{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2026:HYTRVCXWHI2ORY35BSVXQCGFW2","short_pith_number":"pith:HYTRVCXW","canonical_record":{"source":{"id":"2606.22366","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2026-06-21T07:31:24Z","cross_cats_sorted":[],"title_canon_sha256":"5deda6d815372e0c8f311ff58d962e9ec42e3a083fdd0226655d89a385240d55","abstract_canon_sha256":"2a3a34d208797f3ec3972cf6f0df13257487e072e8fa734c2edf5f2582eb3d45"},"schema_version":"1.0"},"canonical_sha256":"3e271a8af63a34e8e37d0cab7808c5b680e627b51b3928ee00ee7ec7672a5c29","source":{"kind":"arxiv","id":"2606.22366","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2606.22366","created_at":"2026-06-23T02:13:36Z"},{"alias_kind":"arxiv_version","alias_value":"2606.22366v1","created_at":"2026-06-23T02:13:36Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2606.22366","created_at":"2026-06-23T02:13:36Z"},{"alias_kind":"pith_short_12","alias_value":"HYTRVCXWHI2O","created_at":"2026-06-23T02:13:36Z"},{"alias_kind":"pith_short_16","alias_value":"HYTRVCXWHI2ORY35","created_at":"2026-06-23T02:13:36Z"},{"alias_kind":"pith_short_8","alias_value":"HYTRVCXW","created_at":"2026-06-23T02:13:36Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2026:HYTRVCXWHI2ORY35BSVXQCGFW2","target":"record","payload":{"canonical_record":{"source":{"id":"2606.22366","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2026-06-21T07:31:24Z","cross_cats_sorted":[],"title_canon_sha256":"5deda6d815372e0c8f311ff58d962e9ec42e3a083fdd0226655d89a385240d55","abstract_canon_sha256":"2a3a34d208797f3ec3972cf6f0df13257487e072e8fa734c2edf5f2582eb3d45"},"schema_version":"1.0"},"canonical_sha256":"3e271a8af63a34e8e37d0cab7808c5b680e627b51b3928ee00ee7ec7672a5c29","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-06-23T02:13:36.444678Z","signature_b64":"FFUxxKJF46mN+D9xXtnXeN0Q/A1rP/OAnbF2k2El4F1/dR8XF7Vxo3Z+z8hi5wuUSW6QVmB4XyoxcnlhJhmkCw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"3e271a8af63a34e8e37d0cab7808c5b680e627b51b3928ee00ee7ec7672a5c29","last_reissued_at":"2026-06-23T02:13:36.444200Z","signature_status":"signed_v1","first_computed_at":"2026-06-23T02:13:36.444200Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"2606.22366","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-06-23T02:13:36Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"xkVGoG82B780CIkkjkWjb3Zj+1tvzLilEvgQwMHuEcbkMHYTna1PVNfN+svMNeAyO03wFMnMjCTh952mM1OGAg==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-07-10T11:41:15.002348Z"},"content_sha256":"d1e8dd76345dfeea2efbbdf608f3cf124e62d84ef5aafae7b78d013452826902","schema_version":"1.0","event_id":"sha256:d1e8dd76345dfeea2efbbdf608f3cf124e62d84ef5aafae7b78d013452826902"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2026:HYTRVCXWHI2ORY35BSVXQCGFW2","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Alignment-Free Nanometric Optical Metrology Enabled by Structured Light","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.optics","authors_text":"Benquan Wang, Che-Chin Chen, Eng Aik Chan, Jun-Yu Ou, Masako Kishida, Songze Li, Xi Xie, Yijie Shen, Yu Wang, Zhenyu Guo","submitted_at":"2026-06-21T07:31:24Z","abstract_excerpt":"Advances in the semiconductor industry are driven by the development of increasingly compact devices featuring intricate etched geometries, the characterization of which essentially requires ultraprecise, label-free, and real-time metrology. However, non-destructive and alignment-free optical metrology of sub-wavelength structures with nanometric resolution remains a major challenge. Here, we demonstrate a novel single-shot, label-free, and alignment-free optical metrology approach for determining the 1D position of sub-wavelength nanostructures, achieving lambda/110 (7.2 nm) precision. The hi"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2606.22366","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2606.22366/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-06-23T02:13:36Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"OqoEtU+pZTcdsSdqFmnosiMSH8Ap3OsznEvNjfufdfm5rLedR1zBBo88aw04+afXvPpvelLcx3zAu3w4xjGHBQ==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-07-10T11:41:15.002726Z"},"content_sha256":"b2ffdfe1db7dcec6b699032239b8b8374ffeccb1e8a9d87a4552b9b422f41e3d","schema_version":"1.0","event_id":"sha256:b2ffdfe1db7dcec6b699032239b8b8374ffeccb1e8a9d87a4552b9b422f41e3d"},{"event_type":"integrity_finding","subject_pith_number":"pith:2026:HYTRVCXWHI2ORY35BSVXQCGFW2","target":"integrity","payload":{"note":"DOI in the printed bibliography is fragmented by whitespace or line breaks. A longer candidate (10.5258/SOTON/xxxxxx.Reference) was visible in the surrounding text but could not be confirmed against doi.org as printed.","snippet":"School of Physics and Astronomy, University of Southampton, SO17 1BJ, UK Corresponding authors Email: yijie.shen@ntu.edu.sg and bruce.ou@soton.ac.uk Abstract Advances in the semiconductor industry are driven by the development of increasing","arxiv_id":"2606.22366","detector":"doi_compliance","evidence":{"ref_index":6,"verdict_class":"incontrovertible","resolved_title":null,"printed_excerpt":"School of Physics and Astronomy, University of Southampton, SO17 1BJ, UK Corresponding authors Email: yijie.shen@ntu.edu.sg and bruce.ou@soton.ac.uk Abstract Advances in the semiconductor industry are driven by the development of increasing","reconstructed_doi":"10.5258/SOTON/xxxxxx.Reference"},"severity":"advisory","ref_index":6,"audited_at":"2026-07-09T19:13:55.213604Z","event_type":"pith.integrity.v1","detected_doi":"10.5258/SOTON/xxxxxx.Reference","detector_url":"https://pith.science/pith-integrity-protocol#doi_compliance","external_url":null,"finding_type":"recoverable_identifier","evidence_hash":"ce173f2920b38123dff946018b6ce778a8ce0f02d4075cddaeebb4cf65dd6bf0","paper_version":2,"verdict_class":"incontrovertible","resolved_title":null,"detector_version":"1.0.0","detected_arxiv_id":null,"integrity_event_id":10439,"payload_sha256":"ba96a81f402132ef263d0c95e7cb7af9258aa6d142753a5efac42cb618638533","signature_b64":"b1mkC3+mUVrcXHHcj3wcg5vA0oeJl6IcyNKjv1nN2T75HFXHMIryu9jgUGJ9fTUjwDAGEDjAhG3/QQcXWlOVCg==","signing_key_id":"pith-v1-2026-05"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-09T19:18:09Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"mw92RNHbFOFL8KHzpYe2e1Wf67AYs1Sg7kBAbqgWoBinIpcKbwQHQaWYLLesDV2W29IgYj6ACspHrCnrjeHiDQ==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-07-10T11:41:15.003569Z"},"content_sha256":"5d97f71ef6588250b2906d19bacd19c1a1f983083428f02c9634c870951431dd","schema_version":"1.0","event_id":"sha256:5d97f71ef6588250b2906d19bacd19c1a1f983083428f02c9634c870951431dd"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/HYTRVCXWHI2ORY35BSVXQCGFW2/bundle.json","state_url":"https://pith.science/pith/HYTRVCXWHI2ORY35BSVXQCGFW2/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/HYTRVCXWHI2ORY35BSVXQCGFW2/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-07-10T11:41:15Z","links":{"resolver":"https://pith.science/pith/HYTRVCXWHI2ORY35BSVXQCGFW2","bundle":"https://pith.science/pith/HYTRVCXWHI2ORY35BSVXQCGFW2/bundle.json","state":"https://pith.science/pith/HYTRVCXWHI2ORY35BSVXQCGFW2/state.json","well_known_bundle":"https://pith.science/.well-known/pith/HYTRVCXWHI2ORY35BSVXQCGFW2/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2026:HYTRVCXWHI2ORY35BSVXQCGFW2","merge_version":"pith-open-graph-merge-v1","event_count":3,"valid_event_count":3,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"2a3a34d208797f3ec3972cf6f0df13257487e072e8fa734c2edf5f2582eb3d45","cross_cats_sorted":[],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2026-06-21T07:31:24Z","title_canon_sha256":"5deda6d815372e0c8f311ff58d962e9ec42e3a083fdd0226655d89a385240d55"},"schema_version":"1.0","source":{"id":"2606.22366","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2606.22366","created_at":"2026-06-23T02:13:36Z"},{"alias_kind":"arxiv_version","alias_value":"2606.22366v1","created_at":"2026-06-23T02:13:36Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2606.22366","created_at":"2026-06-23T02:13:36Z"},{"alias_kind":"pith_short_12","alias_value":"HYTRVCXWHI2O","created_at":"2026-06-23T02:13:36Z"},{"alias_kind":"pith_short_16","alias_value":"HYTRVCXWHI2ORY35","created_at":"2026-06-23T02:13:36Z"},{"alias_kind":"pith_short_8","alias_value":"HYTRVCXW","created_at":"2026-06-23T02:13:36Z"}],"graph_snapshots":[{"event_id":"sha256:b2ffdfe1db7dcec6b699032239b8b8374ffeccb1e8a9d87a4552b9b422f41e3d","target":"graph","created_at":"2026-06-23T02:13:36Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/2606.22366/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"Advances in the semiconductor industry are driven by the development of increasingly compact devices featuring intricate etched geometries, the characterization of which essentially requires ultraprecise, label-free, and real-time metrology. However, non-destructive and alignment-free optical metrology of sub-wavelength structures with nanometric resolution remains a major challenge. Here, we demonstrate a novel single-shot, label-free, and alignment-free optical metrology approach for determining the 1D position of sub-wavelength nanostructures, achieving lambda/110 (7.2 nm) precision. The hi","authors_text":"Benquan Wang, Che-Chin Chen, Eng Aik Chan, Jun-Yu Ou, Masako Kishida, Songze Li, Xi Xie, Yijie Shen, Yu Wang, Zhenyu Guo","cross_cats":[],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2026-06-21T07:31:24Z","title":"Alignment-Free Nanometric Optical Metrology Enabled by Structured Light"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2606.22366","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:d1e8dd76345dfeea2efbbdf608f3cf124e62d84ef5aafae7b78d013452826902","target":"record","created_at":"2026-06-23T02:13:36Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"2a3a34d208797f3ec3972cf6f0df13257487e072e8fa734c2edf5f2582eb3d45","cross_cats_sorted":[],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2026-06-21T07:31:24Z","title_canon_sha256":"5deda6d815372e0c8f311ff58d962e9ec42e3a083fdd0226655d89a385240d55"},"schema_version":"1.0","source":{"id":"2606.22366","kind":"arxiv","version":1}},"canonical_sha256":"3e271a8af63a34e8e37d0cab7808c5b680e627b51b3928ee00ee7ec7672a5c29","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"3e271a8af63a34e8e37d0cab7808c5b680e627b51b3928ee00ee7ec7672a5c29","first_computed_at":"2026-06-23T02:13:36.444200Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-06-23T02:13:36.444200Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"FFUxxKJF46mN+D9xXtnXeN0Q/A1rP/OAnbF2k2El4F1/dR8XF7Vxo3Z+z8hi5wuUSW6QVmB4XyoxcnlhJhmkCw==","signature_status":"signed_v1","signed_at":"2026-06-23T02:13:36.444678Z","signed_message":"canonical_sha256_bytes"},"source_id":"2606.22366","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:d1e8dd76345dfeea2efbbdf608f3cf124e62d84ef5aafae7b78d013452826902","sha256:b2ffdfe1db7dcec6b699032239b8b8374ffeccb1e8a9d87a4552b9b422f41e3d","sha256:5d97f71ef6588250b2906d19bacd19c1a1f983083428f02c9634c870951431dd"],"state_sha256":"a2967e4a331e8bd295ca2ec9169f5ed77772a558e5b3981f0efc07aea3624e8c"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"0V+/0lTqQk++9o0md4vGl+9p/0EWVoUufVCRylbGGP5tyKFaTRjDgfj6xgEz21Lm/EfO/dbH7/eFEr3DARb6Dg==","signed_message":"bundle_sha256_bytes","signed_at":"2026-07-10T11:41:15.005301Z","bundle_sha256":"f7dc98d297cbe2431deef7503e0bc59f9e14024bf10849ead949ac427dd0949f"}}