{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2014:EZD5UFY454DZSRSHT3ZEZ62WFD","short_pith_number":"pith:EZD5UFY4","schema_version":"1.0","canonical_sha256":"2647da171cef079946479ef24cfb5628c7492a1001464d1213a39d3c5d0bbfb7","source":{"kind":"arxiv","id":"1410.2611","version":1},"attestation_state":"computed","paper":{"title":"Growth of alpha-beta phase W thin films over steep Al topography in a confocal sputtering machine","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Astrid Tomada, Betty Young, Blas Cabrera, Jeff Yen, John Mark Kreikebaum, Matt Cherry, Paul Brink","submitted_at":"2014-10-09T20:25:55Z","abstract_excerpt":"We report on thin-film processing improvements in the fabrication of superconducting quasiparticle-trap-assisted electrothermal-feedback transition-edge sensors (QETs) used in the design of Cryogenic Dark Matter Search (CDMS) detectors. The work was performed as part of a detector upgrade project that included optimization of a new confocal sputtering system and development of etch recipes compatible with patterning 40 nm-thick, mixed-phase W films deposited on 300-600 nm-thick, patterned Al. We found that our standard exothermic Al wet etch recipes provided inadequate W/Al interfaces and led "},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1410.2611","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2014-10-09T20:25:55Z","cross_cats_sorted":[],"title_canon_sha256":"83554db6848829c7456408245424d8d9274625e98d12b41098290a84668a3f9a","abstract_canon_sha256":"930e4d0607a7d22ed815d75de3a026f1b887bc4d09552776e7a8ab8d553e74c3"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T02:40:37.861509Z","signature_b64":"BbNwS7BnyHqcb+b2FCA3wPSt1vvqkud55hGYZSmrMgKa0LuSdGNoMYLkgMaUiIn1+sAwq3H+TsHdKfnJF8yFAw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"2647da171cef079946479ef24cfb5628c7492a1001464d1213a39d3c5d0bbfb7","last_reissued_at":"2026-05-18T02:40:37.860799Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T02:40:37.860799Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Growth of alpha-beta phase W thin films over steep Al topography in a confocal sputtering machine","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Astrid Tomada, Betty Young, Blas Cabrera, Jeff Yen, John Mark Kreikebaum, Matt Cherry, Paul Brink","submitted_at":"2014-10-09T20:25:55Z","abstract_excerpt":"We report on thin-film processing improvements in the fabrication of superconducting quasiparticle-trap-assisted electrothermal-feedback transition-edge sensors (QETs) used in the design of Cryogenic Dark Matter Search (CDMS) detectors. The work was performed as part of a detector upgrade project that included optimization of a new confocal sputtering system and development of etch recipes compatible with patterning 40 nm-thick, mixed-phase W films deposited on 300-600 nm-thick, patterned Al. We found that our standard exothermic Al wet etch recipes provided inadequate W/Al interfaces and led "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1410.2611","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1410.2611","created_at":"2026-05-18T02:40:37.860910+00:00"},{"alias_kind":"arxiv_version","alias_value":"1410.2611v1","created_at":"2026-05-18T02:40:37.860910+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1410.2611","created_at":"2026-05-18T02:40:37.860910+00:00"},{"alias_kind":"pith_short_12","alias_value":"EZD5UFY454DZ","created_at":"2026-05-18T12:28:28.263976+00:00"},{"alias_kind":"pith_short_16","alias_value":"EZD5UFY454DZSRSH","created_at":"2026-05-18T12:28:28.263976+00:00"},{"alias_kind":"pith_short_8","alias_value":"EZD5UFY4","created_at":"2026-05-18T12:28:28.263976+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/EZD5UFY454DZSRSHT3ZEZ62WFD","json":"https://pith.science/pith/EZD5UFY454DZSRSHT3ZEZ62WFD.json","graph_json":"https://pith.science/api/pith-number/EZD5UFY454DZSRSHT3ZEZ62WFD/graph.json","events_json":"https://pith.science/api/pith-number/EZD5UFY454DZSRSHT3ZEZ62WFD/events.json","paper":"https://pith.science/paper/EZD5UFY4"},"agent_actions":{"view_html":"https://pith.science/pith/EZD5UFY454DZSRSHT3ZEZ62WFD","download_json":"https://pith.science/pith/EZD5UFY454DZSRSHT3ZEZ62WFD.json","view_paper":"https://pith.science/paper/EZD5UFY4","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1410.2611&json=true","fetch_graph":"https://pith.science/api/pith-number/EZD5UFY454DZSRSHT3ZEZ62WFD/graph.json","fetch_events":"https://pith.science/api/pith-number/EZD5UFY454DZSRSHT3ZEZ62WFD/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/EZD5UFY454DZSRSHT3ZEZ62WFD/action/timestamp_anchor","attest_storage":"https://pith.science/pith/EZD5UFY454DZSRSHT3ZEZ62WFD/action/storage_attestation","attest_author":"https://pith.science/pith/EZD5UFY454DZSRSHT3ZEZ62WFD/action/author_attestation","sign_citation":"https://pith.science/pith/EZD5UFY454DZSRSHT3ZEZ62WFD/action/citation_signature","submit_replication":"https://pith.science/pith/EZD5UFY454DZSRSHT3ZEZ62WFD/action/replication_record"}},"created_at":"2026-05-18T02:40:37.860910+00:00","updated_at":"2026-05-18T02:40:37.860910+00:00"}