{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2019:K2FGBHVLTNAZB6RSOBWAYI5UE2","short_pith_number":"pith:K2FGBHVL","canonical_record":{"source":{"id":"1909.13618","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2019-08-17T05:55:38Z","cross_cats_sorted":["physics.optics"],"title_canon_sha256":"e79bf35be0304a684df8d24dde29d2455d08df16a381f5edad1869c71d1230f2","abstract_canon_sha256":"9225f0a1ec6819211713a4cdeef6009d0af6f04b6bd687926dd3cdfdb67cbfa3"},"schema_version":"1.0"},"canonical_sha256":"568a609eab9b4190fa32706c0c23b426830d0b4893e47bef1a978231b27fd41f","source":{"kind":"arxiv","id":"1909.13618","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1909.13618","created_at":"2026-07-05T00:10:44Z"},{"alias_kind":"arxiv_version","alias_value":"1909.13618v1","created_at":"2026-07-05T00:10:44Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1909.13618","created_at":"2026-07-05T00:10:44Z"},{"alias_kind":"pith_short_12","alias_value":"K2FGBHVLTNAZ","created_at":"2026-07-05T00:10:44Z"},{"alias_kind":"pith_short_16","alias_value":"K2FGBHVLTNAZB6RS","created_at":"2026-07-05T00:10:44Z"},{"alias_kind":"pith_short_8","alias_value":"K2FGBHVL","created_at":"2026-07-05T00:10:44Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2019:K2FGBHVLTNAZB6RSOBWAYI5UE2","target":"record","payload":{"canonical_record":{"source":{"id":"1909.13618","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2019-08-17T05:55:38Z","cross_cats_sorted":["physics.optics"],"title_canon_sha256":"e79bf35be0304a684df8d24dde29d2455d08df16a381f5edad1869c71d1230f2","abstract_canon_sha256":"9225f0a1ec6819211713a4cdeef6009d0af6f04b6bd687926dd3cdfdb67cbfa3"},"schema_version":"1.0"},"canonical_sha256":"568a609eab9b4190fa32706c0c23b426830d0b4893e47bef1a978231b27fd41f","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T00:10:44.977956Z","signature_b64":"PEFnXu38UrpD9DmM0DyfwG5kubQ5gUBHtvNJ9dtN0xWmvk246yV6hj3OVNFROu5Xbtlvf2w/kXyyhITk63x0Bw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"568a609eab9b4190fa32706c0c23b426830d0b4893e47bef1a978231b27fd41f","last_reissued_at":"2026-07-05T00:10:44.977617Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T00:10:44.977617Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"1909.13618","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T00:10:44Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"+C1eJ7FTXWjL4mVyZ4YWVRLgiTfkSfF9Kyb+lg09HBbZEuGhDabz5KNKIggDioROUCm4otqQuPOAlDYGM5E9Dw==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-16T13:52:43.988663Z"},"content_sha256":"29d022f4abdbb77a82f7d1ce6f24c88fd23601426e6b114d31aef0a5f5e76aa5","schema_version":"1.0","event_id":"sha256:29d022f4abdbb77a82f7d1ce6f24c88fd23601426e6b114d31aef0a5f5e76aa5"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2019:K2FGBHVLTNAZB6RSOBWAYI5UE2","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Electromagnetic modeling of near-field phase-shifting contact lithography with broadband ultraviolet illumination","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["physics.optics"],"primary_cat":"physics.app-ph","authors_text":"Akhlesh Lakhtakia, Fei Wang, Katherine E. Weaver, Mark W. Horn","submitted_at":"2019-08-17T05:55:38Z","abstract_excerpt":"Near-field phase-shifting contact lithography is modeled to characterize electromagnetic absorption in a photoresist layer with one face in contact with a quartz binary phase-shift mask. The broadband ultraviolet illumination is represented as a frequency-spectrum of normally incident plane waves. A rigorous coupled-wave analysis is carried out to determine the absorption spectrum of the photoresist layer. The specific absorption rate in the photoresist layer is calculated and examined in relation to the geometric parameters. Columnar features in the photoresist layer are of higher quality on "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1909.13618","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/1909.13618/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T00:10:44Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"D6/m1yyelwe0uevQy7Mfjv4V4VvTFB32PV+IPW8P72lBtm3hEQy5TBLLbvyBhRrczKZpuNCVAQOIWhxklyKrAQ==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-16T13:52:43.989257Z"},"content_sha256":"5e6a42abe05735e5aa9a025ee61aafbd62d2346e073830c4fab44167660f037a","schema_version":"1.0","event_id":"sha256:5e6a42abe05735e5aa9a025ee61aafbd62d2346e073830c4fab44167660f037a"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/K2FGBHVLTNAZB6RSOBWAYI5UE2/bundle.json","state_url":"https://pith.science/pith/K2FGBHVLTNAZB6RSOBWAYI5UE2/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/K2FGBHVLTNAZB6RSOBWAYI5UE2/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-08-16T13:52:43Z","links":{"resolver":"https://pith.science/pith/K2FGBHVLTNAZB6RSOBWAYI5UE2","bundle":"https://pith.science/pith/K2FGBHVLTNAZB6RSOBWAYI5UE2/bundle.json","state":"https://pith.science/pith/K2FGBHVLTNAZB6RSOBWAYI5UE2/state.json","well_known_bundle":"https://pith.science/.well-known/pith/K2FGBHVLTNAZB6RSOBWAYI5UE2/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2019:K2FGBHVLTNAZB6RSOBWAYI5UE2","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"9225f0a1ec6819211713a4cdeef6009d0af6f04b6bd687926dd3cdfdb67cbfa3","cross_cats_sorted":["physics.optics"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2019-08-17T05:55:38Z","title_canon_sha256":"e79bf35be0304a684df8d24dde29d2455d08df16a381f5edad1869c71d1230f2"},"schema_version":"1.0","source":{"id":"1909.13618","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1909.13618","created_at":"2026-07-05T00:10:44Z"},{"alias_kind":"arxiv_version","alias_value":"1909.13618v1","created_at":"2026-07-05T00:10:44Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1909.13618","created_at":"2026-07-05T00:10:44Z"},{"alias_kind":"pith_short_12","alias_value":"K2FGBHVLTNAZ","created_at":"2026-07-05T00:10:44Z"},{"alias_kind":"pith_short_16","alias_value":"K2FGBHVLTNAZB6RS","created_at":"2026-07-05T00:10:44Z"},{"alias_kind":"pith_short_8","alias_value":"K2FGBHVL","created_at":"2026-07-05T00:10:44Z"}],"graph_snapshots":[{"event_id":"sha256:5e6a42abe05735e5aa9a025ee61aafbd62d2346e073830c4fab44167660f037a","target":"graph","created_at":"2026-07-05T00:10:44Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/1909.13618/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"Near-field phase-shifting contact lithography is modeled to characterize electromagnetic absorption in a photoresist layer with one face in contact with a quartz binary phase-shift mask. The broadband ultraviolet illumination is represented as a frequency-spectrum of normally incident plane waves. A rigorous coupled-wave analysis is carried out to determine the absorption spectrum of the photoresist layer. The specific absorption rate in the photoresist layer is calculated and examined in relation to the geometric parameters. Columnar features in the photoresist layer are of higher quality on ","authors_text":"Akhlesh Lakhtakia, Fei Wang, Katherine E. Weaver, Mark W. Horn","cross_cats":["physics.optics"],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2019-08-17T05:55:38Z","title":"Electromagnetic modeling of near-field phase-shifting contact lithography with broadband ultraviolet illumination"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1909.13618","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:29d022f4abdbb77a82f7d1ce6f24c88fd23601426e6b114d31aef0a5f5e76aa5","target":"record","created_at":"2026-07-05T00:10:44Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"9225f0a1ec6819211713a4cdeef6009d0af6f04b6bd687926dd3cdfdb67cbfa3","cross_cats_sorted":["physics.optics"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2019-08-17T05:55:38Z","title_canon_sha256":"e79bf35be0304a684df8d24dde29d2455d08df16a381f5edad1869c71d1230f2"},"schema_version":"1.0","source":{"id":"1909.13618","kind":"arxiv","version":1}},"canonical_sha256":"568a609eab9b4190fa32706c0c23b426830d0b4893e47bef1a978231b27fd41f","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"568a609eab9b4190fa32706c0c23b426830d0b4893e47bef1a978231b27fd41f","first_computed_at":"2026-07-05T00:10:44.977617Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-07-05T00:10:44.977617Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"PEFnXu38UrpD9DmM0DyfwG5kubQ5gUBHtvNJ9dtN0xWmvk246yV6hj3OVNFROu5Xbtlvf2w/kXyyhITk63x0Bw==","signature_status":"signed_v1","signed_at":"2026-07-05T00:10:44.977956Z","signed_message":"canonical_sha256_bytes"},"source_id":"1909.13618","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:29d022f4abdbb77a82f7d1ce6f24c88fd23601426e6b114d31aef0a5f5e76aa5","sha256:5e6a42abe05735e5aa9a025ee61aafbd62d2346e073830c4fab44167660f037a"],"state_sha256":"bbdd7b2c89f81d33352a8dc43d366b255ce83e1d9f3e3afa1a149b360b6f5f5e"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"VKUJX2Cu55sM6rNGxShqxjlycZlilCoFizWPXl72LFneknmOZkytROPh5Jo4xyFNrAsqrrdgBI/swzc1AxweDw==","signed_message":"bundle_sha256_bytes","signed_at":"2026-08-16T13:52:43.993673Z","bundle_sha256":"9ff254336d9090d84a2b77b3b7d874fa63c0c98d7b810a77f35a348db29df0dd"}}