{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2021:J2RTS4IBUCDO3NAVDLYKPR6RZ4","short_pith_number":"pith:J2RTS4IB","canonical_record":{"source":{"id":"2103.08536","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"quant-ph","submitted_at":"2021-03-15T16:58:10Z","cross_cats_sorted":["cond-mat.supr-con","physics.app-ph"],"title_canon_sha256":"e9a74a0cc7ebf085cf395b011820afb30ddd46b06c18e47f4104f678e1f963c5","abstract_canon_sha256":"76979dcae5853658aeed5e3a925756f77cdf38f7abb8d39a9baf0541358153e2"},"schema_version":"1.0"},"canonical_sha256":"4ea3397101a086edb4151af0a7c7d1cf18ec0546c70c2df3b3491dd78108b682","source":{"kind":"arxiv","id":"2103.08536","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2103.08536","created_at":"2026-07-05T02:23:01Z"},{"alias_kind":"arxiv_version","alias_value":"2103.08536v1","created_at":"2026-07-05T02:23:01Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2103.08536","created_at":"2026-07-05T02:23:01Z"},{"alias_kind":"pith_short_12","alias_value":"J2RTS4IBUCDO","created_at":"2026-07-05T02:23:01Z"},{"alias_kind":"pith_short_16","alias_value":"J2RTS4IBUCDO3NAV","created_at":"2026-07-05T02:23:01Z"},{"alias_kind":"pith_short_8","alias_value":"J2RTS4IB","created_at":"2026-07-05T02:23:01Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2021:J2RTS4IBUCDO3NAVDLYKPR6RZ4","target":"record","payload":{"canonical_record":{"source":{"id":"2103.08536","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"quant-ph","submitted_at":"2021-03-15T16:58:10Z","cross_cats_sorted":["cond-mat.supr-con","physics.app-ph"],"title_canon_sha256":"e9a74a0cc7ebf085cf395b011820afb30ddd46b06c18e47f4104f678e1f963c5","abstract_canon_sha256":"76979dcae5853658aeed5e3a925756f77cdf38f7abb8d39a9baf0541358153e2"},"schema_version":"1.0"},"canonical_sha256":"4ea3397101a086edb4151af0a7c7d1cf18ec0546c70c2df3b3491dd78108b682","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T02:23:01.708896Z","signature_b64":"yRJVNF2NZ9xOR7YTvRJLMLopqf/TIBE9UPdNwVcPjRLuHWyDRPJt9cuWPe/5oEW3SjF48J0K7EEgs+GI6OQ8Bg==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"4ea3397101a086edb4151af0a7c7d1cf18ec0546c70c2df3b3491dd78108b682","last_reissued_at":"2026-07-05T02:23:01.708364Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T02:23:01.708364Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"2103.08536","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T02:23:01Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"cdtF5kr9KhF1GtQD18TM+TRhCaNUYFD0wxjFMjoIC+Pw5qRK9ey6wk4U6NYHlDpkpfGqKFvyZuOI2m3HVVoYDw==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-07T01:09:04.934959Z"},"content_sha256":"21749690e914d3137cb8f6ff642b27137590410b61a004297fff04cb632bbb6b","schema_version":"1.0","event_id":"sha256:21749690e914d3137cb8f6ff642b27137590410b61a004297fff04cb632bbb6b"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2021:J2RTS4IBUCDO3NAVDLYKPR6RZ4","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Fabrication of superconducting through-silicon vias","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.supr-con","physics.app-ph"],"primary_cat":"quant-ph","authors_text":"Alexandra Day, Andrew J. Kerman, Arjan Sevi, Bethany M. Niedzielski, Corey Stull, Danna Rosenberg, David K. Kim, Donna-Ruth W. Yost, Evan Golden, Gregory Calusine, Jeffery Knecht, Jonilyn L. Yoder, Justin L. Mallek, Matt Cook, Mollie Schwartz, Rabindra Das, Wayne Woods, William D. Oliver","submitted_at":"2021-03-15T16:58:10Z","abstract_excerpt":"Increasing circuit complexity within quantum systems based on superconducting qubits necessitates high connectivity while retaining qubit coherence. Classical micro-electronic systems have addressed interconnect density challenges by using 3D integration with interposers containing through-silicon vias (TSVs), but extending these integration techniques to superconducting quantum systems is challenging. Here, we discuss our approach for realizing high-aspect-ratio superconducting TSVs\\textemdash 10 $\\mu$m wide by 20 $\\mu$m long by 200 $\\mu$m deep\\textemdash with densities of 100 electrically is"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2103.08536","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2103.08536/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T02:23:01Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"vHS1kPE+x2F+ceN5y+XdQJr/2OYUWTvKYWeOxWKWj/QPB88/YfihzN/lNLj+xRc6C9JsSh4DfbF8OYgSvBHCAQ==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-07T01:09:04.935362Z"},"content_sha256":"72aa0f16a236aac6ff49e97205b496cbbdbf609dcc5325a950818c6eadb23e78","schema_version":"1.0","event_id":"sha256:72aa0f16a236aac6ff49e97205b496cbbdbf609dcc5325a950818c6eadb23e78"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/J2RTS4IBUCDO3NAVDLYKPR6RZ4/bundle.json","state_url":"https://pith.science/pith/J2RTS4IBUCDO3NAVDLYKPR6RZ4/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/J2RTS4IBUCDO3NAVDLYKPR6RZ4/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-08-07T01:09:04Z","links":{"resolver":"https://pith.science/pith/J2RTS4IBUCDO3NAVDLYKPR6RZ4","bundle":"https://pith.science/pith/J2RTS4IBUCDO3NAVDLYKPR6RZ4/bundle.json","state":"https://pith.science/pith/J2RTS4IBUCDO3NAVDLYKPR6RZ4/state.json","well_known_bundle":"https://pith.science/.well-known/pith/J2RTS4IBUCDO3NAVDLYKPR6RZ4/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2021:J2RTS4IBUCDO3NAVDLYKPR6RZ4","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"76979dcae5853658aeed5e3a925756f77cdf38f7abb8d39a9baf0541358153e2","cross_cats_sorted":["cond-mat.supr-con","physics.app-ph"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"quant-ph","submitted_at":"2021-03-15T16:58:10Z","title_canon_sha256":"e9a74a0cc7ebf085cf395b011820afb30ddd46b06c18e47f4104f678e1f963c5"},"schema_version":"1.0","source":{"id":"2103.08536","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2103.08536","created_at":"2026-07-05T02:23:01Z"},{"alias_kind":"arxiv_version","alias_value":"2103.08536v1","created_at":"2026-07-05T02:23:01Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2103.08536","created_at":"2026-07-05T02:23:01Z"},{"alias_kind":"pith_short_12","alias_value":"J2RTS4IBUCDO","created_at":"2026-07-05T02:23:01Z"},{"alias_kind":"pith_short_16","alias_value":"J2RTS4IBUCDO3NAV","created_at":"2026-07-05T02:23:01Z"},{"alias_kind":"pith_short_8","alias_value":"J2RTS4IB","created_at":"2026-07-05T02:23:01Z"}],"graph_snapshots":[{"event_id":"sha256:72aa0f16a236aac6ff49e97205b496cbbdbf609dcc5325a950818c6eadb23e78","target":"graph","created_at":"2026-07-05T02:23:01Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/2103.08536/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"Increasing circuit complexity within quantum systems based on superconducting qubits necessitates high connectivity while retaining qubit coherence. Classical micro-electronic systems have addressed interconnect density challenges by using 3D integration with interposers containing through-silicon vias (TSVs), but extending these integration techniques to superconducting quantum systems is challenging. Here, we discuss our approach for realizing high-aspect-ratio superconducting TSVs\\textemdash 10 $\\mu$m wide by 20 $\\mu$m long by 200 $\\mu$m deep\\textemdash with densities of 100 electrically is","authors_text":"Alexandra Day, Andrew J. Kerman, Arjan Sevi, Bethany M. Niedzielski, Corey Stull, Danna Rosenberg, David K. Kim, Donna-Ruth W. Yost, Evan Golden, Gregory Calusine, Jeffery Knecht, Jonilyn L. Yoder, Justin L. Mallek, Matt Cook, Mollie Schwartz, Rabindra Das, Wayne Woods, William D. Oliver","cross_cats":["cond-mat.supr-con","physics.app-ph"],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"quant-ph","submitted_at":"2021-03-15T16:58:10Z","title":"Fabrication of superconducting through-silicon vias"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2103.08536","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:21749690e914d3137cb8f6ff642b27137590410b61a004297fff04cb632bbb6b","target":"record","created_at":"2026-07-05T02:23:01Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"76979dcae5853658aeed5e3a925756f77cdf38f7abb8d39a9baf0541358153e2","cross_cats_sorted":["cond-mat.supr-con","physics.app-ph"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"quant-ph","submitted_at":"2021-03-15T16:58:10Z","title_canon_sha256":"e9a74a0cc7ebf085cf395b011820afb30ddd46b06c18e47f4104f678e1f963c5"},"schema_version":"1.0","source":{"id":"2103.08536","kind":"arxiv","version":1}},"canonical_sha256":"4ea3397101a086edb4151af0a7c7d1cf18ec0546c70c2df3b3491dd78108b682","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"4ea3397101a086edb4151af0a7c7d1cf18ec0546c70c2df3b3491dd78108b682","first_computed_at":"2026-07-05T02:23:01.708364Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-07-05T02:23:01.708364Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"yRJVNF2NZ9xOR7YTvRJLMLopqf/TIBE9UPdNwVcPjRLuHWyDRPJt9cuWPe/5oEW3SjF48J0K7EEgs+GI6OQ8Bg==","signature_status":"signed_v1","signed_at":"2026-07-05T02:23:01.708896Z","signed_message":"canonical_sha256_bytes"},"source_id":"2103.08536","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:21749690e914d3137cb8f6ff642b27137590410b61a004297fff04cb632bbb6b","sha256:72aa0f16a236aac6ff49e97205b496cbbdbf609dcc5325a950818c6eadb23e78"],"state_sha256":"f5912587c975d1d8f4505e4794220276fd4514d9f6187032f06abed6f5bf9945"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"m9HiytirnPUxJlEgGLjvSXTwMAy6PDfonbckueRa7VpRQCGqsPvTIOm++LfveW7xjA0D4UyWTV1Q9wmI92b+Ag==","signed_message":"bundle_sha256_bytes","signed_at":"2026-08-07T01:09:04.937828Z","bundle_sha256":"96e6d0650a5093889abd417a7f818699fbd47e2564dbefaf717075cb25d87b14"}}