{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2021:JJ3FDCTDHJKCU52TJD45L6L3JH","short_pith_number":"pith:JJ3FDCTD","canonical_record":{"source":{"id":"2110.03499","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2021-10-07T14:35:54Z","cross_cats_sorted":["cond-mat.mes-hall","physics.app-ph"],"title_canon_sha256":"61defd5f9086188530e7c9c64db18dd52dc052c300e62146a06c224e2db4f419","abstract_canon_sha256":"d6caa02a49201675f3af669e777328ed99d6f8b700ab7531857ec04b2d5ab868"},"schema_version":"1.0"},"canonical_sha256":"4a76518a633a542a775348f9d5f97b49f1bd17fc36fb8dd7d46c375672d94a3f","source":{"kind":"arxiv","id":"2110.03499","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2110.03499","created_at":"2026-07-05T03:20:43Z"},{"alias_kind":"arxiv_version","alias_value":"2110.03499v1","created_at":"2026-07-05T03:20:43Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2110.03499","created_at":"2026-07-05T03:20:43Z"},{"alias_kind":"pith_short_12","alias_value":"JJ3FDCTDHJKC","created_at":"2026-07-05T03:20:43Z"},{"alias_kind":"pith_short_16","alias_value":"JJ3FDCTDHJKCU52T","created_at":"2026-07-05T03:20:43Z"},{"alias_kind":"pith_short_8","alias_value":"JJ3FDCTD","created_at":"2026-07-05T03:20:43Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2021:JJ3FDCTDHJKCU52TJD45L6L3JH","target":"record","payload":{"canonical_record":{"source":{"id":"2110.03499","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2021-10-07T14:35:54Z","cross_cats_sorted":["cond-mat.mes-hall","physics.app-ph"],"title_canon_sha256":"61defd5f9086188530e7c9c64db18dd52dc052c300e62146a06c224e2db4f419","abstract_canon_sha256":"d6caa02a49201675f3af669e777328ed99d6f8b700ab7531857ec04b2d5ab868"},"schema_version":"1.0"},"canonical_sha256":"4a76518a633a542a775348f9d5f97b49f1bd17fc36fb8dd7d46c375672d94a3f","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T03:20:43.384304Z","signature_b64":"S31xUv/DUFdAdpj54/DQf6tGjje4wniOoN5+mGlu+5Sc8d6xD4J1EaOdOe1CqMqUvlaArzVs16QgzMr1YxP5BQ==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"4a76518a633a542a775348f9d5f97b49f1bd17fc36fb8dd7d46c375672d94a3f","last_reissued_at":"2026-07-05T03:20:43.383823Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T03:20:43.383823Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"2110.03499","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T03:20:43Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"TxOYryD9nNtCv4OjqEzSgwsw6axUQx8nrEbHVH2NcNLAZUpe39QNMNPTh9DLE2p+vUSaI/tSnCjm/CrGQ3gAAA==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-20T13:25:38.196269Z"},"content_sha256":"0a7ea76e6a3cff55223c0dbdd723fb7840748ee67f76d2be8e5e8f201be91198","schema_version":"1.0","event_id":"sha256:0a7ea76e6a3cff55223c0dbdd723fb7840748ee67f76d2be8e5e8f201be91198"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2021:JJ3FDCTDHJKCU52TJD45L6L3JH","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Super-Resolution Nanolithography of Two-Dimensional Materials by Anisotropic Etching","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.mes-hall","physics.app-ph"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Anton Lyksborg-Andersen, Bjarke S. Jessen, Dorte R. Danielsen, Kirstine E. S. Nielsen, Lene Gammelgaard, Manh-Ha Doan, Peter B{\\o}ggild, Timothy J. Booth, Yingqiu Zhou","submitted_at":"2021-10-07T14:35:54Z","abstract_excerpt":"Nanostructuring allows altering of the electronic and photonic properties of two-dimensional (2D) materials. The efficiency, flexibility, and convenience of top-down lithography processes are however compromised by nm-scale edge roughness and resolution variability issues, which especially affects the performance of 2D materials. Here we study how dry anisotropic etching of multilayer 2D materials with sulfur hexafluoride (SF6) may overcome some of these issues, showing results for hexagonal boron nitride (hBN), tungsten disulfide (WS2), tungsten diselenide (WSe2), molybdenum disulfide (MoS2),"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2110.03499","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2110.03499/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T03:20:43Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"IcJEVasPO7mXeIACDtiHmdw4xNxJRKvLzmPt9IwlGvdfinuxeiXfrvwXuKntumCyhpBDtx6lmH4EtKJpQlfuCg==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-20T13:25:38.197255Z"},"content_sha256":"728652d49d725038a3bfd182784b542b335a768080b9583b00a118ba20d994a8","schema_version":"1.0","event_id":"sha256:728652d49d725038a3bfd182784b542b335a768080b9583b00a118ba20d994a8"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/JJ3FDCTDHJKCU52TJD45L6L3JH/bundle.json","state_url":"https://pith.science/pith/JJ3FDCTDHJKCU52TJD45L6L3JH/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/JJ3FDCTDHJKCU52TJD45L6L3JH/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-08-20T13:25:38Z","links":{"resolver":"https://pith.science/pith/JJ3FDCTDHJKCU52TJD45L6L3JH","bundle":"https://pith.science/pith/JJ3FDCTDHJKCU52TJD45L6L3JH/bundle.json","state":"https://pith.science/pith/JJ3FDCTDHJKCU52TJD45L6L3JH/state.json","well_known_bundle":"https://pith.science/.well-known/pith/JJ3FDCTDHJKCU52TJD45L6L3JH/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2021:JJ3FDCTDHJKCU52TJD45L6L3JH","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"d6caa02a49201675f3af669e777328ed99d6f8b700ab7531857ec04b2d5ab868","cross_cats_sorted":["cond-mat.mes-hall","physics.app-ph"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2021-10-07T14:35:54Z","title_canon_sha256":"61defd5f9086188530e7c9c64db18dd52dc052c300e62146a06c224e2db4f419"},"schema_version":"1.0","source":{"id":"2110.03499","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2110.03499","created_at":"2026-07-05T03:20:43Z"},{"alias_kind":"arxiv_version","alias_value":"2110.03499v1","created_at":"2026-07-05T03:20:43Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2110.03499","created_at":"2026-07-05T03:20:43Z"},{"alias_kind":"pith_short_12","alias_value":"JJ3FDCTDHJKC","created_at":"2026-07-05T03:20:43Z"},{"alias_kind":"pith_short_16","alias_value":"JJ3FDCTDHJKCU52T","created_at":"2026-07-05T03:20:43Z"},{"alias_kind":"pith_short_8","alias_value":"JJ3FDCTD","created_at":"2026-07-05T03:20:43Z"}],"graph_snapshots":[{"event_id":"sha256:728652d49d725038a3bfd182784b542b335a768080b9583b00a118ba20d994a8","target":"graph","created_at":"2026-07-05T03:20:43Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/2110.03499/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"Nanostructuring allows altering of the electronic and photonic properties of two-dimensional (2D) materials. The efficiency, flexibility, and convenience of top-down lithography processes are however compromised by nm-scale edge roughness and resolution variability issues, which especially affects the performance of 2D materials. Here we study how dry anisotropic etching of multilayer 2D materials with sulfur hexafluoride (SF6) may overcome some of these issues, showing results for hexagonal boron nitride (hBN), tungsten disulfide (WS2), tungsten diselenide (WSe2), molybdenum disulfide (MoS2),","authors_text":"Anton Lyksborg-Andersen, Bjarke S. Jessen, Dorte R. Danielsen, Kirstine E. S. Nielsen, Lene Gammelgaard, Manh-Ha Doan, Peter B{\\o}ggild, Timothy J. Booth, Yingqiu Zhou","cross_cats":["cond-mat.mes-hall","physics.app-ph"],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2021-10-07T14:35:54Z","title":"Super-Resolution Nanolithography of Two-Dimensional Materials by Anisotropic Etching"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2110.03499","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:0a7ea76e6a3cff55223c0dbdd723fb7840748ee67f76d2be8e5e8f201be91198","target":"record","created_at":"2026-07-05T03:20:43Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"d6caa02a49201675f3af669e777328ed99d6f8b700ab7531857ec04b2d5ab868","cross_cats_sorted":["cond-mat.mes-hall","physics.app-ph"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2021-10-07T14:35:54Z","title_canon_sha256":"61defd5f9086188530e7c9c64db18dd52dc052c300e62146a06c224e2db4f419"},"schema_version":"1.0","source":{"id":"2110.03499","kind":"arxiv","version":1}},"canonical_sha256":"4a76518a633a542a775348f9d5f97b49f1bd17fc36fb8dd7d46c375672d94a3f","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"4a76518a633a542a775348f9d5f97b49f1bd17fc36fb8dd7d46c375672d94a3f","first_computed_at":"2026-07-05T03:20:43.383823Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-07-05T03:20:43.383823Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"S31xUv/DUFdAdpj54/DQf6tGjje4wniOoN5+mGlu+5Sc8d6xD4J1EaOdOe1CqMqUvlaArzVs16QgzMr1YxP5BQ==","signature_status":"signed_v1","signed_at":"2026-07-05T03:20:43.384304Z","signed_message":"canonical_sha256_bytes"},"source_id":"2110.03499","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:0a7ea76e6a3cff55223c0dbdd723fb7840748ee67f76d2be8e5e8f201be91198","sha256:728652d49d725038a3bfd182784b542b335a768080b9583b00a118ba20d994a8"],"state_sha256":"c9801abba713c2e88d4a72971b7ff69d3e48d71487b4f0c010b529f5bae5d336"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"72bpsSs6fFjLYyVihgxuC5A0JhjXy7X23xgbDV6ecYsx3aTT6eaoFxWEuaRGLfwkN1LGqVxiXh6EiaYP1fXSBg==","signed_message":"bundle_sha256_bytes","signed_at":"2026-08-20T13:25:38.203140Z","bundle_sha256":"3d9c8ee55833aec9941985ed1416aa75df003e458f7a9bd1b464ff976f29f151"}}