{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2023:IMWG3VP7AO75YTU3MGL26SKNW4","short_pith_number":"pith:IMWG3VP7","canonical_record":{"source":{"id":"2303.00166","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2023-03-01T01:40:21Z","cross_cats_sorted":["physics.app-ph"],"title_canon_sha256":"a76257eb5517b9cc7bc1d89b91094775a47fe29fee34a43eef3c7d0f1bc366cd","abstract_canon_sha256":"743e2ef6f51fbc5ddb70eb47f1ae33c3dec617f229f550803de68de56b5ba06a"},"schema_version":"1.0"},"canonical_sha256":"432c6dd5ff03bfdc4e9b6197af494db712f38bfe63e6dac692e2100314b2a330","source":{"kind":"arxiv","id":"2303.00166","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2303.00166","created_at":"2026-07-05T05:46:55Z"},{"alias_kind":"arxiv_version","alias_value":"2303.00166v1","created_at":"2026-07-05T05:46:55Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2303.00166","created_at":"2026-07-05T05:46:55Z"},{"alias_kind":"pith_short_12","alias_value":"IMWG3VP7AO75","created_at":"2026-07-05T05:46:55Z"},{"alias_kind":"pith_short_16","alias_value":"IMWG3VP7AO75YTU3","created_at":"2026-07-05T05:46:55Z"},{"alias_kind":"pith_short_8","alias_value":"IMWG3VP7","created_at":"2026-07-05T05:46:55Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2023:IMWG3VP7AO75YTU3MGL26SKNW4","target":"record","payload":{"canonical_record":{"source":{"id":"2303.00166","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2023-03-01T01:40:21Z","cross_cats_sorted":["physics.app-ph"],"title_canon_sha256":"a76257eb5517b9cc7bc1d89b91094775a47fe29fee34a43eef3c7d0f1bc366cd","abstract_canon_sha256":"743e2ef6f51fbc5ddb70eb47f1ae33c3dec617f229f550803de68de56b5ba06a"},"schema_version":"1.0"},"canonical_sha256":"432c6dd5ff03bfdc4e9b6197af494db712f38bfe63e6dac692e2100314b2a330","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T05:46:55.432735Z","signature_b64":"kPVxcR+xEkNNC0EAcanyO4TMoYaYTLnkqhFLIKlzNI1b4TFxFkmVLwH719l2EY+iClIuuKoC/Uu2N9EMNsFlDA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"432c6dd5ff03bfdc4e9b6197af494db712f38bfe63e6dac692e2100314b2a330","last_reissued_at":"2026-07-05T05:46:55.432388Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T05:46:55.432388Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"2303.00166","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T05:46:55Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"lfWmw+7oU+ZBXvzO3uRVD2i2GGFw7dHD7S5yJa1atm+kqdLhqHnksFzDwAlMQ1xHS7Qk0wHRvEq4KV7142beAw==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-10T23:28:06.481954Z"},"content_sha256":"d935cda0a455916a60a248e24561f438de8c54a08c7de5fb37cc527cd5dc1dfe","schema_version":"1.0","event_id":"sha256:d935cda0a455916a60a248e24561f438de8c54a08c7de5fb37cc527cd5dc1dfe"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2023:IMWG3VP7AO75YTU3MGL26SKNW4","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Ultra-high-speed high-resolution laser lithography for lithium niobate integrated photonics","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.app-ph"],"primary_cat":"physics.optics","authors_text":"Chao Sun, Guanhua Wang, Jinming Chen, Lvbin Song, Ya Cheng, Zhaoxiang Liu","submitted_at":"2023-03-01T01:40:21Z","abstract_excerpt":"Photolithography assisted chemo-mechanical etching (PLACE), a technique specifically developed for fabricating highquality large-scale photonic integrated circuits (PICs) on thin-film lithium niobate (TFLN), has enabled fabrication of a series of building blocks of PICs ranging from high-quality (high-Q) microresonators and low-loss waveguides to electrooptically (EO) tunable lasers and waveguide amplifiers. Aiming at high-throughput manufacturing of the PIC devices and systems, we have developed an ultra-high-speed high-resolution laser lithography fabrication system employing a high repetiti"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2303.00166","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2303.00166/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T05:46:55Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"3BJFqppD2lMkWexDv0VJmFIQUh2KzmmvOOjmSMvjRS1kKFOuREk3AmGWhSARRDueww5Mbqm1Qz7oyPtjDgOMDA==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-10T23:28:06.483402Z"},"content_sha256":"86e4d1fabd5d9954daea9391e9a3e7bc88b3654d28e9758ddccc3953291a46ec","schema_version":"1.0","event_id":"sha256:86e4d1fabd5d9954daea9391e9a3e7bc88b3654d28e9758ddccc3953291a46ec"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/IMWG3VP7AO75YTU3MGL26SKNW4/bundle.json","state_url":"https://pith.science/pith/IMWG3VP7AO75YTU3MGL26SKNW4/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/IMWG3VP7AO75YTU3MGL26SKNW4/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-08-10T23:28:06Z","links":{"resolver":"https://pith.science/pith/IMWG3VP7AO75YTU3MGL26SKNW4","bundle":"https://pith.science/pith/IMWG3VP7AO75YTU3MGL26SKNW4/bundle.json","state":"https://pith.science/pith/IMWG3VP7AO75YTU3MGL26SKNW4/state.json","well_known_bundle":"https://pith.science/.well-known/pith/IMWG3VP7AO75YTU3MGL26SKNW4/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2023:IMWG3VP7AO75YTU3MGL26SKNW4","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"743e2ef6f51fbc5ddb70eb47f1ae33c3dec617f229f550803de68de56b5ba06a","cross_cats_sorted":["physics.app-ph"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2023-03-01T01:40:21Z","title_canon_sha256":"a76257eb5517b9cc7bc1d89b91094775a47fe29fee34a43eef3c7d0f1bc366cd"},"schema_version":"1.0","source":{"id":"2303.00166","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2303.00166","created_at":"2026-07-05T05:46:55Z"},{"alias_kind":"arxiv_version","alias_value":"2303.00166v1","created_at":"2026-07-05T05:46:55Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2303.00166","created_at":"2026-07-05T05:46:55Z"},{"alias_kind":"pith_short_12","alias_value":"IMWG3VP7AO75","created_at":"2026-07-05T05:46:55Z"},{"alias_kind":"pith_short_16","alias_value":"IMWG3VP7AO75YTU3","created_at":"2026-07-05T05:46:55Z"},{"alias_kind":"pith_short_8","alias_value":"IMWG3VP7","created_at":"2026-07-05T05:46:55Z"}],"graph_snapshots":[{"event_id":"sha256:86e4d1fabd5d9954daea9391e9a3e7bc88b3654d28e9758ddccc3953291a46ec","target":"graph","created_at":"2026-07-05T05:46:55Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/2303.00166/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"Photolithography assisted chemo-mechanical etching (PLACE), a technique specifically developed for fabricating highquality large-scale photonic integrated circuits (PICs) on thin-film lithium niobate (TFLN), has enabled fabrication of a series of building blocks of PICs ranging from high-quality (high-Q) microresonators and low-loss waveguides to electrooptically (EO) tunable lasers and waveguide amplifiers. Aiming at high-throughput manufacturing of the PIC devices and systems, we have developed an ultra-high-speed high-resolution laser lithography fabrication system employing a high repetiti","authors_text":"Chao Sun, Guanhua Wang, Jinming Chen, Lvbin Song, Ya Cheng, Zhaoxiang Liu","cross_cats":["physics.app-ph"],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2023-03-01T01:40:21Z","title":"Ultra-high-speed high-resolution laser lithography for lithium niobate integrated photonics"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2303.00166","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:d935cda0a455916a60a248e24561f438de8c54a08c7de5fb37cc527cd5dc1dfe","target":"record","created_at":"2026-07-05T05:46:55Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"743e2ef6f51fbc5ddb70eb47f1ae33c3dec617f229f550803de68de56b5ba06a","cross_cats_sorted":["physics.app-ph"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2023-03-01T01:40:21Z","title_canon_sha256":"a76257eb5517b9cc7bc1d89b91094775a47fe29fee34a43eef3c7d0f1bc366cd"},"schema_version":"1.0","source":{"id":"2303.00166","kind":"arxiv","version":1}},"canonical_sha256":"432c6dd5ff03bfdc4e9b6197af494db712f38bfe63e6dac692e2100314b2a330","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"432c6dd5ff03bfdc4e9b6197af494db712f38bfe63e6dac692e2100314b2a330","first_computed_at":"2026-07-05T05:46:55.432388Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-07-05T05:46:55.432388Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"kPVxcR+xEkNNC0EAcanyO4TMoYaYTLnkqhFLIKlzNI1b4TFxFkmVLwH719l2EY+iClIuuKoC/Uu2N9EMNsFlDA==","signature_status":"signed_v1","signed_at":"2026-07-05T05:46:55.432735Z","signed_message":"canonical_sha256_bytes"},"source_id":"2303.00166","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:d935cda0a455916a60a248e24561f438de8c54a08c7de5fb37cc527cd5dc1dfe","sha256:86e4d1fabd5d9954daea9391e9a3e7bc88b3654d28e9758ddccc3953291a46ec"],"state_sha256":"86f70cb7c0fd7f0353c80c76cd49caea80910cc39bb472650d6747a75dae3a37"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"DwOl20lFwMytPrlrA5gU+zeZxEVJKcxQclNxPV9cfQP9I0ACqiNzL/6jet7KV/aIWQsyas2Fb52sjagxtig+Bw==","signed_message":"bundle_sha256_bytes","signed_at":"2026-08-10T23:28:06.490916Z","bundle_sha256":"bd246d40bea3da866a19b1ac2b6d377d7b8dd5426c7cfe9a224bba6936bfcbf6"}}