{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2010:TWXSHHKAYZXHBNTYFI3LFJEFZV","short_pith_number":"pith:TWXSHHKA","schema_version":"1.0","canonical_sha256":"9daf239d40c66e70b6782a36b2a485cd60f0929a8c2b4136a42093ab981a0c8a","source":{"kind":"arxiv","id":"1003.0796","version":1},"attestation_state":"computed","paper":{"title":"In-situ direct visualization of irradiated e-beam patterns on unprocessed resists using atomic force microscopy","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.other"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"A.W. Holleitner, D. Schnurbusch, H. Koop, K. Karrai, M.-C. Amann, M. Mueller, M. Zech, T. Gruendl","submitted_at":"2010-03-03T13:07:17Z","abstract_excerpt":"We introduce an in-situ characterization method of resists used for e-beam lithography. The technique is based on the application of an atomic force microscope which is directly mounted below the cathode of an electron-beam lithography system. We demonstrate that patterns irradiated by the e-beam can be efficiently visualized and analyzed in surface topography directly after the e-beam exposure. This in-situ analysis takes place without any development or baking steps, and gives access to the chemical (or latent) image of the irradiated resist."},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1003.0796","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2010-03-03T13:07:17Z","cross_cats_sorted":["cond-mat.other"],"title_canon_sha256":"df6a35ea0dc7f1695c5bd24e4fda20db2c631968969cd5b21a59fc50528de442","abstract_canon_sha256":"7f9ffd51fb3f041e656b8e9390bdcc5b970cf6da868968d7d57c7b93c9946727"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T02:08:47.123768Z","signature_b64":"G0TcjKDAELX5oB1drPHgn/8whlBqQcwp+INj2BUpfYlZu3LXlm2nYwDKLhZnpSEGywIxDPd20HVMpWmgJXGmBw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"9daf239d40c66e70b6782a36b2a485cd60f0929a8c2b4136a42093ab981a0c8a","last_reissued_at":"2026-05-18T02:08:47.123181Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T02:08:47.123181Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"In-situ direct visualization of irradiated e-beam patterns on unprocessed resists using atomic force microscopy","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.other"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"A.W. Holleitner, D. Schnurbusch, H. Koop, K. Karrai, M.-C. Amann, M. Mueller, M. Zech, T. Gruendl","submitted_at":"2010-03-03T13:07:17Z","abstract_excerpt":"We introduce an in-situ characterization method of resists used for e-beam lithography. The technique is based on the application of an atomic force microscope which is directly mounted below the cathode of an electron-beam lithography system. We demonstrate that patterns irradiated by the e-beam can be efficiently visualized and analyzed in surface topography directly after the e-beam exposure. This in-situ analysis takes place without any development or baking steps, and gives access to the chemical (or latent) image of the irradiated resist."},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1003.0796","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1003.0796","created_at":"2026-05-18T02:08:47.123272+00:00"},{"alias_kind":"arxiv_version","alias_value":"1003.0796v1","created_at":"2026-05-18T02:08:47.123272+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1003.0796","created_at":"2026-05-18T02:08:47.123272+00:00"},{"alias_kind":"pith_short_12","alias_value":"TWXSHHKAYZXH","created_at":"2026-05-18T12:26:15.391820+00:00"},{"alias_kind":"pith_short_16","alias_value":"TWXSHHKAYZXHBNTY","created_at":"2026-05-18T12:26:15.391820+00:00"},{"alias_kind":"pith_short_8","alias_value":"TWXSHHKA","created_at":"2026-05-18T12:26:15.391820+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV","json":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV.json","graph_json":"https://pith.science/api/pith-number/TWXSHHKAYZXHBNTYFI3LFJEFZV/graph.json","events_json":"https://pith.science/api/pith-number/TWXSHHKAYZXHBNTYFI3LFJEFZV/events.json","paper":"https://pith.science/paper/TWXSHHKA"},"agent_actions":{"view_html":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV","download_json":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV.json","view_paper":"https://pith.science/paper/TWXSHHKA","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1003.0796&json=true","fetch_graph":"https://pith.science/api/pith-number/TWXSHHKAYZXHBNTYFI3LFJEFZV/graph.json","fetch_events":"https://pith.science/api/pith-number/TWXSHHKAYZXHBNTYFI3LFJEFZV/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV/action/timestamp_anchor","attest_storage":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV/action/storage_attestation","attest_author":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV/action/author_attestation","sign_citation":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV/action/citation_signature","submit_replication":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV/action/replication_record"}},"created_at":"2026-05-18T02:08:47.123272+00:00","updated_at":"2026-05-18T02:08:47.123272+00:00"}