{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2025:LB6RU2SLBMBBQ76W2SCFLGHVAJ","short_pith_number":"pith:LB6RU2SL","schema_version":"1.0","canonical_sha256":"587d1a6a4b0b02187fd6d4845598f5026ffd020d76fe08ff4a5ef7be1f0566d4","source":{"kind":"arxiv","id":"2508.17873","version":1},"attestation_state":"computed","paper":{"title":"Compressed Learning for Nanosurface Deficiency Recognition Using Angle-resolved Scatterometry Data","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["eess.IV"],"primary_cat":"eess.SP","authors_text":"Andreas Fischer, Armin Dekorsy, Carsten Bockelmann, Mehdi Abdollahpour, Tajim Md Hasibur Rahman","submitted_at":"2025-08-25T10:28:18Z","abstract_excerpt":"Nanoscale manufacturing requires high-precision surface inspection to guarantee the quality of the produced nanostructures. For production environments, angle-resolved scatterometry offers a non- invasive and in-line compatible alternative to traditional surface inspection methods, such as scanning electron microscopy. However, angle-resolved scatterometry currently suffers from long data acquisition time. Our study addresses the issue of slow data acquisition by proposing a compressed learning framework for the accurate recognition of nanosurface deficiencies using angle-resolved scatterometr"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"2508.17873","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"eess.SP","submitted_at":"2025-08-25T10:28:18Z","cross_cats_sorted":["eess.IV"],"title_canon_sha256":"2abe608a167d6a8393c22c47668ee49c9157afe5d3bbd126a1bf7b4b5b1598ef","abstract_canon_sha256":"dd377aff76db7b18c2d768242ee2a54c4e8f443fdc132cda9cd4cb5f62904cb9"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T11:58:49.466616Z","signature_b64":"Ll3OTgZUSuMRVYCj3d8Nyz0+6A2bo/670V8l3WLEeOl1PXMyCr1lT4Nb01QC1vIZSv7dg974sfO21SLZqm2fAA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"587d1a6a4b0b02187fd6d4845598f5026ffd020d76fe08ff4a5ef7be1f0566d4","last_reissued_at":"2026-07-05T11:58:49.466156Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T11:58:49.466156Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Compressed Learning for Nanosurface Deficiency Recognition Using Angle-resolved Scatterometry Data","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["eess.IV"],"primary_cat":"eess.SP","authors_text":"Andreas Fischer, Armin Dekorsy, Carsten Bockelmann, Mehdi Abdollahpour, Tajim Md Hasibur Rahman","submitted_at":"2025-08-25T10:28:18Z","abstract_excerpt":"Nanoscale manufacturing requires high-precision surface inspection to guarantee the quality of the produced nanostructures. For production environments, angle-resolved scatterometry offers a non- invasive and in-line compatible alternative to traditional surface inspection methods, such as scanning electron microscopy. However, angle-resolved scatterometry currently suffers from long data acquisition time. Our study addresses the issue of slow data acquisition by proposing a compressed learning framework for the accurate recognition of nanosurface deficiencies using angle-resolved scatterometr"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2508.17873","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2508.17873/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"2508.17873","created_at":"2026-07-05T11:58:49.466213+00:00"},{"alias_kind":"arxiv_version","alias_value":"2508.17873v1","created_at":"2026-07-05T11:58:49.466213+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2508.17873","created_at":"2026-07-05T11:58:49.466213+00:00"},{"alias_kind":"pith_short_12","alias_value":"LB6RU2SLBMBB","created_at":"2026-07-05T11:58:49.466213+00:00"},{"alias_kind":"pith_short_16","alias_value":"LB6RU2SLBMBBQ76W","created_at":"2026-07-05T11:58:49.466213+00:00"},{"alias_kind":"pith_short_8","alias_value":"LB6RU2SL","created_at":"2026-07-05T11:58:49.466213+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/LB6RU2SLBMBBQ76W2SCFLGHVAJ","json":"https://pith.science/pith/LB6RU2SLBMBBQ76W2SCFLGHVAJ.json","graph_json":"https://pith.science/api/pith-number/LB6RU2SLBMBBQ76W2SCFLGHVAJ/graph.json","events_json":"https://pith.science/api/pith-number/LB6RU2SLBMBBQ76W2SCFLGHVAJ/events.json","paper":"https://pith.science/paper/LB6RU2SL"},"agent_actions":{"view_html":"https://pith.science/pith/LB6RU2SLBMBBQ76W2SCFLGHVAJ","download_json":"https://pith.science/pith/LB6RU2SLBMBBQ76W2SCFLGHVAJ.json","view_paper":"https://pith.science/paper/LB6RU2SL","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=2508.17873&json=true","fetch_graph":"https://pith.science/api/pith-number/LB6RU2SLBMBBQ76W2SCFLGHVAJ/graph.json","fetch_events":"https://pith.science/api/pith-number/LB6RU2SLBMBBQ76W2SCFLGHVAJ/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/LB6RU2SLBMBBQ76W2SCFLGHVAJ/action/timestamp_anchor","attest_storage":"https://pith.science/pith/LB6RU2SLBMBBQ76W2SCFLGHVAJ/action/storage_attestation","attest_author":"https://pith.science/pith/LB6RU2SLBMBBQ76W2SCFLGHVAJ/action/author_attestation","sign_citation":"https://pith.science/pith/LB6RU2SLBMBBQ76W2SCFLGHVAJ/action/citation_signature","submit_replication":"https://pith.science/pith/LB6RU2SLBMBBQ76W2SCFLGHVAJ/action/replication_record"}},"created_at":"2026-07-05T11:58:49.466213+00:00","updated_at":"2026-07-05T11:58:49.466213+00:00"}