{"record_type":"pith_number_record","schema_url":"https://pith.science/schemas/pith-number/v1.json","pith_number":"pith:2012:UTLRGLAAHEXFRRCYFR36OUZYL2","short_pith_number":"pith:UTLRGLAA","schema_version":"1.0","canonical_sha256":"a4d7132c00392e58c4582c77e753385e81dbc8bb5618a2da4a66da10bb205224","source":{"kind":"arxiv","id":"1210.0035","version":1},"attestation_state":"computed","paper":{"title":"Elemental distribution and oxygen deficiency of magnetron sputtered ITO films","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.mes-hall"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Annett Th{\\o}gersen, Edouard Monakhov, Jeyanthinath Mayandi, Margrethe Rein, Spyros Diplas","submitted_at":"2012-09-28T20:53:46Z","abstract_excerpt":"The atomic structure and composition of non-interfacial ITO and ITO-Si interfaces were studied with Transmission Electron Microscopy (TEM) and X-ray Photoelectron Spectroscopy (XPS). The films were deposited by DC magnetron sputtering on mono-crystalline p-type (100) Si wafers. Both as deposited and heat treated films consisted of crystalline ITO. The ITO/Si interface showed a more complicated composition. A thin layer of SiO$_x$ was found at the ITO/Si interface together with In and Sn nanoclusters, as well as highly oxygen deficient regions, as observed by XPS. High energy electron exposure "},"verification_status":{"content_addressed":true,"pith_receipt":true,"author_attested":false,"weak_author_claims":0,"strong_author_claims":0,"externally_anchored":false,"storage_verified":false,"citation_signatures":0,"replication_records":0,"graph_snapshot":true,"references_resolved":false,"formal_links_present":false},"canonical_record":{"source":{"id":"1210.0035","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2012-09-28T20:53:46Z","cross_cats_sorted":["cond-mat.mes-hall"],"title_canon_sha256":"d06d3c7acf76206da0599ef8ae989c2d3f3d9f665e69dffc612308d821b9134e","abstract_canon_sha256":"5840096a52965b7eac5945232a4f33b105791ee2092fd964806ffba600b3b883"},"schema_version":"1.0"},"receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T03:44:23.512873Z","signature_b64":"RmmgVxIVQbnf9/L8Z4jvmPNh4iTkS+Cx8zSFEOTHm37X2GvNkLrqWGIa8ZtY0y7vAtu3N9RMKlSL5nPzE/OPDA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"a4d7132c00392e58c4582c77e753385e81dbc8bb5618a2da4a66da10bb205224","last_reissued_at":"2026-05-18T03:44:23.512431Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T03:44:23.512431Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"graph_snapshot":{"paper":{"title":"Elemental distribution and oxygen deficiency of magnetron sputtered ITO films","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cond-mat.mes-hall"],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Annett Th{\\o}gersen, Edouard Monakhov, Jeyanthinath Mayandi, Margrethe Rein, Spyros Diplas","submitted_at":"2012-09-28T20:53:46Z","abstract_excerpt":"The atomic structure and composition of non-interfacial ITO and ITO-Si interfaces were studied with Transmission Electron Microscopy (TEM) and X-ray Photoelectron Spectroscopy (XPS). The films were deposited by DC magnetron sputtering on mono-crystalline p-type (100) Si wafers. Both as deposited and heat treated films consisted of crystalline ITO. The ITO/Si interface showed a more complicated composition. A thin layer of SiO$_x$ was found at the ITO/Si interface together with In and Sn nanoclusters, as well as highly oxygen deficient regions, as observed by XPS. High energy electron exposure "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1210.0035","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"aliases":[{"alias_kind":"arxiv","alias_value":"1210.0035","created_at":"2026-05-18T03:44:23.512498+00:00"},{"alias_kind":"arxiv_version","alias_value":"1210.0035v1","created_at":"2026-05-18T03:44:23.512498+00:00"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1210.0035","created_at":"2026-05-18T03:44:23.512498+00:00"},{"alias_kind":"pith_short_12","alias_value":"UTLRGLAAHEXF","created_at":"2026-05-18T12:27:25.539911+00:00"},{"alias_kind":"pith_short_16","alias_value":"UTLRGLAAHEXFRRCY","created_at":"2026-05-18T12:27:25.539911+00:00"},{"alias_kind":"pith_short_8","alias_value":"UTLRGLAA","created_at":"2026-05-18T12:27:25.539911+00:00"}],"events":[],"event_summary":{},"paper_claims":[],"inbound_citations":{"count":0,"internal_anchor_count":0,"sample":[]},"formal_canon":{"evidence_count":0,"sample":[],"anchors":[]},"links":{"html":"https://pith.science/pith/UTLRGLAAHEXFRRCYFR36OUZYL2","json":"https://pith.science/pith/UTLRGLAAHEXFRRCYFR36OUZYL2.json","graph_json":"https://pith.science/api/pith-number/UTLRGLAAHEXFRRCYFR36OUZYL2/graph.json","events_json":"https://pith.science/api/pith-number/UTLRGLAAHEXFRRCYFR36OUZYL2/events.json","paper":"https://pith.science/paper/UTLRGLAA"},"agent_actions":{"view_html":"https://pith.science/pith/UTLRGLAAHEXFRRCYFR36OUZYL2","download_json":"https://pith.science/pith/UTLRGLAAHEXFRRCYFR36OUZYL2.json","view_paper":"https://pith.science/paper/UTLRGLAA","resolve_alias":"https://pith.science/api/pith-number/resolve?arxiv=1210.0035&json=true","fetch_graph":"https://pith.science/api/pith-number/UTLRGLAAHEXFRRCYFR36OUZYL2/graph.json","fetch_events":"https://pith.science/api/pith-number/UTLRGLAAHEXFRRCYFR36OUZYL2/events.json","actions":{"anchor_timestamp":"https://pith.science/pith/UTLRGLAAHEXFRRCYFR36OUZYL2/action/timestamp_anchor","attest_storage":"https://pith.science/pith/UTLRGLAAHEXFRRCYFR36OUZYL2/action/storage_attestation","attest_author":"https://pith.science/pith/UTLRGLAAHEXFRRCYFR36OUZYL2/action/author_attestation","sign_citation":"https://pith.science/pith/UTLRGLAAHEXFRRCYFR36OUZYL2/action/citation_signature","submit_replication":"https://pith.science/pith/UTLRGLAAHEXFRRCYFR36OUZYL2/action/replication_record"}},"created_at":"2026-05-18T03:44:23.512498+00:00","updated_at":"2026-05-18T03:44:23.512498+00:00"}