{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2026:Y5P2ZO77XSXFI7QK33VJ34UW3K","short_pith_number":"pith:Y5P2ZO77","canonical_record":{"source":{"id":"2607.25330","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2026-07-28T06:31:21Z","cross_cats_sorted":["cs.AI","cs.LG","physics.app-ph"],"title_canon_sha256":"ec522b726a1269b50dc604aab14e76c2bcf8453cec62fce87a750dce480809c8","abstract_canon_sha256":"6e0cac1c1f5a0ca418bf592ec4223f0640c22467109b6c14990b6a652a48209a"},"schema_version":"1.0"},"canonical_sha256":"c75facbbffbcae547e0adeea9df296da971931a8423081403246e62fc92f4aa0","source":{"kind":"arxiv","id":"2607.25330","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2607.25330","created_at":"2026-07-29T01:25:09Z"},{"alias_kind":"arxiv_version","alias_value":"2607.25330v1","created_at":"2026-07-29T01:25:09Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2607.25330","created_at":"2026-07-29T01:25:09Z"},{"alias_kind":"pith_short_12","alias_value":"Y5P2ZO77XSXF","created_at":"2026-07-29T01:25:09Z"},{"alias_kind":"pith_short_16","alias_value":"Y5P2ZO77XSXFI7QK","created_at":"2026-07-29T01:25:09Z"},{"alias_kind":"pith_short_8","alias_value":"Y5P2ZO77","created_at":"2026-07-29T01:25:09Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2026:Y5P2ZO77XSXFI7QK33VJ34UW3K","target":"record","payload":{"canonical_record":{"source":{"id":"2607.25330","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2026-07-28T06:31:21Z","cross_cats_sorted":["cs.AI","cs.LG","physics.app-ph"],"title_canon_sha256":"ec522b726a1269b50dc604aab14e76c2bcf8453cec62fce87a750dce480809c8","abstract_canon_sha256":"6e0cac1c1f5a0ca418bf592ec4223f0640c22467109b6c14990b6a652a48209a"},"schema_version":"1.0"},"canonical_sha256":"c75facbbffbcae547e0adeea9df296da971931a8423081403246e62fc92f4aa0","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-07-29T01:25:09.540557Z","signature_b64":"6aUFb9J9/CHDPzqs5Tt7LkBDrJayLhMRnRpGn2nOB4CacYzZRV29gBoEyKOvXm+d4tHvDMB5W5zs9QYr9CcaBQ==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"c75facbbffbcae547e0adeea9df296da971931a8423081403246e62fc92f4aa0","last_reissued_at":"2026-07-29T01:25:09.539716Z","signature_status":"signed_v1","first_computed_at":"2026-07-29T01:25:09.539716Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"2607.25330","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-29T01:25:09Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"3dF61VZSd2SZnfCUEKLJeef2Au5NIK52qRFzr27mHAMPbzzx+PhkOquZSCgZ2Pa/mSMuLbLYOlAhUvjhXlAxCg==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-07T04:08:31.056573Z"},"content_sha256":"217f144cc6e917ebbbd023b88ca7d838987c250e0ae89e8e70cd1f9712534cd7","schema_version":"1.0","event_id":"sha256:217f144cc6e917ebbbd023b88ca7d838987c250e0ae89e8e70cd1f9712534cd7"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2026:Y5P2ZO77XSXFI7QK33VJ34UW3K","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Physics-Informed Neural Operator for Warm-Starting Background-Decomposed and Preconditioned PSFD: Enabling Scalable 3-D EUV Mask Simulation","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":["cs.AI","cs.LG","physics.app-ph"],"primary_cat":"physics.optics","authors_text":"Doyun Kim, Werner Gillijns","submitted_at":"2026-07-28T06:31:21Z","abstract_excerpt":"We present a physics-informed neural operator (PINO) trained with pseudo-spectral frequency-domain (PSFD) equations for electromagnetic (EM) scattering problems in EUV lithography. The Fourier neural operator is factorized into a two-dimensional lateral ($xy$) branch and a one-dimensional axial ($z$) branch and is trained self-consistently with background decomposition.Thus, the full-vector coupling between the mask and the multilayer response is retained without invoking a finite-order Born approximation. In this way, the computational domain size is significantly reduced, thereby lowering th"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2607.25330","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"integrity":{"clean":true,"summary":{"advisory":0,"critical":0,"by_detector":{},"informational":0},"endpoint":"/pith/2607.25330/integrity.json","findings":[],"available":true,"detectors_run":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938"},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-07-29T01:25:09Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"Q+lHQq3OhcQxaF1PDaTWQkK1zSJ5gjTn03RYo+cG3ZNObtqAt9TWkDWuH9jXfiJ9gHPRZHJ3D7UnHK7zWBqUAA==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-08-07T04:08:31.056990Z"},"content_sha256":"063dac09ad95861234f4b5b6709e093dca72b769432c7561bc29f33659795b40","schema_version":"1.0","event_id":"sha256:063dac09ad95861234f4b5b6709e093dca72b769432c7561bc29f33659795b40"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/Y5P2ZO77XSXFI7QK33VJ34UW3K/bundle.json","state_url":"https://pith.science/pith/Y5P2ZO77XSXFI7QK33VJ34UW3K/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/Y5P2ZO77XSXFI7QK33VJ34UW3K/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-08-07T04:08:31Z","links":{"resolver":"https://pith.science/pith/Y5P2ZO77XSXFI7QK33VJ34UW3K","bundle":"https://pith.science/pith/Y5P2ZO77XSXFI7QK33VJ34UW3K/bundle.json","state":"https://pith.science/pith/Y5P2ZO77XSXFI7QK33VJ34UW3K/state.json","well_known_bundle":"https://pith.science/.well-known/pith/Y5P2ZO77XSXFI7QK33VJ34UW3K/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2026:Y5P2ZO77XSXFI7QK33VJ34UW3K","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"6e0cac1c1f5a0ca418bf592ec4223f0640c22467109b6c14990b6a652a48209a","cross_cats_sorted":["cs.AI","cs.LG","physics.app-ph"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2026-07-28T06:31:21Z","title_canon_sha256":"ec522b726a1269b50dc604aab14e76c2bcf8453cec62fce87a750dce480809c8"},"schema_version":"1.0","source":{"id":"2607.25330","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"2607.25330","created_at":"2026-07-29T01:25:09Z"},{"alias_kind":"arxiv_version","alias_value":"2607.25330v1","created_at":"2026-07-29T01:25:09Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.2607.25330","created_at":"2026-07-29T01:25:09Z"},{"alias_kind":"pith_short_12","alias_value":"Y5P2ZO77XSXF","created_at":"2026-07-29T01:25:09Z"},{"alias_kind":"pith_short_16","alias_value":"Y5P2ZO77XSXFI7QK","created_at":"2026-07-29T01:25:09Z"},{"alias_kind":"pith_short_8","alias_value":"Y5P2ZO77","created_at":"2026-07-29T01:25:09Z"}],"graph_snapshots":[{"event_id":"sha256:063dac09ad95861234f4b5b6709e093dca72b769432c7561bc29f33659795b40","target":"graph","created_at":"2026-07-29T01:25:09Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"integrity":{"available":true,"clean":true,"detectors_run":[],"endpoint":"/pith/2607.25330/integrity.json","findings":[],"snapshot_sha256":"c28c3603d3b5d939e8dc4c7e95fa8dfce3d595e45f758748cecf8e644a296938","summary":{"advisory":0,"by_detector":{},"critical":0,"informational":0}},"paper":{"abstract_excerpt":"We present a physics-informed neural operator (PINO) trained with pseudo-spectral frequency-domain (PSFD) equations for electromagnetic (EM) scattering problems in EUV lithography. The Fourier neural operator is factorized into a two-dimensional lateral ($xy$) branch and a one-dimensional axial ($z$) branch and is trained self-consistently with background decomposition.Thus, the full-vector coupling between the mask and the multilayer response is retained without invoking a finite-order Born approximation. In this way, the computational domain size is significantly reduced, thereby lowering th","authors_text":"Doyun Kim, Werner Gillijns","cross_cats":["cs.AI","cs.LG","physics.app-ph"],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2026-07-28T06:31:21Z","title":"Physics-Informed Neural Operator for Warm-Starting Background-Decomposed and Preconditioned PSFD: Enabling Scalable 3-D EUV Mask Simulation"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"2607.25330","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:217f144cc6e917ebbbd023b88ca7d838987c250e0ae89e8e70cd1f9712534cd7","target":"record","created_at":"2026-07-29T01:25:09Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"6e0cac1c1f5a0ca418bf592ec4223f0640c22467109b6c14990b6a652a48209a","cross_cats_sorted":["cs.AI","cs.LG","physics.app-ph"],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.optics","submitted_at":"2026-07-28T06:31:21Z","title_canon_sha256":"ec522b726a1269b50dc604aab14e76c2bcf8453cec62fce87a750dce480809c8"},"schema_version":"1.0","source":{"id":"2607.25330","kind":"arxiv","version":1}},"canonical_sha256":"c75facbbffbcae547e0adeea9df296da971931a8423081403246e62fc92f4aa0","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"c75facbbffbcae547e0adeea9df296da971931a8423081403246e62fc92f4aa0","first_computed_at":"2026-07-29T01:25:09.539716Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-07-29T01:25:09.539716Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"6aUFb9J9/CHDPzqs5Tt7LkBDrJayLhMRnRpGn2nOB4CacYzZRV29gBoEyKOvXm+d4tHvDMB5W5zs9QYr9CcaBQ==","signature_status":"signed_v1","signed_at":"2026-07-29T01:25:09.540557Z","signed_message":"canonical_sha256_bytes"},"source_id":"2607.25330","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:217f144cc6e917ebbbd023b88ca7d838987c250e0ae89e8e70cd1f9712534cd7","sha256:063dac09ad95861234f4b5b6709e093dca72b769432c7561bc29f33659795b40"],"state_sha256":"a7ebf8873cffde59df805b7b7e250d42e4b3c8d01d149e62c46fc6cec62b7eb5"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"QldeNl75K9iHpsa3+IHUxQCW0YPyeSUNjoou7EfIkwR6hpke/bQsDy9Z4X5CJvhyc0uhDMyvZWNxhic3wtufCQ==","signed_message":"bundle_sha256_bytes","signed_at":"2026-08-07T04:08:31.059963Z","bundle_sha256":"bb6686bbe40266487b85a2d6cc42448ae499ec1cadca6ab13c956e1d3b4f8177"}}