{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2022:ODH57R25ASBKV66R2RZPAIRITE","short_pith_number":"pith:ODH57R25","schema_version":"1.0","canonical_sha256":"70cfdfc75d0482aafbd1d472f02228991f999e2bc630484dd93b0b9abaa97725","source":{"kind":"arxiv","id":"2207.14027","version":2},"attestation_state":"computed","paper":{"title":"Engineering high quality graphene superlattices via ion milled ultra-thin etching masks","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["cond-mat.mtrl-sci"],"primary_cat":"cond-mat.mes-hall","authors_text":"Adrian Bachtold, David Barcons Ruiz, Frank H. L. Koppens, Hanan Herzig Sheinfux, Hitesh Agarwal, Iacopo Torre, Kenji Watanabe, Lorenzo Vistoli, Rebecca Hoffmann, Roshan Krishna Kumar, Takashi Taniguchi","submitted_at":"2022-07-28T11:42:25Z","abstract_excerpt":"Nanofabrication research pursues the miniaturization of patterned feature size. In the current state of the art, micron scale areas can be patterned with features down to ~ 30 nm pitch using electron beam lithography. Our work demonstrates a new nanofabrication technique which allows patterning periodic structures with a pitch down to 16 nm. It is based on focused ion beam milling of suspended membranes, with minimal proximity effects typical to electron beam lithography. The membranes are then transferred and used as hard etching masks. We benchmark our technique by engineering a superlattice"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"2207.14027","kind":"arxiv","version":2},"metadata":{"license":"http://creativecommons.org/licenses/by/4.0/","primary_cat":"cond-mat.mes-hall","submitted_at":"2022-07-28T11:42:25Z","cross_cats_sorted":["cond-mat.mtrl-sci"],"title_canon_sha256":"3bbf3cd44f9b692fe9f1e54334b523255ad45e3124c770acd59d5fb22b20391b","abstract_canon_sha256":"ba67942fa0c1bccb66f61df035bee57d0a104cbc65131d3d2ba775302438dc2f"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T05:38:08.955399Z","signature_b64":"TPld7iPt4oKIl/WA+gYTaxKIvEfJV+9tjmSW1LhMB+lfyy9WkiK5Up+mgQ8JLwYHPdd4OexW/JRIfa0S4DIyCQ==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"70cfdfc75d0482aafbd1d472f02228991f999e2bc630484dd93b0b9abaa97725","last_reissued_at":"2026-07-05T05:38:08.954983Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T05:38:08.954983Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Engineering high quality graphene superlattices via ion milled ultra-thin etching masks","license":"http://creativecommons.org/licenses/by/4.0/","headline":"","cross_cats":["cond-mat.mtrl-sci"],"primary_cat":"cond-mat.mes-hall","authors_text":"Adrian Bachtold, David Barcons Ruiz, Frank H. L. Koppens, Hanan Herzig Sheinfux, Hitesh Agarwal, Iacopo Torre, Kenji Watanabe, Lorenzo Vistoli, Rebecca Hoffmann, Roshan Krishna Kumar, Takashi Taniguchi","submitted_at":"2022-07-28T11:42:25Z","abstract_excerpt":"Nanofabrication research pursues the miniaturization of patterned feature size. In the current state of the art, micron scale areas can be patterned with features down to ~ 30 nm pitch using electron beam lithography. Our work demonstrates a new nanofabrication technique which allows patterning periodic structures with a pitch down to 16 nm. It is based on focused ion beam milling of suspended membranes, with minimal proximity effects typical to electron beam lithography. The membranes are then transferred and used as hard etching masks. We benchmark our technique by engineering a superlattice"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2207.14027","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2207.14027/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"2207.14027","created_at":"2026-07-05T05:38:08.955039+00:00"},{"alias_kind":"arxiv_version","alias_value":"2207.14027v2","created_at":"2026-07-05T05:38:08.955039+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2207.14027","created_at":"2026-07-05T05:38:08.955039+00:00"},{"alias_kind":"pith_short_12","alias_value":"ODH57R25ASBK","created_at":"2026-07-05T05:38:08.955039+00:00"},{"alias_kind":"pith_short_16","alias_value":"ODH57R25ASBKV66R","created_at":"2026-07-05T05:38:08.955039+00:00"},{"alias_kind":"pith_short_8","alias_value":"ODH57R25","created_at":"2026-07-05T05:38:08.955039+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":1,"internal_anchor_count":0,"sample":[{"citing_arxiv_id":"2507.04399","citing_title":"Miniband Generation by Surface Acoustic Waves","ref_index":59,"is_internal_anchor":false}]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/ODH57R25ASBKV66R2RZPAIRITE","json":"https://pith.science/pith/ODH57R25ASBKV66R2RZPAIRITE.json","graph_json":"https://pith.science/api/pith-number/ODH57R25ASBKV66R2RZPAIRITE/graph.json","events_json":"https://pith.science/api/pith-number/ODH57R25ASBKV66R2RZPAIRITE/events.json","paper":"https://pith.science/paper/ODH57R25"},"agent_actions":{"view_html":"https://pith.science/pith/ODH57R25ASBKV66R2RZPAIRITE","download_json":"https://pith.science/pith/ODH57R25ASBKV66R2RZPAIRITE.json","view_paper":"https://pith.science/paper/ODH57R25","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=2207.14027&json=true","fetch_graph":"https://pith.science/api/pith-number/ODH57R25ASBKV66R2RZPAIRITE/graph.json","fetch_events":"https://pith.science/api/pith-number/ODH57R25ASBKV66R2RZPAIRITE/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/ODH57R25ASBKV66R2RZPAIRITE/action/timestamp_anchor","attest_storage":"https://pith.science/pith/ODH57R25ASBKV66R2RZPAIRITE/action/storage_attestation","attest_author":"https://pith.science/pith/ODH57R25ASBKV66R2RZPAIRITE/action/author_attestation","sign_citation":"https://pith.science/pith/ODH57R25ASBKV66R2RZPAIRITE/action/citation_signature","submit_replication":"https://pith.science/pith/ODH57R25ASBKV66R2RZPAIRITE/action/replication_record"}},"created_at":"2026-07-05T05:38:08.955039+00:00","updated_at":"2026-07-05T05:38:08.955039+00:00"}