{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2018:RXP6BWXUMX6GZDGLSL2DPZDBD5","short_pith_number":"pith:RXP6BWXU","schema_version":"1.0","canonical_sha256":"8ddfe0daf465fc6c8ccb92f437e4611f786167ab821f49da81b868a7c4d83e85","source":{"kind":"arxiv","id":"1812.08687","version":1},"attestation_state":"computed","paper":{"title":"Investigation of the quality of an As35S65 grating by spectroscopic ellipsometry","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.optics","authors_text":"Jan Mistrik, Jaroslav Hamrle, Josef Navratil, Karel Palka, Martin Veis, Miroslav Vlcek, Roman Antos, Stanislav Slang","submitted_at":"2018-12-20T16:39:11Z","abstract_excerpt":"The quality of an As35S65 chalcogenide glass (ChG) grating fabricated by electron beam lithography (EBL) was characterized by optical scatterometry based on spectroscopic ellipsometry (SE) in the visible and near infrared spectral range and complementary techniques providing direct images, especially atomic force microscopy (AFM). The geometric dimensions and the shape of patterned grating lines were determined by fitting modeled values (calculated by the Fourier modal method) to SE experimental data. A simple power-dependent function with only one variable parameter was successfully used to d"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1812.08687","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2018-12-20T16:39:11Z","cross_cats_sorted":[],"title_canon_sha256":"98c709f6dd306b1296ce91d6205a41afb5a3a3c76846a6b162d7b302c4441e6e","abstract_canon_sha256":"ddc58d6494d30aa4b2ea98868de867f56f68e25b794cd8c57b0ddf23e3964d7c"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-17T23:57:49.376508Z","signature_b64":"qdFryR6+1wohjwf2YV2D3QNuzbSP1uzu46aQBJ9kpYvK3APVKX3+KJJSw0/1pL0LpUANh8NMrZE15TD0hc/pAw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"8ddfe0daf465fc6c8ccb92f437e4611f786167ab821f49da81b868a7c4d83e85","last_reissued_at":"2026-05-17T23:57:49.376010Z","signature_status":"signed_v1","first_computed_at":"2026-05-17T23:57:49.376010Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Investigation of the quality of an As35S65 grating by spectroscopic ellipsometry","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.optics","authors_text":"Jan Mistrik, Jaroslav Hamrle, Josef Navratil, Karel Palka, Martin Veis, Miroslav Vlcek, Roman Antos, Stanislav Slang","submitted_at":"2018-12-20T16:39:11Z","abstract_excerpt":"The quality of an As35S65 chalcogenide glass (ChG) grating fabricated by electron beam lithography (EBL) was characterized by optical scatterometry based on spectroscopic ellipsometry (SE) in the visible and near infrared spectral range and complementary techniques providing direct images, especially atomic force microscopy (AFM). The geometric dimensions and the shape of patterned grating lines were determined by fitting modeled values (calculated by the Fourier modal method) to SE experimental data. A simple power-dependent function with only one variable parameter was successfully used to d"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1812.08687","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1812.08687","created_at":"2026-05-17T23:57:49.376084+00:00"},{"alias_kind":"arxiv_version","alias_value":"1812.08687v1","created_at":"2026-05-17T23:57:49.376084+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1812.08687","created_at":"2026-05-17T23:57:49.376084+00:00"},{"alias_kind":"pith_short_12","alias_value":"RXP6BWXUMX6G","created_at":"2026-05-18T12:32:50.500415+00:00"},{"alias_kind":"pith_short_16","alias_value":"RXP6BWXUMX6GZDGL","created_at":"2026-05-18T12:32:50.500415+00:00"},{"alias_kind":"pith_short_8","alias_value":"RXP6BWXU","created_at":"2026-05-18T12:32:50.500415+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/RXP6BWXUMX6GZDGLSL2DPZDBD5","json":"https://pith.science/pith/RXP6BWXUMX6GZDGLSL2DPZDBD5.json","graph_json":"https://pith.science/api/pith-number/RXP6BWXUMX6GZDGLSL2DPZDBD5/graph.json","events_json":"https://pith.science/api/pith-number/RXP6BWXUMX6GZDGLSL2DPZDBD5/events.json","paper":"https://pith.science/paper/RXP6BWXU"},"agent_actions":{"view_html":"https://pith.science/pith/RXP6BWXUMX6GZDGLSL2DPZDBD5","download_json":"https://pith.science/pith/RXP6BWXUMX6GZDGLSL2DPZDBD5.json","view_paper":"https://pith.science/paper/RXP6BWXU","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1812.08687&json=true","fetch_graph":"https://pith.science/api/pith-number/RXP6BWXUMX6GZDGLSL2DPZDBD5/graph.json","fetch_events":"https://pith.science/api/pith-number/RXP6BWXUMX6GZDGLSL2DPZDBD5/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/RXP6BWXUMX6GZDGLSL2DPZDBD5/action/timestamp_anchor","attest_storage":"https://pith.science/pith/RXP6BWXUMX6GZDGLSL2DPZDBD5/action/storage_attestation","attest_author":"https://pith.science/pith/RXP6BWXUMX6GZDGLSL2DPZDBD5/action/author_attestation","sign_citation":"https://pith.science/pith/RXP6BWXUMX6GZDGLSL2DPZDBD5/action/citation_signature","submit_replication":"https://pith.science/pith/RXP6BWXUMX6GZDGLSL2DPZDBD5/action/replication_record"}},"created_at":"2026-05-17T23:57:49.376084+00:00","updated_at":"2026-05-17T23:57:49.376084+00:00"}