{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2013:JDJKIKEZUJ3U2DTMU5QTF74BT3","short_pith_number":"pith:JDJKIKEZ","schema_version":"1.0","canonical_sha256":"48d2a42899a2774d0e6ca76132ff819efb4255096a34b1a5b8e006e4a7defb67","source":{"kind":"arxiv","id":"1310.4057","version":1},"attestation_state":"computed","paper":{"title":"Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.plasm-ph","authors_text":"A Dolgov, A Kovalev, A Vasilyeva, C J Lee, D Lopaev, F Bijkerk, O Yakushev, T Rachimova, V M Krivtsun","submitted_at":"2013-10-15T13:59:32Z","abstract_excerpt":"Cleaning of contamination of optical surfaces by amorphous carbon (a-C) is highly relevant for extreme ultraviolet (EUV) lithography. We have studied the mechanisms for a-C removal from a Si surface. By comparing a-C removal in a surface wave discharge (SWD) plasma and an EUV-induced plasma, the cleaning mechanisms for hydrogen and helium gas environments were determined. The C-atom removal per incident ion was estimated for different sample bias voltages and ion fluxes. It was found that H2 plasmas generally had higher cleaning rates than He plasmas: up to seven times higher for more negative"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1310.4057","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.plasm-ph","submitted_at":"2013-10-15T13:59:32Z","cross_cats_sorted":[],"title_canon_sha256":"4d012b2a0f45a34d2fd844336889fae5d5e0b2a1d33baa040c713fbe441f4f36","abstract_canon_sha256":"5edf86f137a815865a62cedb91f0b3d41a4c68b20d9e0a47c0f7b67e067f7106"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T01:46:14.309399Z","signature_b64":"PEcf2yWapDTWXX70PjvWRiXE36BF1mWnTdYoc5pq6HIhtGlgOHK+0+wbg9aJBw025IZ45o+lEnM0rCTzWpBHDA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"48d2a42899a2774d0e6ca76132ff819efb4255096a34b1a5b8e006e4a7defb67","last_reissued_at":"2026-05-18T01:46:14.308646Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T01:46:14.308646Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.plasm-ph","authors_text":"A Dolgov, A Kovalev, A Vasilyeva, C J Lee, D Lopaev, F Bijkerk, O Yakushev, T Rachimova, V M Krivtsun","submitted_at":"2013-10-15T13:59:32Z","abstract_excerpt":"Cleaning of contamination of optical surfaces by amorphous carbon (a-C) is highly relevant for extreme ultraviolet (EUV) lithography. We have studied the mechanisms for a-C removal from a Si surface. By comparing a-C removal in a surface wave discharge (SWD) plasma and an EUV-induced plasma, the cleaning mechanisms for hydrogen and helium gas environments were determined. The C-atom removal per incident ion was estimated for different sample bias voltages and ion fluxes. It was found that H2 plasmas generally had higher cleaning rates than He plasmas: up to seven times higher for more negative"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1310.4057","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1310.4057","created_at":"2026-05-18T01:46:14.308781+00:00"},{"alias_kind":"arxiv_version","alias_value":"1310.4057v1","created_at":"2026-05-18T01:46:14.308781+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1310.4057","created_at":"2026-05-18T01:46:14.308781+00:00"},{"alias_kind":"pith_short_12","alias_value":"JDJKIKEZUJ3U","created_at":"2026-05-18T12:27:49.015174+00:00"},{"alias_kind":"pith_short_16","alias_value":"JDJKIKEZUJ3U2DTM","created_at":"2026-05-18T12:27:49.015174+00:00"},{"alias_kind":"pith_short_8","alias_value":"JDJKIKEZ","created_at":"2026-05-18T12:27:49.015174+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/JDJKIKEZUJ3U2DTMU5QTF74BT3","json":"https://pith.science/pith/JDJKIKEZUJ3U2DTMU5QTF74BT3.json","graph_json":"https://pith.science/api/pith-number/JDJKIKEZUJ3U2DTMU5QTF74BT3/graph.json","events_json":"https://pith.science/api/pith-number/JDJKIKEZUJ3U2DTMU5QTF74BT3/events.json","paper":"https://pith.science/paper/JDJKIKEZ"},"agent_actions":{"view_html":"https://pith.science/pith/JDJKIKEZUJ3U2DTMU5QTF74BT3","download_json":"https://pith.science/pith/JDJKIKEZUJ3U2DTMU5QTF74BT3.json","view_paper":"https://pith.science/paper/JDJKIKEZ","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1310.4057&json=true","fetch_graph":"https://pith.science/api/pith-number/JDJKIKEZUJ3U2DTMU5QTF74BT3/graph.json","fetch_events":"https://pith.science/api/pith-number/JDJKIKEZUJ3U2DTMU5QTF74BT3/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/JDJKIKEZUJ3U2DTMU5QTF74BT3/action/timestamp_anchor","attest_storage":"https://pith.science/pith/JDJKIKEZUJ3U2DTMU5QTF74BT3/action/storage_attestation","attest_author":"https://pith.science/pith/JDJKIKEZUJ3U2DTMU5QTF74BT3/action/author_attestation","sign_citation":"https://pith.science/pith/JDJKIKEZUJ3U2DTMU5QTF74BT3/action/citation_signature","submit_replication":"https://pith.science/pith/JDJKIKEZUJ3U2DTMU5QTF74BT3/action/replication_record"}},"created_at":"2026-05-18T01:46:14.308781+00:00","updated_at":"2026-05-18T01:46:14.308781+00:00"}