{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2022:PZNWRMS2HAPTNRSDX2AK2TPK7A","short_pith_number":"pith:PZNWRMS2","schema_version":"1.0","canonical_sha256":"7e5b68b25a381f36c643be80ad4deaf8169eca2a27a5859fdcaaaffa66132f60","source":{"kind":"arxiv","id":"2211.09985","version":1},"attestation_state":"computed","paper":{"title":"Phase mask pinholes as spatial filters for laser interference lithography","license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","headline":"","cross_cats":["physics.app-ph"],"primary_cat":"physics.optics","authors_text":"Giovanna Capraro, Jens Bolten, Max C. Lemme, Maxim Lipkin, Michael M\\\"oller","submitted_at":"2022-11-18T02:13:16Z","abstract_excerpt":"Laser resonators have outputs with Gaussian spatial beam profiles. In laser interference lithography (LIL), using such Gaussian shaped beams leads to an inhomogeneous exposure of the substrate. As a result, dimensions of lithography defined features vary significantly across the substrate. In most LIL setups, pinholes are used as filters to remove optical noise. Following a concept proposed by Hariharan et. al. a phase mask can be added to these pinholes. In theory, this modification results in a more uniform beam profile, and, if applied as spatial filters in LIL, in improved exposure and hen"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"2211.09985","kind":"arxiv","version":1},"metadata":{"license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","primary_cat":"physics.optics","submitted_at":"2022-11-18T02:13:16Z","cross_cats_sorted":["physics.app-ph"],"title_canon_sha256":"22eb07791eb4d9a10fe5d0a062f028982202482c741fe1b027391cc0a12edb1a","abstract_canon_sha256":"9abe8426f6379db7d310441a373d7afb8be2a0a78cf548459ac07874df0d6293"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T07:14:51.351639Z","signature_b64":"j1jTGM0Cg1riYUJu2SSa+uzfNdt6yZ2JoWGER/AjGtGNeIK9YLYMcaC8F78URzy9O/7yGGwrIjx/jdIKv/+nBQ==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"7e5b68b25a381f36c643be80ad4deaf8169eca2a27a5859fdcaaaffa66132f60","last_reissued_at":"2026-07-05T07:14:51.351219Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T07:14:51.351219Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Phase mask pinholes as spatial filters for laser interference lithography","license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","headline":"","cross_cats":["physics.app-ph"],"primary_cat":"physics.optics","authors_text":"Giovanna Capraro, Jens Bolten, Max C. Lemme, Maxim Lipkin, Michael M\\\"oller","submitted_at":"2022-11-18T02:13:16Z","abstract_excerpt":"Laser resonators have outputs with Gaussian spatial beam profiles. In laser interference lithography (LIL), using such Gaussian shaped beams leads to an inhomogeneous exposure of the substrate. As a result, dimensions of lithography defined features vary significantly across the substrate. In most LIL setups, pinholes are used as filters to remove optical noise. Following a concept proposed by Hariharan et. al. a phase mask can be added to these pinholes. In theory, this modification results in a more uniform beam profile, and, if applied as spatial filters in LIL, in improved exposure and hen"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2211.09985","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2211.09985/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"2211.09985","created_at":"2026-07-05T07:14:51.351275+00:00"},{"alias_kind":"arxiv_version","alias_value":"2211.09985v1","created_at":"2026-07-05T07:14:51.351275+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2211.09985","created_at":"2026-07-05T07:14:51.351275+00:00"},{"alias_kind":"pith_short_12","alias_value":"PZNWRMS2HAPT","created_at":"2026-07-05T07:14:51.351275+00:00"},{"alias_kind":"pith_short_16","alias_value":"PZNWRMS2HAPTNRSD","created_at":"2026-07-05T07:14:51.351275+00:00"},{"alias_kind":"pith_short_8","alias_value":"PZNWRMS2","created_at":"2026-07-05T07:14:51.351275+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/PZNWRMS2HAPTNRSDX2AK2TPK7A","json":"https://pith.science/pith/PZNWRMS2HAPTNRSDX2AK2TPK7A.json","graph_json":"https://pith.science/api/pith-number/PZNWRMS2HAPTNRSDX2AK2TPK7A/graph.json","events_json":"https://pith.science/api/pith-number/PZNWRMS2HAPTNRSDX2AK2TPK7A/events.json","paper":"https://pith.science/paper/PZNWRMS2"},"agent_actions":{"view_html":"https://pith.science/pith/PZNWRMS2HAPTNRSDX2AK2TPK7A","download_json":"https://pith.science/pith/PZNWRMS2HAPTNRSDX2AK2TPK7A.json","view_paper":"https://pith.science/paper/PZNWRMS2","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=2211.09985&json=true","fetch_graph":"https://pith.science/api/pith-number/PZNWRMS2HAPTNRSDX2AK2TPK7A/graph.json","fetch_events":"https://pith.science/api/pith-number/PZNWRMS2HAPTNRSDX2AK2TPK7A/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/PZNWRMS2HAPTNRSDX2AK2TPK7A/action/timestamp_anchor","attest_storage":"https://pith.science/pith/PZNWRMS2HAPTNRSDX2AK2TPK7A/action/storage_attestation","attest_author":"https://pith.science/pith/PZNWRMS2HAPTNRSDX2AK2TPK7A/action/author_attestation","sign_citation":"https://pith.science/pith/PZNWRMS2HAPTNRSDX2AK2TPK7A/action/citation_signature","submit_replication":"https://pith.science/pith/PZNWRMS2HAPTNRSDX2AK2TPK7A/action/replication_record"}},"created_at":"2026-07-05T07:14:51.351275+00:00","updated_at":"2026-07-05T07:14:51.351275+00:00"}