{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2026:OPVGMSSPVWONUYU42FUN6PSZHT","short_pith_number":"pith:OPVGMSSP","canonical_record":{"source":{"id":"2603.00441","kind":"arxiv","version":2},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"quant-ph","submitted_at":"2026-02-28T03:48:09Z","cross_cats_sorted":[],"title_canon_sha256":"ba42433055f09a50647a7a8edf7aa06f9f6cf55b569807bfefe86a8de916af20","abstract_canon_sha256":"5f654ac0e63c5447e084bb1b8dfd60fdabe6df57946125968c49014408e87fd4"},"schema_version":"1.0"},"canonical_sha256":"73ea664a4fad9cda629cd168df3e593cc9d8fffc0a3bdb155663333a9ee1c051","source":{"kind":"arxiv","id":"2603.00441","version":2},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2603.00441","created_at":"2026-07-17T01:20:46Z"},{"alias_kind":"arxiv_version","alias_value":"2603.00441v2","created_at":"2026-07-17T01:20:46Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2603.00441","created_at":"2026-07-17T01:20:46Z"},{"alias_kind":"pith_short_12","alias_value":"OPVGMSSPVWON","created_at":"2026-07-17T01:20:46Z"},{"alias_kind":"pith_short_16","alias_value":"OPVGMSSPVWONUYU4","created_at":"2026-07-17T01:20:46Z"},{"alias_kind":"pith_short_8","alias_value":"OPVGMSSP","created_at":"2026-07-17T01:20:46Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2026:OPVGMSSPVWONUYU42FUN6PSZHT","target":"record","payload":{"canonical_record":{"source":{"id":"2603.00441","kind":"arxiv","version":2},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"quant-ph","submitted_at":"2026-02-28T03:48:09Z","cross_cats_sorted":[],"title_canon_sha256":"ba42433055f09a50647a7a8edf7aa06f9f6cf55b569807bfefe86a8de916af20","abstract_canon_sha256":"5f654ac0e63c5447e084bb1b8dfd60fdabe6df57946125968c49014408e87fd4"},"schema_version":"1.0"},"canonical_sha256":"73ea664a4fad9cda629cd168df3e593cc9d8fffc0a3bdb155663333a9ee1c051","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-17T01:20:46.202323Z","signature_b64":"9roqFB8TgjdNMtBU8i2ay9xVF9hfBLK1/WJj3if5eQUDXkNNuC8HY6S8SM2f3QKvqMyMp+9VXP8dw8LA4F0OAQ==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"73ea664a4fad9cda629cd168df3e593cc9d8fffc0a3bdb155663333a9ee1c051","last_reissued_at":"2026-07-17T01:20:46.201399Z","signature_status":"signed_v1","first_computed_at":"2026-07-17T01:20:46.201399Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"2603.00441","source_version":2,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-17T01:20:46Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"y4U03FqNkM+rxyzmJscqw0zRT8ZFFpb6stHRn4AjuvB8Szs5Ehk3c6bcYHXXJmnrL5WhNDYaawIetDVIKrbTDw==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-01T19:55:52.550930Z"},"content_sha256":"af5e23957ac5846e6ae567c163b2b879e137c8a95316df7465fb650dbdab239d","schema_version":"1.0","event_id":"sha256:af5e23957ac5846e6ae567c163b2b879e137c8a95316df7465fb650dbdab239d"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2026:OPVGMSSPVWONUYU42FUN6PSZHT","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"quant-ph","authors_text":"Alexandra Schewski, Benedikt Schoof, Carla Moran-Guizan, Christoph Kutter, Daniela Zahn, Ignaz Eisele, Johannes Weber, Marc Tornow, Moritz Singer, Rui N. Pereira, Simon J. K. Lang, Thomas Mayer, Zhen Lou","submitted_at":"2026-02-28T03:48:09Z","abstract_excerpt":"We report on the fabrication and characterization of superconducting coplanar waveguide (CPW) resonators based on titanium nitride (TiN) thin films deposited on 200\\,mm diameter high-resistivity Si(100) substrates. We systematically investigate how deposition conditions, dry-etch power and in-situ resist strip temperature affect morphology, superconducting properties and dielectric losses. By tuning reactive sputtering conditions, three distinct preferred out-of-plane crystal orientations - (111), (200), and a mix of both are achieved. Our results demonstrate that all films exhibit similar min"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2603.00441","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2603.00441/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-17T01:20:46Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"+j1rrQc1JvQzDSALXrgU1b5h3PzTA9hsVUsFyzFurybsa/qB9XhbHbLpJQli6stXPJ0YRaCedcISL7l0SUZLCQ==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-01T19:55:52.551483Z"},"content_sha256":"32c541150160ced39837a2d3d20587853748cdb6c71eaa03beb6af249d049fa5","schema_version":"1.0","event_id":"sha256:32c541150160ced39837a2d3d20587853748cdb6c71eaa03beb6af249d049fa5"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/OPVGMSSPVWONUYU42FUN6PSZHT/bundle.json","state_url":"https://pith.science/pith/OPVGMSSPVWONUYU42FUN6PSZHT/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/OPVGMSSPVWONUYU42FUN6PSZHT/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-08-01T19:55:52Z","links":{"resolver":"https://pith.science/pith/OPVGMSSPVWONUYU42FUN6PSZHT","bundle":"https://pith.science/pith/OPVGMSSPVWONUYU42FUN6PSZHT/bundle.json","state":"https://pith.science/pith/OPVGMSSPVWONUYU42FUN6PSZHT/state.json","well_known_bundle":"https://pith.science/.well-known/pith/OPVGMSSPVWONUYU42FUN6PSZHT/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2026:OPVGMSSPVWONUYU42FUN6PSZHT","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"5f654ac0e63c5447e084bb1b8dfd60fdabe6df57946125968c49014408e87fd4","cross_cats_sorted":[],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"quant-ph","submitted_at":"2026-02-28T03:48:09Z","title_canon_sha256":"ba42433055f09a50647a7a8edf7aa06f9f6cf55b569807bfefe86a8de916af20"},"schema_version":"1.0","source":{"id":"2603.00441","kind":"arxiv","version":2}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2603.00441","created_at":"2026-07-17T01:20:46Z"},{"alias_kind":"arxiv_version","alias_value":"2603.00441v2","created_at":"2026-07-17T01:20:46Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2603.00441","created_at":"2026-07-17T01:20:46Z"},{"alias_kind":"pith_short_12","alias_value":"OPVGMSSPVWON","created_at":"2026-07-17T01:20:46Z"},{"alias_kind":"pith_short_16","alias_value":"OPVGMSSPVWONUYU4","created_at":"2026-07-17T01:20:46Z"},{"alias_kind":"pith_short_8","alias_value":"OPVGMSSP","created_at":"2026-07-17T01:20:46Z"}],"graph_snapshots":[{"event_id":"sha256:32c541150160ced39837a2d3d20587853748cdb6c71eaa03beb6af249d049fa5","target":"graph","created_at":"2026-07-17T01:20:46Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/2603.00441/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"We report on the fabrication and characterization of superconducting coplanar waveguide (CPW) resonators based on titanium nitride (TiN) thin films deposited on 200\\,mm diameter high-resistivity Si(100) substrates. We systematically investigate how deposition conditions, dry-etch power and in-situ resist strip temperature affect morphology, superconducting properties and dielectric losses. By tuning reactive sputtering conditions, three distinct preferred out-of-plane crystal orientations - (111), (200), and a mix of both are achieved. Our results demonstrate that all films exhibit similar min","authors_text":"Alexandra Schewski, Benedikt Schoof, Carla Moran-Guizan, Christoph Kutter, Daniela Zahn, Ignaz Eisele, Johannes Weber, Marc Tornow, Moritz Singer, Rui N. Pereira, Simon J. K. Lang, Thomas Mayer, Zhen Lou","cross_cats":[],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"quant-ph","submitted_at":"2026-02-28T03:48:09Z","title":"Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2603.00441","kind":"arxiv","version":2},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:af5e23957ac5846e6ae567c163b2b879e137c8a95316df7465fb650dbdab239d","target":"record","created_at":"2026-07-17T01:20:46Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"5f654ac0e63c5447e084bb1b8dfd60fdabe6df57946125968c49014408e87fd4","cross_cats_sorted":[],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"quant-ph","submitted_at":"2026-02-28T03:48:09Z","title_canon_sha256":"ba42433055f09a50647a7a8edf7aa06f9f6cf55b569807bfefe86a8de916af20"},"schema_version":"1.0","source":{"id":"2603.00441","kind":"arxiv","version":2}},"canonical_sha256":"73ea664a4fad9cda629cd168df3e593cc9d8fffc0a3bdb155663333a9ee1c051","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"73ea664a4fad9cda629cd168df3e593cc9d8fffc0a3bdb155663333a9ee1c051","first_computed_at":"2026-07-17T01:20:46.201399Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-07-17T01:20:46.201399Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"9roqFB8TgjdNMtBU8i2ay9xVF9hfBLK1/WJj3if5eQUDXkNNuC8HY6S8SM2f3QKvqMyMp+9VXP8dw8LA4F0OAQ==","signature_status":"signed_v1","signed_at":"2026-07-17T01:20:46.202323Z","signed_message":"canonical_sha256_bytes"},"source_id":"2603.00441","source_kind":"arxiv","source_version":2}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:af5e23957ac5846e6ae567c163b2b879e137c8a95316df7465fb650dbdab239d","sha256:32c541150160ced39837a2d3d20587853748cdb6c71eaa03beb6af249d049fa5"],"state_sha256":"efdc4f7ce485856cc5886635c93ef6f45ce9f6f23c0346c4ea2685ca2d8d1528"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"Cca+QWTcju+/YAwwNZbz85JqTQFI3LwAtUS+///TiDKxG4FKW7X7vJzW3dDthC8nW2Z7GH4sxlNNJk59XQWoCw==","signed_message":"bundle_sha256_bytes","signed_at":"2026-08-01T19:55:52.555484Z","bundle_sha256":"08050e58f10c83ed56eee6d9e377e19a3c18efbc01659a724cb819bf44e45d6e"}}