{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2026:GXYJYVPROFURYDYUS55FH7HY52","short_pith_number":"pith:GXYJYVPR","schema_version":"1.0","canonical_sha256":"35f09c55f171691c0f14977a53fcf8eebe8cf4fa87d0ae9e5eb8b87bfad5610f","source":{"kind":"arxiv","id":"2608.00212","version":1},"attestation_state":"computed","paper":{"title":"A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.comp-ph"],"primary_cat":"cs.LG","authors_text":"Chang Liu, Ning Hu, Yuan Dong, Yunlei Jiang","submitted_at":"2026-07-31T18:52:27Z","abstract_excerpt":"Spatial atomic layer deposition (SALD) is a leading atmospheric-pressure, high-throughput route to industrial ALD, but design and control are limited by the cost of predicting surface coverage: high-fidelity CFD is far too slow for operating-window scans, while analytic models miss transport modulation such as the gas curtain. We present a physics-chemistry-informed neural network (PCINN), a hybrid surrogate with CFD-level accuracy at real-time speed: a query returns coverage in about 7 ms, roughly 5x10^4 times faster than a CFD solve, reaching a test R^2_log = 0.998 (leave-one-out R^2_raw = 0"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"2608.00212","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cs.LG","submitted_at":"2026-07-31T18:52:27Z","cross_cats_sorted":["physics.comp-ph"],"title_canon_sha256":"0289f4393ebfd2b6426c6f99e6a1651f4cdf4dbf3fe1001cd043e7004cafcaba","abstract_canon_sha256":"e707598f236cd2107f77140e87b1104cb0d35e9daf51de4cb9ce466aaf1624f1"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-08-04T00:34:24.409469Z","signature_b64":"fM/+eJAqK1xX46KZbiiRsRPkZWWHOY2JJpXdLWUHAA/ySynvTCkV/j04ABiEkdpZVydTnt6Z32YD0rVVCdzICw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"35f09c55f171691c0f14977a53fcf8eebe8cf4fa87d0ae9e5eb8b87bfad5610f","last_reissued_at":"2026-08-04T00:34:24.407947Z","signature_status":"signed_v1","first_computed_at":"2026-08-04T00:34:24.407947Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.comp-ph"],"primary_cat":"cs.LG","authors_text":"Chang Liu, Ning Hu, Yuan Dong, Yunlei Jiang","submitted_at":"2026-07-31T18:52:27Z","abstract_excerpt":"Spatial atomic layer deposition (SALD) is a leading atmospheric-pressure, high-throughput route to industrial ALD, but design and control are limited by the cost of predicting surface coverage: high-fidelity CFD is far too slow for operating-window scans, while analytic models miss transport modulation such as the gas curtain. We present a physics-chemistry-informed neural network (PCINN), a hybrid surrogate with CFD-level accuracy at real-time speed: a query returns coverage in about 7 ms, roughly 5x10^4 times faster than a CFD solve, reaching a test R^2_log = 0.998 (leave-one-out R^2_raw = 0"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2608.00212","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2608.00212/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"2608.00212","created_at":"2026-08-04T00:34:24.409101+00:00"},{"alias_kind":"arxiv_version","alias_value":"2608.00212v1","created_at":"2026-08-04T00:34:24.409101+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2608.00212","created_at":"2026-08-04T00:34:24.409101+00:00"},{"alias_kind":"pith_short_12","alias_value":"GXYJYVPROFUR","created_at":"2026-08-04T00:34:24.409101+00:00"},{"alias_kind":"pith_short_16","alias_value":"GXYJYVPROFURYDYU","created_at":"2026-08-04T00:34:24.409101+00:00"},{"alias_kind":"pith_short_8","alias_value":"GXYJYVPR","created_at":"2026-08-04T00:34:24.409101+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/GXYJYVPROFURYDYUS55FH7HY52","json":"https://pith.science/pith/GXYJYVPROFURYDYUS55FH7HY52.json","graph_json":"https://pith.science/api/pith-number/GXYJYVPROFURYDYUS55FH7HY52/graph.json","events_json":"https://pith.science/api/pith-number/GXYJYVPROFURYDYUS55FH7HY52/events.json","paper":"https://pith.science/paper/GXYJYVPR"},"agent_actions":{"view_html":"https://pith.science/pith/GXYJYVPROFURYDYUS55FH7HY52","download_json":"https://pith.science/pith/GXYJYVPROFURYDYUS55FH7HY52.json","view_paper":"https://pith.science/paper/GXYJYVPR","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=2608.00212&json=true","fetch_graph":"https://pith.science/api/pith-number/GXYJYVPROFURYDYUS55FH7HY52/graph.json","fetch_events":"https://pith.science/api/pith-number/GXYJYVPROFURYDYUS55FH7HY52/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/GXYJYVPROFURYDYUS55FH7HY52/action/timestamp_anchor","attest_storage":"https://pith.science/pith/GXYJYVPROFURYDYUS55FH7HY52/action/storage_attestation","attest_author":"https://pith.science/pith/GXYJYVPROFURYDYUS55FH7HY52/action/author_attestation","sign_citation":"https://pith.science/pith/GXYJYVPROFURYDYUS55FH7HY52/action/citation_signature","submit_replication":"https://pith.science/pith/GXYJYVPROFURYDYUS55FH7HY52/action/replication_record"}},"created_at":"2026-08-04T00:34:24.409101+00:00","updated_at":"2026-08-04T00:34:24.409101+00:00"}