{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2019:GLEFXA4U2JW2ZAPLFK7XQLDCSS","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"e0ac478951ec34dad6493a14118a2cdb67cb2256adefee58c8f26fb72c3c5f20","cross_cats_sorted":["stat.ML"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cs.LG","submitted_at":"2019-09-10T14:10:37Z","title_canon_sha256":"e2c916e49122a82272370cc9d915c3b694dd6ea50f533a8d1e6c2e3cd99c2e68"},"schema_version":"1.0","source":{"id":"1910.10067","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1910.10067","created_at":"2026-07-05T00:14:05Z"},{"alias_kind":"arxiv_version","alias_value":"1910.10067v1","created_at":"2026-07-05T00:14:05Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1910.10067","created_at":"2026-07-05T00:14:05Z"},{"alias_kind":"pith_short_12","alias_value":"GLEFXA4U2JW2","created_at":"2026-07-05T00:14:05Z"},{"alias_kind":"pith_short_16","alias_value":"GLEFXA4U2JW2ZAPL","created_at":"2026-07-05T00:14:05Z"},{"alias_kind":"pith_short_8","alias_value":"GLEFXA4U","created_at":"2026-07-05T00:14:05Z"}],"graph_snapshots":[{"event_id":"sha256:56f3f274a61021a60922608c3b2b5b20e2b1c2f440ab307aba8023e04cf8e862","target":"graph","created_at":"2026-07-05T00:14:05Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/1910.10067/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"In computer chip manufacturing, the study of etch patterns on silicon wafers, or metrology, occurs on the nano-scale and is therefore subject to large variation from small, yet significant, perturbations in the manufacturing environment. An enormous amount of information can be gathered from a single etch process, a sequence of actions taken to produce an etched wafer from a blank piece of silicon. Each final wafer, however, is costly to take measurements from, which limits the number of examples available to train a predictive model. Part of the significance of this work is the success we saw","authors_text":"Edward Rietman, Jack Kenney, John Valcore, Scott Riggs","cross_cats":["stat.ML"],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cs.LG","submitted_at":"2019-09-10T14:10:37Z","title":"Deep Learning Regression of VLSI Plasma Etch Metrology"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1910.10067","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:de1e750abf7afaab115ca904d7f36b9918411498be1a8a97ade9dfc4a632d18a","target":"record","created_at":"2026-07-05T00:14:05Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"e0ac478951ec34dad6493a14118a2cdb67cb2256adefee58c8f26fb72c3c5f20","cross_cats_sorted":["stat.ML"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cs.LG","submitted_at":"2019-09-10T14:10:37Z","title_canon_sha256":"e2c916e49122a82272370cc9d915c3b694dd6ea50f533a8d1e6c2e3cd99c2e68"},"schema_version":"1.0","source":{"id":"1910.10067","kind":"arxiv","version":1}},"canonical_sha256":"32c85b8394d26dac81eb2abf782c62948f0ea2ab7bffbb4efefc2fa62bbc747c","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"32c85b8394d26dac81eb2abf782c62948f0ea2ab7bffbb4efefc2fa62bbc747c","first_computed_at":"2026-07-05T00:14:05.368937Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-07-05T00:14:05.368937Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"VnmMpIAbgNkzj9sjjT+HQxGLlEaOm1K/5Y7TXm/Ip9rZJJiU507ZwHWYTRVvQWQgYA2wIn9iVO9Kgq4fSLeRDQ==","signature_status":"signed_v1","signed_at":"2026-07-05T00:14:05.369383Z","signed_message":"canonical_sha256_bytes"},"source_id":"1910.10067","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:de1e750abf7afaab115ca904d7f36b9918411498be1a8a97ade9dfc4a632d18a","sha256:56f3f274a61021a60922608c3b2b5b20e2b1c2f440ab307aba8023e04cf8e862"],"state_sha256":"83c8aef633f0bf327e291f76fc1123db123b9ee7930831ed02add6902825226a"}