{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2024:VERCGNLWO3SXPXKLHK2H5PZPLY","short_pith_number":"pith:VERCGNLW","canonical_record":{"source":{"id":"2408.08969","kind":"arxiv","version":3},"metadata":{"license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","primary_cat":"cs.AI","submitted_at":"2024-08-16T18:35:01Z","cross_cats_sorted":["physics.optics"],"title_canon_sha256":"7ddd68072fe9c695c592c1c96133a4adf2bb9b1a2bd2a8c069c670e5af5ddb7b","abstract_canon_sha256":"8b3d15358789de885dd8f4b5ec2e9c13ab63f9f910fd6eec8154d8b4509e5d42"},"schema_version":"1.0"},"canonical_sha256":"a92223357676e577dd4b3ab47ebf2f5e349b4a3290b5ff91b6afc628ed5c99a2","source":{"kind":"arxiv","id":"2408.08969","version":3},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2408.08969","created_at":"2026-07-05T09:01:04Z"},{"alias_kind":"arxiv_version","alias_value":"2408.08969v3","created_at":"2026-07-05T09:01:04Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2408.08969","created_at":"2026-07-05T09:01:04Z"},{"alias_kind":"pith_short_12","alias_value":"VERCGNLWO3SX","created_at":"2026-07-05T09:01:04Z"},{"alias_kind":"pith_short_16","alias_value":"VERCGNLWO3SXPXKL","created_at":"2026-07-05T09:01:04Z"},{"alias_kind":"pith_short_8","alias_value":"VERCGNLW","created_at":"2026-07-05T09:01:04Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2024:VERCGNLWO3SXPXKLHK2H5PZPLY","target":"record","payload":{"canonical_record":{"source":{"id":"2408.08969","kind":"arxiv","version":3},"metadata":{"license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","primary_cat":"cs.AI","submitted_at":"2024-08-16T18:35:01Z","cross_cats_sorted":["physics.optics"],"title_canon_sha256":"7ddd68072fe9c695c592c1c96133a4adf2bb9b1a2bd2a8c069c670e5af5ddb7b","abstract_canon_sha256":"8b3d15358789de885dd8f4b5ec2e9c13ab63f9f910fd6eec8154d8b4509e5d42"},"schema_version":"1.0"},"canonical_sha256":"a92223357676e577dd4b3ab47ebf2f5e349b4a3290b5ff91b6afc628ed5c99a2","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-05T09:01:04.594710Z","signature_b64":"hsWsy42CK7ONgLdqGqydPoCfbX9jdAuoYtc72xyxFxtjI//HZWrwt4OqAvzTuJGtrRnRNrywGRCDRpYxGXBMBw==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"a92223357676e577dd4b3ab47ebf2f5e349b4a3290b5ff91b6afc628ed5c99a2","last_reissued_at":"2026-07-05T09:01:04.594219Z","signature_status":"signed_v1","first_computed_at":"2026-07-05T09:01:04.594219Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"2408.08969","source_version":3,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T09:01:04Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"GfEsStJ2JBv744qFEYGLYnpGQ5mi7YFhlX7OdgNv6a0Eg6hBDx07tGzEaxAHLYKAKANelvHvvmsYecsRoFoMCg==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-14T17:24:45.259990Z"},"content_sha256":"d1775c21fff01c1d9991b6b3698c6bd729f657e1cbe6bfe33630f96b7c22c191","schema_version":"1.0","event_id":"sha256:d1775c21fff01c1d9991b6b3698c6bd729f657e1cbe6bfe33630f96b7c22c191"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2024:VERCGNLWO3SXPXKLHK2H5PZPLY","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Differentiable Edge-based OPC","license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","headline":"","cross_cats":["physics.optics"],"primary_cat":"cs.AI","authors_text":"Bei Yu, David Z. Pan, Guojin Chen, Haoxing Ren, Haoyu Yang","submitted_at":"2024-08-16T18:35:01Z","abstract_excerpt":"Optical proximity correction (OPC) is crucial for pushing the boundaries of semiconductor manufacturing and enabling the continued scaling of integrated circuits. While pixel-based OPC, termed as inverse lithography technology (ILT), has gained research interest due to its flexibility and precision. Its complexity and intricate features can lead to challenges in mask writing, increased defects, and higher costs, hence hindering widespread industrial adoption. In this paper, we propose DiffOPC, a differentiable OPC framework that enjoys the virtue of both edge-based OPC and ILT. By employing a "},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2408.08969","kind":"arxiv","version":3},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2408.08969/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-05T09:01:04Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"mKY1ckens+wtBpZdsLk3QM9jo9xJTzptxVL5wVeFplt25EsStMhl/Q+x4t5SGb1WmEL9S9YXmSuF4N92BYDgBQ==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-14T17:24:45.260509Z"},"content_sha256":"3f529be5c4fcfb3dde35d9c42a40c6e8f6dc59a8acce94aa68d1d589a7d17dd2","schema_version":"1.0","event_id":"sha256:3f529be5c4fcfb3dde35d9c42a40c6e8f6dc59a8acce94aa68d1d589a7d17dd2"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/VERCGNLWO3SXPXKLHK2H5PZPLY/bundle.json","state_url":"https://pith.science/pith/VERCGNLWO3SXPXKLHK2H5PZPLY/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/VERCGNLWO3SXPXKLHK2H5PZPLY/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-08-14T17:24:45Z","links":{"resolver":"https://pith.science/pith/VERCGNLWO3SXPXKLHK2H5PZPLY","bundle":"https://pith.science/pith/VERCGNLWO3SXPXKLHK2H5PZPLY/bundle.json","state":"https://pith.science/pith/VERCGNLWO3SXPXKLHK2H5PZPLY/state.json","well_known_bundle":"https://pith.science/.well-known/pith/VERCGNLWO3SXPXKLHK2H5PZPLY/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2024:VERCGNLWO3SXPXKLHK2H5PZPLY","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"8b3d15358789de885dd8f4b5ec2e9c13ab63f9f910fd6eec8154d8b4509e5d42","cross_cats_sorted":["physics.optics"],"license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","primary_cat":"cs.AI","submitted_at":"2024-08-16T18:35:01Z","title_canon_sha256":"7ddd68072fe9c695c592c1c96133a4adf2bb9b1a2bd2a8c069c670e5af5ddb7b"},"schema_version":"1.0","source":{"id":"2408.08969","kind":"arxiv","version":3}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2408.08969","created_at":"2026-07-05T09:01:04Z"},{"alias_kind":"arxiv_version","alias_value":"2408.08969v3","created_at":"2026-07-05T09:01:04Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2408.08969","created_at":"2026-07-05T09:01:04Z"},{"alias_kind":"pith_short_12","alias_value":"VERCGNLWO3SX","created_at":"2026-07-05T09:01:04Z"},{"alias_kind":"pith_short_16","alias_value":"VERCGNLWO3SXPXKL","created_at":"2026-07-05T09:01:04Z"},{"alias_kind":"pith_short_8","alias_value":"VERCGNLW","created_at":"2026-07-05T09:01:04Z"}],"graph_snapshots":[{"event_id":"sha256:3f529be5c4fcfb3dde35d9c42a40c6e8f6dc59a8acce94aa68d1d589a7d17dd2","target":"graph","created_at":"2026-07-05T09:01:04Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/2408.08969/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"Optical proximity correction (OPC) is crucial for pushing the boundaries of semiconductor manufacturing and enabling the continued scaling of integrated circuits. While pixel-based OPC, termed as inverse lithography technology (ILT), has gained research interest due to its flexibility and precision. Its complexity and intricate features can lead to challenges in mask writing, increased defects, and higher costs, hence hindering widespread industrial adoption. In this paper, we propose DiffOPC, a differentiable OPC framework that enjoys the virtue of both edge-based OPC and ILT. By employing a ","authors_text":"Bei Yu, David Z. Pan, Guojin Chen, Haoxing Ren, Haoyu Yang","cross_cats":["physics.optics"],"headline":"","license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","primary_cat":"cs.AI","submitted_at":"2024-08-16T18:35:01Z","title":"Differentiable Edge-based OPC"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2408.08969","kind":"arxiv","version":3},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:d1775c21fff01c1d9991b6b3698c6bd729f657e1cbe6bfe33630f96b7c22c191","target":"record","created_at":"2026-07-05T09:01:04Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"8b3d15358789de885dd8f4b5ec2e9c13ab63f9f910fd6eec8154d8b4509e5d42","cross_cats_sorted":["physics.optics"],"license":"http://creativecommons.org/licenses/by-nc-nd/4.0/","primary_cat":"cs.AI","submitted_at":"2024-08-16T18:35:01Z","title_canon_sha256":"7ddd68072fe9c695c592c1c96133a4adf2bb9b1a2bd2a8c069c670e5af5ddb7b"},"schema_version":"1.0","source":{"id":"2408.08969","kind":"arxiv","version":3}},"canonical_sha256":"a92223357676e577dd4b3ab47ebf2f5e349b4a3290b5ff91b6afc628ed5c99a2","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"a92223357676e577dd4b3ab47ebf2f5e349b4a3290b5ff91b6afc628ed5c99a2","first_computed_at":"2026-07-05T09:01:04.594219Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-07-05T09:01:04.594219Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"hsWsy42CK7ONgLdqGqydPoCfbX9jdAuoYtc72xyxFxtjI//HZWrwt4OqAvzTuJGtrRnRNrywGRCDRpYxGXBMBw==","signature_status":"signed_v1","signed_at":"2026-07-05T09:01:04.594710Z","signed_message":"canonical_sha256_bytes"},"source_id":"2408.08969","source_kind":"arxiv","source_version":3}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:d1775c21fff01c1d9991b6b3698c6bd729f657e1cbe6bfe33630f96b7c22c191","sha256:3f529be5c4fcfb3dde35d9c42a40c6e8f6dc59a8acce94aa68d1d589a7d17dd2"],"state_sha256":"e89fc8827b7d6b1cbf68e00548762d8beb48dddcc04345f1e3a8aa77e6999d4f"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"UBFbDgFW/scLTtIVMsqmtvHNY2bijNVJzLyOol0KCn8fYE1G/NShFMZlJmEvQNG3YuxRcE0IaRwDheugYTjJAw==","signed_message":"bundle_sha256_bytes","signed_at":"2026-08-14T17:24:45.266311Z","bundle_sha256":"7ba52924bd515b3fe6103a0066c52674d1f0cb0f924e03c309f4045b6172e6c2"}}