{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2017:Y36GBHYHLFX6ITH7RHR3FE4HT3","short_pith_number":"pith:Y36GBHYH","canonical_record":{"source":{"id":"1701.07087","kind":"arxiv","version":2},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2017-01-24T21:30:20Z","cross_cats_sorted":[],"title_canon_sha256":"7ef16d516a42d7729d5284715d292001d3e9faa062384e87f71dda277d4e2a61","abstract_canon_sha256":"7259e0f012d2b7c943248ec4a864603cacf39c3afa3c40382fc971907305c680"},"schema_version":"1.0"},"canonical_sha256":"c6fc609f07596fe44cff89e3b293879ec511cc3d7b050a1d48274fe6ba4aa1ac","source":{"kind":"arxiv","id":"1701.07087","version":2},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1701.07087","created_at":"2026-05-18T00:47:19Z"},{"alias_kind":"arxiv_version","alias_value":"1701.07087v2","created_at":"2026-05-18T00:47:19Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1701.07087","created_at":"2026-05-18T00:47:19Z"},{"alias_kind":"pith_short_12","alias_value":"Y36GBHYHLFX6","created_at":"2026-05-18T12:31:56Z"},{"alias_kind":"pith_short_16","alias_value":"Y36GBHYHLFX6ITH7","created_at":"2026-05-18T12:31:56Z"},{"alias_kind":"pith_short_8","alias_value":"Y36GBHYH","created_at":"2026-05-18T12:31:56Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2017:Y36GBHYHLFX6ITH7RHR3FE4HT3","target":"record","payload":{"canonical_record":{"source":{"id":"1701.07087","kind":"arxiv","version":2},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2017-01-24T21:30:20Z","cross_cats_sorted":[],"title_canon_sha256":"7ef16d516a42d7729d5284715d292001d3e9faa062384e87f71dda277d4e2a61","abstract_canon_sha256":"7259e0f012d2b7c943248ec4a864603cacf39c3afa3c40382fc971907305c680"},"schema_version":"1.0"},"canonical_sha256":"c6fc609f07596fe44cff89e3b293879ec511cc3d7b050a1d48274fe6ba4aa1ac","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T00:47:19.860835Z","signature_b64":"Wrth4251UzqUsAQvIQUUKmtFXafEizHdK7jpgpUiYaJb6xPjhbmUDTaM35gXDZbmmBIxkjtIsJ/ic0JcmZvHCg==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"c6fc609f07596fe44cff89e3b293879ec511cc3d7b050a1d48274fe6ba4aa1ac","last_reissued_at":"2026-05-18T00:47:19.860117Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T00:47:19.860117Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"1701.07087","source_version":2,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-05-18T00:47:19Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"cSKY2mekgoKD3iIJWmWR1zwIwg4SJjKAljkPME70Bp03nh+5A2R9vwZJwe5gS+E/S/fSJxXOVHyANBBgVpbDCA==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-06-25T20:00:21.769772Z"},"content_sha256":"900798d8002ae8bc7f2bd84ad9c9f8a590aee96a1480983e3b68113553d3e12c","schema_version":"1.0","event_id":"sha256:900798d8002ae8bc7f2bd84ad9c9f8a590aee96a1480983e3b68113553d3e12c"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2017:Y36GBHYHLFX6ITH7RHR3FE4HT3","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Ion-Beam-Induced Defects in CMOS Technology: Methods of Study","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"cond-mat.mtrl-sci","authors_text":"Y. G. Fedorenko","submitted_at":"2017-01-24T21:30:20Z","abstract_excerpt":"Ion implantation is a non-equilibrium doping technique which introduces impurity atoms into a solid regardless of thermodynamic considerations. The formation of metastable alloys above the solubility limit, minimized contribution of lateral diffusion processes in device fabrication, and possibility to reach high concentrations of doping impurities can be considered as distinct advantages of ion implantation. Owing to excellent controllability, uniformity, and the dose insensitive relative accuracy ion implantation has grown to be the principal doping technology used in the manufacturing of int"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1701.07087","kind":"arxiv","version":2},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-05-18T00:47:19Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"rIrkn6/3CBi2POMlZuecgkS7iijJsV+UqyH53kONV+INvzcPwtcjMWhFpjXZTxgOFR19um6LusoEoN8a5Uj1Bw==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-06-25T20:00:21.770433Z"},"content_sha256":"3e27306c6e7a3cd84cb89fd04a2202a57fc9936221ef75fa071a5a9235524755","schema_version":"1.0","event_id":"sha256:3e27306c6e7a3cd84cb89fd04a2202a57fc9936221ef75fa071a5a9235524755"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/Y36GBHYHLFX6ITH7RHR3FE4HT3/bundle.json","state_url":"https://pith.science/pith/Y36GBHYHLFX6ITH7RHR3FE4HT3/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/Y36GBHYHLFX6ITH7RHR3FE4HT3/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-06-25T20:00:21Z","links":{"resolver":"https://pith.science/pith/Y36GBHYHLFX6ITH7RHR3FE4HT3","bundle":"https://pith.science/pith/Y36GBHYHLFX6ITH7RHR3FE4HT3/bundle.json","state":"https://pith.science/pith/Y36GBHYHLFX6ITH7RHR3FE4HT3/state.json","well_known_bundle":"https://pith.science/.well-known/pith/Y36GBHYHLFX6ITH7RHR3FE4HT3/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2017:Y36GBHYHLFX6ITH7RHR3FE4HT3","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"7259e0f012d2b7c943248ec4a864603cacf39c3afa3c40382fc971907305c680","cross_cats_sorted":[],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2017-01-24T21:30:20Z","title_canon_sha256":"7ef16d516a42d7729d5284715d292001d3e9faa062384e87f71dda277d4e2a61"},"schema_version":"1.0","source":{"id":"1701.07087","kind":"arxiv","version":2}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1701.07087","created_at":"2026-05-18T00:47:19Z"},{"alias_kind":"arxiv_version","alias_value":"1701.07087v2","created_at":"2026-05-18T00:47:19Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1701.07087","created_at":"2026-05-18T00:47:19Z"},{"alias_kind":"pith_short_12","alias_value":"Y36GBHYHLFX6","created_at":"2026-05-18T12:31:56Z"},{"alias_kind":"pith_short_16","alias_value":"Y36GBHYHLFX6ITH7","created_at":"2026-05-18T12:31:56Z"},{"alias_kind":"pith_short_8","alias_value":"Y36GBHYH","created_at":"2026-05-18T12:31:56Z"}],"graph_snapshots":[{"event_id":"sha256:3e27306c6e7a3cd84cb89fd04a2202a57fc9936221ef75fa071a5a9235524755","target":"graph","created_at":"2026-05-18T00:47:19Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"paper":{"abstract_excerpt":"Ion implantation is a non-equilibrium doping technique which introduces impurity atoms into a solid regardless of thermodynamic considerations. The formation of metastable alloys above the solubility limit, minimized contribution of lateral diffusion processes in device fabrication, and possibility to reach high concentrations of doping impurities can be considered as distinct advantages of ion implantation. Owing to excellent controllability, uniformity, and the dose insensitive relative accuracy ion implantation has grown to be the principal doping technology used in the manufacturing of int","authors_text":"Y. G. Fedorenko","cross_cats":[],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2017-01-24T21:30:20Z","title":"Ion-Beam-Induced Defects in CMOS Technology: Methods of Study"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1701.07087","kind":"arxiv","version":2},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:900798d8002ae8bc7f2bd84ad9c9f8a590aee96a1480983e3b68113553d3e12c","target":"record","created_at":"2026-05-18T00:47:19Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"7259e0f012d2b7c943248ec4a864603cacf39c3afa3c40382fc971907305c680","cross_cats_sorted":[],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"cond-mat.mtrl-sci","submitted_at":"2017-01-24T21:30:20Z","title_canon_sha256":"7ef16d516a42d7729d5284715d292001d3e9faa062384e87f71dda277d4e2a61"},"schema_version":"1.0","source":{"id":"1701.07087","kind":"arxiv","version":2}},"canonical_sha256":"c6fc609f07596fe44cff89e3b293879ec511cc3d7b050a1d48274fe6ba4aa1ac","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"c6fc609f07596fe44cff89e3b293879ec511cc3d7b050a1d48274fe6ba4aa1ac","first_computed_at":"2026-05-18T00:47:19.860117Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-05-18T00:47:19.860117Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"Wrth4251UzqUsAQvIQUUKmtFXafEizHdK7jpgpUiYaJb6xPjhbmUDTaM35gXDZbmmBIxkjtIsJ/ic0JcmZvHCg==","signature_status":"signed_v1","signed_at":"2026-05-18T00:47:19.860835Z","signed_message":"canonical_sha256_bytes"},"source_id":"1701.07087","source_kind":"arxiv","source_version":2}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:900798d8002ae8bc7f2bd84ad9c9f8a590aee96a1480983e3b68113553d3e12c","sha256:3e27306c6e7a3cd84cb89fd04a2202a57fc9936221ef75fa071a5a9235524755"],"state_sha256":"5052254902fa82b3174ed31604dac2aa1c977a573714119fad3fc8b003e14c7d"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"W+Bve/8qTYbPiqhavbTHvvKFIcPKXuepeOwRTiQR/k8WjHgtH6brHKmnUHa+owwyNEGHkV5VKcCf2hI1Vr//Bw==","signed_message":"bundle_sha256_bytes","signed_at":"2026-06-25T20:00:21.773448Z","bundle_sha256":"3d001af8b2ac3bfc4e4d6faaa16e8fb8d43586f678efc96cd8ec0fbd7ccf350e"}}