{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2018:KAYLBC6SMNHRW5MAW2Z4J77XBY","short_pith_number":"pith:KAYLBC6S","schema_version":"1.0","canonical_sha256":"5030b08bd2634f1b7580b6b3c4fff70e0509e9dbbda8857ed84f9217954992e2","source":{"kind":"arxiv","id":"1810.12129","version":1},"attestation_state":"computed","paper":{"title":"Towards Sub-micrometer High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Joan Vila-Comamala, Konstantins Jefimovs, Lucia Romano, Marco Stampanoni, Matias Kagias, Vitaliy Guzenko","submitted_at":"2018-10-29T13:53:52Z","abstract_excerpt":"X-ray grating interferometry is an excellent technique for X-ray phase contrast imaging and X-ray wavefront sensing with applications in materials science, biology and medical diagnosis. Among other requirements, the method depends on the availability of highly X-ray absorbing metallic gratings. Here, we report on the fabrication and characterization of high aspect ratio iridium gratings with a period of one micrometer and a depth of 30 micrometer combining deep reactive ion etching of silicon and atomic layer deposition of iridium. The implementation of such structures can greatly enhance the"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1810.12129","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2018-10-29T13:53:52Z","cross_cats_sorted":[],"title_canon_sha256":"98aaf21834fe48b41c2d0d1ce39ab728a689ddf82798553b4ab494bb7a73ad9b","abstract_canon_sha256":"3da859961bc15236f9413ec17a82f54a8dc4fb1fa757ca96be06676f60b0c2d5"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T00:02:04.220503Z","signature_b64":"DQRSOgO9P73E4NxboPFnL0kS1dm+GrWWGD1v4hz3vdjDseYCb7J6q2AY9I9Jc6MYMpB3UsUr3CYoYyzZ17BhBw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"5030b08bd2634f1b7580b6b3c4fff70e0509e9dbbda8857ed84f9217954992e2","last_reissued_at":"2026-05-18T00:02:04.219895Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T00:02:04.219895Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Towards Sub-micrometer High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Joan Vila-Comamala, Konstantins Jefimovs, Lucia Romano, Marco Stampanoni, Matias Kagias, Vitaliy Guzenko","submitted_at":"2018-10-29T13:53:52Z","abstract_excerpt":"X-ray grating interferometry is an excellent technique for X-ray phase contrast imaging and X-ray wavefront sensing with applications in materials science, biology and medical diagnosis. Among other requirements, the method depends on the availability of highly X-ray absorbing metallic gratings. Here, we report on the fabrication and characterization of high aspect ratio iridium gratings with a period of one micrometer and a depth of 30 micrometer combining deep reactive ion etching of silicon and atomic layer deposition of iridium. The implementation of such structures can greatly enhance the"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1810.12129","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1810.12129","created_at":"2026-05-18T00:02:04.219983+00:00"},{"alias_kind":"arxiv_version","alias_value":"1810.12129v1","created_at":"2026-05-18T00:02:04.219983+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1810.12129","created_at":"2026-05-18T00:02:04.219983+00:00"},{"alias_kind":"pith_short_12","alias_value":"KAYLBC6SMNHR","created_at":"2026-05-18T12:32:33.847187+00:00"},{"alias_kind":"pith_short_16","alias_value":"KAYLBC6SMNHRW5MA","created_at":"2026-05-18T12:32:33.847187+00:00"},{"alias_kind":"pith_short_8","alias_value":"KAYLBC6S","created_at":"2026-05-18T12:32:33.847187+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/KAYLBC6SMNHRW5MAW2Z4J77XBY","json":"https://pith.science/pith/KAYLBC6SMNHRW5MAW2Z4J77XBY.json","graph_json":"https://pith.science/api/pith-number/KAYLBC6SMNHRW5MAW2Z4J77XBY/graph.json","events_json":"https://pith.science/api/pith-number/KAYLBC6SMNHRW5MAW2Z4J77XBY/events.json","paper":"https://pith.science/paper/KAYLBC6S"},"agent_actions":{"view_html":"https://pith.science/pith/KAYLBC6SMNHRW5MAW2Z4J77XBY","download_json":"https://pith.science/pith/KAYLBC6SMNHRW5MAW2Z4J77XBY.json","view_paper":"https://pith.science/paper/KAYLBC6S","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1810.12129&json=true","fetch_graph":"https://pith.science/api/pith-number/KAYLBC6SMNHRW5MAW2Z4J77XBY/graph.json","fetch_events":"https://pith.science/api/pith-number/KAYLBC6SMNHRW5MAW2Z4J77XBY/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/KAYLBC6SMNHRW5MAW2Z4J77XBY/action/timestamp_anchor","attest_storage":"https://pith.science/pith/KAYLBC6SMNHRW5MAW2Z4J77XBY/action/storage_attestation","attest_author":"https://pith.science/pith/KAYLBC6SMNHRW5MAW2Z4J77XBY/action/author_attestation","sign_citation":"https://pith.science/pith/KAYLBC6SMNHRW5MAW2Z4J77XBY/action/citation_signature","submit_replication":"https://pith.science/pith/KAYLBC6SMNHRW5MAW2Z4J77XBY/action/replication_record"}},"created_at":"2026-05-18T00:02:04.219983+00:00","updated_at":"2026-05-18T00:02:04.219983+00:00"}