{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2014:JIIBELZ4IMOZCFTOAGUA3VJYIL","short_pith_number":"pith:JIIBELZ4","canonical_record":{"source":{"id":"1411.4833","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2014-11-18T13:13:05Z","cross_cats_sorted":[],"title_canon_sha256":"e4a98ff1ff4178bf272225bfb7908375acd2a6ef9b11c3ddc54a6bb7f0bf2c37","abstract_canon_sha256":"16c99ec29863f6d0fa30be1d3eaa21976c5f9aa8236f6048e09ac1768c920cf6"},"schema_version":"1.0"},"canonical_sha256":"4a10122f3c431d91166e01a80dd53842f990191e5ae88ea8c4c90b6cd1c1c9cd","source":{"kind":"arxiv","id":"1411.4833","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1411.4833","created_at":"2026-07-05T06:05:52Z"},{"alias_kind":"arxiv_version","alias_value":"1411.4833v1","created_at":"2026-07-05T06:05:52Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1411.4833","created_at":"2026-07-05T06:05:52Z"},{"alias_kind":"pith_short_12","alias_value":"JIIBELZ4IMOZ","created_at":"2026-07-05T06:05:52Z"},{"alias_kind":"pith_short_16","alias_value":"JIIBELZ4IMOZCFTO","created_at":"2026-07-05T06:05:52Z"},{"alias_kind":"pith_short_8","alias_value":"JIIBELZ4","created_at":"2026-07-05T06:05:52Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2014:JIIBELZ4IMOZCFTOAGUA3VJYIL","target":"record","payload":{"canonical_record":{"source":{"id":"1411.4833","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2014-11-18T13:13:05Z","cross_cats_sorted":[],"title_canon_sha256":"e4a98ff1ff4178bf272225bfb7908375acd2a6ef9b11c3ddc54a6bb7f0bf2c37","abstract_canon_sha256":"16c99ec29863f6d0fa30be1d3eaa21976c5f9aa8236f6048e09ac1768c920cf6"},"schema_version":"1.0"},"canonical_sha256":"4a10122f3c431d91166e01a80dd53842f990191e5ae88ea8c4c90b6cd1c1c9cd","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T06:05:52.372836Z","signature_b64":"d9UsD9tY/oa7QjJQVy5KfkmVH7oOCh4SDIRr0fyia47Wn8/TcLm7mzN67GBWj2x7h8zXnDSFNBdAocgXB0dPAA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"4a10122f3c431d91166e01a80dd53842f990191e5ae88ea8c4c90b6cd1c1c9cd","last_reissued_at":"2026-07-05T06:05:52.372385Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T06:05:52.372385Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"1411.4833","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T06:05:52Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"/qkyqTNENf7ozXs7/+1ebNUPLP24Zz7Oa4W2Bem9gOIoMDHn08uxHN3pm+4iL7WvfTidzEgNWiy9c7yBuvICAg==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-04T09:43:33.102857Z"},"content_sha256":"0093beedf546d67941544fc4f3017fc6d9ecb591657e5a9f31be058e7fa7f63f","schema_version":"1.0","event_id":"sha256:0093beedf546d67941544fc4f3017fc6d9ecb591657e5a9f31be058e7fa7f63f"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2014:JIIBELZ4IMOZCFTOAGUA3VJYIL","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Sub 20 nm Silicon Patterning and Metal Lift-Off Using Thermal Scanning Probe Lithography","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Armin W. Knoll, Colin Rawlings, Daniel J. Coady, Heiko Wolf, James L. Hedrick, Philipp Mensch, Urs Duerig","submitted_at":"2014-11-18T13:13:05Z","abstract_excerpt":"The most direct definition of a patterning process' resolution is the smallest half-pitch feature it is capable of transferring onto the substrate. Here we demonstrate that thermal Scanning Probe Lithography (t-SPL) is capable of fabricating dense line patterns in silicon and metal lift-off features at sub 20 nm feature size. The dense silicon lines were written at a half pitch of 18.3 nm to a depth of 5 nm into a 9 nm polyphthalaldehyde thermal imaging layer by t-SPL. For processing we used a three-layer stack comprising an evaporated SiO2 hardmask which is just 2-3 nm thick. The hardmask is "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1411.4833","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/1411.4833/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T06:05:52Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"2BMT2S3szH/tYbhappiaWGNpEdZ9KwQaUPTTbP7EwEjDgsQMl2NLDbDNPAlM0K8IdpoL36VcLXlF+nM/PQIzCA==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-04T09:43:33.103557Z"},"content_sha256":"b13bae36ee3a73a1fb077b4f4b2b3d2600d8a834b41fc3ef09d4176a4d3fb311","schema_version":"1.0","event_id":"sha256:b13bae36ee3a73a1fb077b4f4b2b3d2600d8a834b41fc3ef09d4176a4d3fb311"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/JIIBELZ4IMOZCFTOAGUA3VJYIL/bundle.json","state_url":"https://pith.science/pith/JIIBELZ4IMOZCFTOAGUA3VJYIL/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/JIIBELZ4IMOZCFTOAGUA3VJYIL/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-08-04T09:43:33Z","links":{"resolver":"https://pith.science/pith/JIIBELZ4IMOZCFTOAGUA3VJYIL","bundle":"https://pith.science/pith/JIIBELZ4IMOZCFTOAGUA3VJYIL/bundle.json","state":"https://pith.science/pith/JIIBELZ4IMOZCFTOAGUA3VJYIL/state.json","well_known_bundle":"https://pith.science/.well-known/pith/JIIBELZ4IMOZCFTOAGUA3VJYIL/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2014:JIIBELZ4IMOZCFTOAGUA3VJYIL","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"16c99ec29863f6d0fa30be1d3eaa21976c5f9aa8236f6048e09ac1768c920cf6","cross_cats_sorted":[],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2014-11-18T13:13:05Z","title_canon_sha256":"e4a98ff1ff4178bf272225bfb7908375acd2a6ef9b11c3ddc54a6bb7f0bf2c37"},"schema_version":"1.0","source":{"id":"1411.4833","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1411.4833","created_at":"2026-07-05T06:05:52Z"},{"alias_kind":"arxiv_version","alias_value":"1411.4833v1","created_at":"2026-07-05T06:05:52Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1411.4833","created_at":"2026-07-05T06:05:52Z"},{"alias_kind":"pith_short_12","alias_value":"JIIBELZ4IMOZ","created_at":"2026-07-05T06:05:52Z"},{"alias_kind":"pith_short_16","alias_value":"JIIBELZ4IMOZCFTO","created_at":"2026-07-05T06:05:52Z"},{"alias_kind":"pith_short_8","alias_value":"JIIBELZ4","created_at":"2026-07-05T06:05:52Z"}],"graph_snapshots":[{"event_id":"sha256:b13bae36ee3a73a1fb077b4f4b2b3d2600d8a834b41fc3ef09d4176a4d3fb311","target":"graph","created_at":"2026-07-05T06:05:52Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/1411.4833/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"The most direct definition of a patterning process' resolution is the smallest half-pitch feature it is capable of transferring onto the substrate. Here we demonstrate that thermal Scanning Probe Lithography (t-SPL) is capable of fabricating dense line patterns in silicon and metal lift-off features at sub 20 nm feature size. The dense silicon lines were written at a half pitch of 18.3 nm to a depth of 5 nm into a 9 nm polyphthalaldehyde thermal imaging layer by t-SPL. For processing we used a three-layer stack comprising an evaporated SiO2 hardmask which is just 2-3 nm thick. The hardmask is ","authors_text":"Armin W. Knoll, Colin Rawlings, Daniel J. Coady, Heiko Wolf, James L. Hedrick, Philipp Mensch, Urs Duerig","cross_cats":[],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2014-11-18T13:13:05Z","title":"Sub 20 nm Silicon Patterning and Metal Lift-Off Using Thermal Scanning Probe Lithography"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1411.4833","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:0093beedf546d67941544fc4f3017fc6d9ecb591657e5a9f31be058e7fa7f63f","target":"record","created_at":"2026-07-05T06:05:52Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"16c99ec29863f6d0fa30be1d3eaa21976c5f9aa8236f6048e09ac1768c920cf6","cross_cats_sorted":[],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2014-11-18T13:13:05Z","title_canon_sha256":"e4a98ff1ff4178bf272225bfb7908375acd2a6ef9b11c3ddc54a6bb7f0bf2c37"},"schema_version":"1.0","source":{"id":"1411.4833","kind":"arxiv","version":1}},"canonical_sha256":"4a10122f3c431d91166e01a80dd53842f990191e5ae88ea8c4c90b6cd1c1c9cd","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"4a10122f3c431d91166e01a80dd53842f990191e5ae88ea8c4c90b6cd1c1c9cd","first_computed_at":"2026-07-05T06:05:52.372385Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-07-05T06:05:52.372385Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"d9UsD9tY/oa7QjJQVy5KfkmVH7oOCh4SDIRr0fyia47Wn8/TcLm7mzN67GBWj2x7h8zXnDSFNBdAocgXB0dPAA==","signature_status":"signed_v1","signed_at":"2026-07-05T06:05:52.372836Z","signed_message":"canonical_sha256_bytes"},"source_id":"1411.4833","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:0093beedf546d67941544fc4f3017fc6d9ecb591657e5a9f31be058e7fa7f63f","sha256:b13bae36ee3a73a1fb077b4f4b2b3d2600d8a834b41fc3ef09d4176a4d3fb311"],"state_sha256":"38d4737abb383cb63b53a9250701dceb6d9692906eed780a0469eadc6c0ff6c7"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"pKndfSF72kFEEazv8t8lwfCnZsMcLfewcPdJ6eEOdwvMgsJfyGBXUUgwkBGQ3A9XeF3WwQCId2zLELJMuEFeAg==","signed_message":"bundle_sha256_bytes","signed_at":"2026-08-04T09:43:33.107682Z","bundle_sha256":"a710501de25ad1a65e04773c423d9464dcd2b104832087779db8bf447c87d3b9"}}