{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2013:TLBVDYF6S2N3I5TCVIQ57RRXED","short_pith_number":"pith:TLBVDYF6","schema_version":"1.0","canonical_sha256":"9ac351e0be969bb47662aa21dfc63720d0b58ebad37d2c9a2e091c56c0c95ff4","source":{"kind":"arxiv","id":"1311.7545","version":3},"attestation_state":"computed","paper":{"title":"Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.plasm-ph","authors_text":"Achim von Keudell, Christian Maszl, Jan Benedikt, Wolfgang Breilmann","submitted_at":"2013-11-29T12:38:51Z","abstract_excerpt":"HiPIMS plasmas generate energetic metal ions at the substrate as a major difference to conventional direct current magnetron sputtering. The origin of these ions is still an open issue, which is unraveled by using two fast diagnostics: time resolved mass spectrometry with a temporal resolution of 2 $\\mu$s and phase resolved optical emission spectroscopy with a temporal resolution of 1 $\\mu$s. A power scan from dcMS-like to HiPIMS plasmas was performed, with a 2-inch magnetron and a titanium target as sputter source and argon as working gas. Clear differences in the transport as well in the ene"},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1311.7545","kind":"arxiv","version":3},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.plasm-ph","submitted_at":"2013-11-29T12:38:51Z","cross_cats_sorted":[],"title_canon_sha256":"c6bdba2b3c114a3db8b00cac91b951053d6e1f0266c8869db3e8fc50e983745b","abstract_canon_sha256":"208be7b456e6bed4f0a4d3d946b86da5d10c1184be422c5b4a6d515cfb1ea3c6"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T02:49:07.239868Z","signature_b64":"qghX5Kc3eABbmfpk/EMbjXV6RPevWPVlFq3Plb42vcIOU9FYQxyNxXugeU+yY1gQYZ8lgbv2j8Cp5rrNXSuJAA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"9ac351e0be969bb47662aa21dfc63720d0b58ebad37d2c9a2e091c56c0c95ff4","last_reissued_at":"2026-07-05T02:49:07.239387Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T02:49:07.239387Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.plasm-ph","authors_text":"Achim von Keudell, Christian Maszl, Jan Benedikt, Wolfgang Breilmann","submitted_at":"2013-11-29T12:38:51Z","abstract_excerpt":"HiPIMS plasmas generate energetic metal ions at the substrate as a major difference to conventional direct current magnetron sputtering. The origin of these ions is still an open issue, which is unraveled by using two fast diagnostics: time resolved mass spectrometry with a temporal resolution of 2 $\\mu$s and phase resolved optical emission spectroscopy with a temporal resolution of 1 $\\mu$s. A power scan from dcMS-like to HiPIMS plasmas was performed, with a 2-inch magnetron and a titanium target as sputter source and argon as working gas. Clear differences in the transport as well in the ene"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1311.7545","kind":"arxiv","version":3},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/1311.7545/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1311.7545","created_at":"2026-07-05T02:49:07.239442+00:00"},{"alias_kind":"arxiv_version","alias_value":"1311.7545v3","created_at":"2026-07-05T02:49:07.239442+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1311.7545","created_at":"2026-07-05T02:49:07.239442+00:00"},{"alias_kind":"pith_short_12","alias_value":"TLBVDYF6S2N3","created_at":"2026-07-05T02:49:07.239442+00:00"},{"alias_kind":"pith_short_16","alias_value":"TLBVDYF6S2N3I5TC","created_at":"2026-07-05T02:49:07.239442+00:00"},{"alias_kind":"pith_short_8","alias_value":"TLBVDYF6","created_at":"2026-07-05T02:49:07.239442+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/TLBVDYF6S2N3I5TCVIQ57RRXED","json":"https://pith.science/pith/TLBVDYF6S2N3I5TCVIQ57RRXED.json","graph_json":"https://pith.science/api/pith-number/TLBVDYF6S2N3I5TCVIQ57RRXED/graph.json","events_json":"https://pith.science/api/pith-number/TLBVDYF6S2N3I5TCVIQ57RRXED/events.json","paper":"https://pith.science/paper/TLBVDYF6"},"agent_actions":{"view_html":"https://pith.science/pith/TLBVDYF6S2N3I5TCVIQ57RRXED","download_json":"https://pith.science/pith/TLBVDYF6S2N3I5TCVIQ57RRXED.json","view_paper":"https://pith.science/paper/TLBVDYF6","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1311.7545&json=true","fetch_graph":"https://pith.science/api/pith-number/TLBVDYF6S2N3I5TCVIQ57RRXED/graph.json","fetch_events":"https://pith.science/api/pith-number/TLBVDYF6S2N3I5TCVIQ57RRXED/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/TLBVDYF6S2N3I5TCVIQ57RRXED/action/timestamp_anchor","attest_storage":"https://pith.science/pith/TLBVDYF6S2N3I5TCVIQ57RRXED/action/storage_attestation","attest_author":"https://pith.science/pith/TLBVDYF6S2N3I5TCVIQ57RRXED/action/author_attestation","sign_citation":"https://pith.science/pith/TLBVDYF6S2N3I5TCVIQ57RRXED/action/citation_signature","submit_replication":"https://pith.science/pith/TLBVDYF6S2N3I5TCVIQ57RRXED/action/replication_record"}},"created_at":"2026-07-05T02:49:07.239442+00:00","updated_at":"2026-07-05T02:49:07.239442+00:00"}