{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2010:TWXSHHKAYZXHBNTYFI3LFJEFZV","short_pith_number":"pith:TWXSHHKA","canonical_record":{"source":{"id":"1003.0796","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2010-03-03T13:07:17Z","cross_cats_sorted":["cond-mat.other"],"title_canon_sha256":"df6a35ea0dc7f1695c5bd24e4fda20db2c631968969cd5b21a59fc50528de442","abstract_canon_sha256":"7f9ffd51fb3f041e656b8e9390bdcc5b970cf6da868968d7d57c7b93c9946727"},"schema_version":"1.0"},"canonical_sha256":"9daf239d40c66e70b6782a36b2a485cd60f0929a8c2b4136a42093ab981a0c8a","source":{"kind":"arxiv","id":"1003.0796","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1003.0796","created_at":"2026-05-18T02:08:47Z"},{"alias_kind":"arxiv_version","alias_value":"1003.0796v1","created_at":"2026-05-18T02:08:47Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1003.0796","created_at":"2026-05-18T02:08:47Z"},{"alias_kind":"pith_short_12","alias_value":"TWXSHHKAYZXH","created_at":"2026-05-18T12:26:15Z"},{"alias_kind":"pith_short_16","alias_value":"TWXSHHKAYZXHBNTY","created_at":"2026-05-18T12:26:15Z"},{"alias_kind":"pith_short_8","alias_value":"TWXSHHKA","created_at":"2026-05-18T12:26:15Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2010:TWXSHHKAYZXHBNTYFI3LFJEFZV","target":"record","payload":{"canonical_record":{"source":{"id":"1003.0796","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2010-03-03T13:07:17Z","cross_cats_sorted":["cond-mat.other"],"title_canon_sha256":"df6a35ea0dc7f1695c5bd24e4fda20db2c631968969cd5b21a59fc50528de442","abstract_canon_sha256":"7f9ffd51fb3f041e656b8e9390bdcc5b970cf6da868968d7d57c7b93c9946727"},"schema_version":"1.0"},"canonical_sha256":"9daf239d40c66e70b6782a36b2a485cd60f0929a8c2b4136a42093ab981a0c8a","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T02:08:47.123768Z","signature_b64":"G0TcjKDAELX5oB1drPHgn/8whlBqQcwp+INj2BUpfYlZu3LXlm2nYwDKLhZnpSEGywIxDPd20HVMpWmgJXGmBw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"9daf239d40c66e70b6782a36b2a485cd60f0929a8c2b4136a42093ab981a0c8a","last_reissued_at":"2026-05-18T02:08:47.123181Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T02:08:47.123181Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"1003.0796","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-05-18T02:08:47Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"NSMIdtbbsunvZIkKv5tEDudPkE5AKAFX1u9UV7Z02KlTnbV76L1KELZTkBn87sq3frKYi56RzwNrwJhrf47JBg==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-06-02T08:14:30.864614Z"},"content_sha256":"d242c7efbdc4da79fa5e9b22cba9d648c263e88088ddafb540f5a47ab3fb7da7","schema_version":"1.0","event_id":"sha256:d242c7efbdc4da79fa5e9b22cba9d648c263e88088ddafb540f5a47ab3fb7da7"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2010:TWXSHHKAYZXHBNTYFI3LFJEFZV","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"In-situ direct visualization of irradiated e-beam patterns on unprocessed resists using atomic force microscopy","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.other"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"A.W. Holleitner, D. Schnurbusch, H. Koop, K. Karrai, M.-C. Amann, M. Mueller, M. Zech, T. Gruendl","submitted_at":"2010-03-03T13:07:17Z","abstract_excerpt":"We introduce an in-situ characterization method of resists used for e-beam lithography. The technique is based on the application of an atomic force microscope which is directly mounted below the cathode of an electron-beam lithography system. We demonstrate that patterns irradiated by the e-beam can be efficiently visualized and analyzed in surface topography directly after the e-beam exposure. This in-situ analysis takes place without any development or baking steps, and gives access to the chemical (or latent) image of the irradiated resist."},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1003.0796","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-05-18T02:08:47Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"OZmKw0RmIHiWnub3qDylq2htZRCvJkcmcX9gi+5HxIzOnSfvCdlT3asWMdaHGVioninORjFIQBecvgvt6v0TAw==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-06-02T08:14:30.864971Z"},"content_sha256":"9c991485d4da8bd703f8945aa4a3acbfeb81faa19c3b924517ecedee63ff22c1","schema_version":"1.0","event_id":"sha256:9c991485d4da8bd703f8945aa4a3acbfeb81faa19c3b924517ecedee63ff22c1"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV/bundle.json","state_url":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-06-02T08:14:30Z","links":{"resolver":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV","bundle":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV/bundle.json","state":"https://pith.science/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV/state.json","well_known_bundle":"https://pith.science/.well-known/pith/TWXSHHKAYZXHBNTYFI3LFJEFZV/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2010:TWXSHHKAYZXHBNTYFI3LFJEFZV","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"7f9ffd51fb3f041e656b8e9390bdcc5b970cf6da868968d7d57c7b93c9946727","cross_cats_sorted":["cond-mat.other"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2010-03-03T13:07:17Z","title_canon_sha256":"df6a35ea0dc7f1695c5bd24e4fda20db2c631968969cd5b21a59fc50528de442"},"schema_version":"1.0","source":{"id":"1003.0796","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1003.0796","created_at":"2026-05-18T02:08:47Z"},{"alias_kind":"arxiv_version","alias_value":"1003.0796v1","created_at":"2026-05-18T02:08:47Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1003.0796","created_at":"2026-05-18T02:08:47Z"},{"alias_kind":"pith_short_12","alias_value":"TWXSHHKAYZXH","created_at":"2026-05-18T12:26:15Z"},{"alias_kind":"pith_short_16","alias_value":"TWXSHHKAYZXHBNTY","created_at":"2026-05-18T12:26:15Z"},{"alias_kind":"pith_short_8","alias_value":"TWXSHHKA","created_at":"2026-05-18T12:26:15Z"}],"graph_snapshots":[{"event_id":"sha256:9c991485d4da8bd703f8945aa4a3acbfeb81faa19c3b924517ecedee63ff22c1","target":"graph","created_at":"2026-05-18T02:08:47Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"paper":{"abstract_excerpt":"We introduce an in-situ characterization method of resists used for e-beam lithography. The technique is based on the application of an atomic force microscope which is directly mounted below the cathode of an electron-beam lithography system. We demonstrate that patterns irradiated by the e-beam can be efficiently visualized and analyzed in surface topography directly after the e-beam exposure. This in-situ analysis takes place without any development or baking steps, and gives access to the chemical (or latent) image of the irradiated resist.","authors_text":"A.W. Holleitner, D. Schnurbusch, H. Koop, K. Karrai, M.-C. Amann, M. Mueller, M. Zech, T. Gruendl","cross_cats":["cond-mat.other"],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2010-03-03T13:07:17Z","title":"In-situ direct visualization of irradiated e-beam patterns on unprocessed resists using atomic force microscopy"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1003.0796","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:d242c7efbdc4da79fa5e9b22cba9d648c263e88088ddafb540f5a47ab3fb7da7","target":"record","created_at":"2026-05-18T02:08:47Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"7f9ffd51fb3f041e656b8e9390bdcc5b970cf6da868968d7d57c7b93c9946727","cross_cats_sorted":["cond-mat.other"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2010-03-03T13:07:17Z","title_canon_sha256":"df6a35ea0dc7f1695c5bd24e4fda20db2c631968969cd5b21a59fc50528de442"},"schema_version":"1.0","source":{"id":"1003.0796","kind":"arxiv","version":1}},"canonical_sha256":"9daf239d40c66e70b6782a36b2a485cd60f0929a8c2b4136a42093ab981a0c8a","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"9daf239d40c66e70b6782a36b2a485cd60f0929a8c2b4136a42093ab981a0c8a","first_computed_at":"2026-05-18T02:08:47.123181Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-05-18T02:08:47.123181Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"G0TcjKDAELX5oB1drPHgn/8whlBqQcwp+INj2BUpfYlZu3LXlm2nYwDKLhZnpSEGywIxDPd20HVMpWmgJXGmBw==","signature_status":"signed_v1","signed_at":"2026-05-18T02:08:47.123768Z","signed_message":"canonical_sha256_bytes"},"source_id":"1003.0796","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:d242c7efbdc4da79fa5e9b22cba9d648c263e88088ddafb540f5a47ab3fb7da7","sha256:9c991485d4da8bd703f8945aa4a3acbfeb81faa19c3b924517ecedee63ff22c1"],"state_sha256":"18c445c6af324bed9176e60c35ac38e99e9fc5082d978935e4a6584741d01e4a"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"KZQXN4x3t7DN57fbUsb7nkbx1e337u7mZKle5lduv2rBDpLItFxqmAnrlABVJ22UB6nppPXLE5Cbib//hdm9Bg==","signed_message":"bundle_sha256_bytes","signed_at":"2026-06-02T08:14:30.866890Z","bundle_sha256":"36b5ae02d7ebfcf4fc019392633e63ae494029ba3ddfc61107ad4b091ce1972f"}}