Patterned CVD Graphene Growth on ALD Molybdenum Carbide Nano Layers","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["cond-mat.mtrl-sci"],"primary_cat":"physics.app-ph","authors_text":"Ageeth A. Bol, Chenhui Li, Eldad Grady, Oded Raz, W.M.M. Kessels","submitted_at":"2019-11-15T06:32:27Z","abstract_excerpt":"Multilayer graphene (MLG) films were grown by chemical vapour deposition (CVD) on molybdenum carbide ($MoC_{x}$) substrates. We fabricated the catalytic $MoC_{x}$ films by plasma enhanced atomic layer deposition (PEALD). The mechanism of graphene growth is studied and analysed for amorphous and crystalline $MoC_{x}$ films. In addition, the unique advantages of catalytic substrate PEALD are demonstrated in two approaches to graphene device fabrication. First, we present a complete bottom up, resist-free patterned graphene growth (GG) on pre-patterned $MoC_{x}$ PEALD performed at 50$^{\\circ}C$. "},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1911.06490","kind":"arxiv","version":3},"metadata":{"license":"http://creativecommons.org/licenses/by/4.0/","primary_cat":"physics.app-ph","submitted_at":"2019-11-15T06:32:27Z","cross_cats_sorted":["cond-mat.mtrl-sci"],"title_canon_sha256":"1ba75196f22dd87a9f2e27591d1335091caf92fe6f9ad48358106bd2d23a2b3f","abstract_canon_sha256":"91b71bf2109f3c71f5c22752dfb437f36a521d36900345a3ca82ab2f297168df"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T00:28:56.266115Z","signature_b64":"8KkxuU+xoPw1J1QgiHh93iYftdUNfz1V0qa5MJdm5GSsTPJDagI73od6wi9B5ogfIyz2zRBx1uX6dqWbvHumDA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"1e720818815b4da5df52b5f12d199a0cc8343b630bad70464e760a8593af339b","last_reissued_at":"2026-07-05T00:28:56.265705Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T00:28:56.265705Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Resist and Transfer Free Patterned CVD Graphene Growth on ALD Molybdenum Carbide Nano Layers","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["cond-mat.mtrl-sci"],"primary_cat":"physics.app-ph","authors_text":"Ageeth A. Bol, Chenhui Li, Eldad Grady, Oded Raz, W.M.M. Kessels","submitted_at":"2019-11-15T06:32:27Z","abstract_excerpt":"Multilayer graphene (MLG) films were grown by chemical vapour deposition (CVD) on molybdenum carbide ($MoC_{x}$) substrates. We fabricated the catalytic $MoC_{x}$ films by plasma enhanced atomic layer deposition (PEALD). The mechanism of graphene growth is studied and analysed for amorphous and crystalline $MoC_{x}$ films. In addition, the unique advantages of catalytic substrate PEALD are demonstrated in two approaches to graphene device fabrication. First, we present a complete bottom up, resist-free patterned graphene growth (GG) on pre-patterned $MoC_{x}$ PEALD performed at 50$^{\\circ}C$. "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1911.06490","kind":"arxiv","version":3},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/1911.06490/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1911.06490","created_at":"2026-07-05T00:28:56.265762+00:00"},{"alias_kind":"arxiv_version","alias_value":"1911.06490v3","created_at":"2026-07-05T00:28:56.265762+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1911.06490","created_at":"2026-07-05T00:28:56.265762+00:00"},{"alias_kind":"pith_short_12","alias_value":"DZZAQGEBLNG2","created_at":"2026-07-05T00:28:56.265762+00:00"},{"alias_kind":"pith_short_16","alias_value":"DZZAQGEBLNG2LX2S","created_at":"2026-07-05T00:28:56.265762+00:00"},{"alias_kind":"pith_short_8","alias_value":"DZZAQGEB","created_at":"2026-07-05T00:28:56.265762+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/DZZAQGEBLNG2LX2SWXYS2GM2BT","json":"https://pith.science/pith/DZZAQGEBLNG2LX2SWXYS2GM2BT.json","graph_json":"https://pith.science/api/pith-number/DZZAQGEBLNG2LX2SWXYS2GM2BT/graph.json","events_json":"https://pith.science/api/pith-number/DZZAQGEBLNG2LX2SWXYS2GM2BT/events.json","paper":"https://pith.science/paper/DZZAQGEB"},"agent_actions":{"view_html":"https://pith.science/pith/DZZAQGEBLNG2LX2SWXYS2GM2BT","download_json":"https://pith.science/pith/DZZAQGEBLNG2LX2SWXYS2GM2BT.json","view_paper":"https://pith.science/paper/DZZAQGEB","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1911.06490&json=true","fetch_graph":"https://pith.science/api/pith-number/DZZAQGEBLNG2LX2SWXYS2GM2BT/graph.json","fetch_events":"https://pith.science/api/pith-number/DZZAQGEBLNG2LX2SWXYS2GM2BT/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/DZZAQGEBLNG2LX2SWXYS2GM2BT/action/timestamp_anchor","attest_storage":"https://pith.science/pith/DZZAQGEBLNG2LX2SWXYS2GM2BT/action/storage_attestation","attest_author":"https://pith.science/pith/DZZAQGEBLNG2LX2SWXYS2GM2BT/action/author_attestation","sign_citation":"https://pith.science/pith/DZZAQGEBLNG2LX2SWXYS2GM2BT/action/citation_signature","submit_replication":"https://pith.science/pith/DZZAQGEBLNG2LX2SWXYS2GM2BT/action/replication_record"}},"created_at":"2026-07-05T00:28:56.265762+00:00","updated_at":"2026-07-05T00:28:56.265762+00:00"}