{"bundle_type":"pith_open_graph_bundle","bundle_version":"1.0","pith_number":"pith:2018:ZRG7CMLOHJ5J7JVEASQP2VWWOH","short_pith_number":"pith:ZRG7CMLO","canonical_record":{"source":{"id":"1810.08011","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2018-10-18T12:32:24Z","cross_cats_sorted":[],"title_canon_sha256":"b3a999262da8cad20e2ef022be6f2d855773b4563cda6b6fc6d9054e54bb43c3","abstract_canon_sha256":"093ebaaaef6d4e5ed4636a4feb073301587ed2178eb3bb53e8b11174cf847781"},"schema_version":"1.0"},"canonical_sha256":"cc4df1316e3a7a9fa6a404a0fd56d671fbe312134386ba7a5dc5da123a97e59a","source":{"kind":"arxiv","id":"1810.08011","version":1},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1810.08011","created_at":"2026-05-18T00:02:52Z"},{"alias_kind":"arxiv_version","alias_value":"1810.08011v1","created_at":"2026-05-18T00:02:52Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1810.08011","created_at":"2026-05-18T00:02:52Z"},{"alias_kind":"pith_short_12","alias_value":"ZRG7CMLOHJ5J","created_at":"2026-05-18T12:33:07Z"},{"alias_kind":"pith_short_16","alias_value":"ZRG7CMLOHJ5J7JVE","created_at":"2026-05-18T12:33:07Z"},{"alias_kind":"pith_short_8","alias_value":"ZRG7CMLO","created_at":"2026-05-18T12:33:07Z"}],"events":[{"event_type":"record_created","subject_pith_number":"pith:2018:ZRG7CMLOHJ5J7JVEASQP2VWWOH","target":"record","payload":{"canonical_record":{"source":{"id":"1810.08011","kind":"arxiv","version":1},"metadata":{"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2018-10-18T12:32:24Z","cross_cats_sorted":[],"title_canon_sha256":"b3a999262da8cad20e2ef022be6f2d855773b4563cda6b6fc6d9054e54bb43c3","abstract_canon_sha256":"093ebaaaef6d4e5ed4636a4feb073301587ed2178eb3bb53e8b11174cf847781"},"schema_version":"1.0"},"canonical_sha256":"cc4df1316e3a7a9fa6a404a0fd56d671fbe312134386ba7a5dc5da123a97e59a","receipt":{"kind":"pith_receipt","key_id":"pith-v1-2026-05","algorithm":"ed25519","signed_at":"2026-05-18T00:02:52.818835Z","signature_b64":"/KFe+DwhC4ofwRuHPLS5ex7N7KlQ+OvHFXbVRK61/qjUbD4q7kq+3N5p05xpB3GfCTWpTOBSakrbxvu5u979AA==","signed_message":"canonical_sha256_bytes","builder_version":"pith-number-builder-2026-05-17-v1","receipt_version":"0.3","canonical_sha256":"cc4df1316e3a7a9fa6a404a0fd56d671fbe312134386ba7a5dc5da123a97e59a","last_reissued_at":"2026-05-18T00:02:52.818135Z","signature_status":"signed_v1","first_computed_at":"2026-05-18T00:02:52.818135Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"source_kind":"arxiv","source_id":"1810.08011","source_version":1,"attestation_state":"computed"},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-05-18T00:02:52Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"0yIK/Mns4qPx11rXo0ohGEx4h90unk3XwPHluX3InYfdlMHE9J6Zki1hOmOfvp3bhlWxIs7NoN3ApjkkvbPICA==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-05-27T08:11:56.227194Z"},"content_sha256":"ed5292db50dd19a8d35059dc60f826f87698f6fbd26e86faf65f16b63c644ea0","schema_version":"1.0","event_id":"sha256:ed5292db50dd19a8d35059dc60f826f87698f6fbd26e86faf65f16b63c644ea0"},{"event_type":"graph_snapshot","subject_pith_number":"pith:2018:ZRG7CMLOHJ5J7JVEASQP2VWWOH","target":"graph","payload":{"graph_snapshot":{"paper":{"title":"Characteristic diffuse scattering from distinct line roughnesses","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","headline":"","cross_cats":[],"primary_cat":"physics.app-ph","authors_text":"Anal\\'ia Fern\\'andez Herrero, Frank Scholze, Mika Pfl\\\"uger, Victor Soltwisch","submitted_at":"2018-10-18T12:32:24Z","abstract_excerpt":"Lamellar gratings are widely used diffractive optical elements; gratings etched into Si can be used as structural elements or prototypes of structural elements in integrated electronic circuits. For the control of the lithographic manufacturing process, a rapid in-line characterization of nanostructures is indispensable. Numerous studies on the determination of regular geometry parameters of lamellar gratings from optical and extreme ultraviolet (EUV) scattering highlight the impact of roughness on the optical performance as well as on the reconstruction of these structures. Thus, a set of nin"},"claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1810.08011","kind":"arxiv","version":1},"verdict":{"id":null,"model_set":{},"created_at":null,"strongest_claim":"","one_line_summary":"","pipeline_version":null,"weakest_assumption":"","pith_extraction_headline":""},"references":{"count":0,"sample":[],"resolved_work":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","internal_anchors":0},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"author_claims":{"count":0,"strong_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"builder_version":"pith-number-builder-2026-05-17-v1"},"verdict_id":null},"signer":{"signer_id":"pith.science","signer_type":"pith_registry","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54"},"created_at":"2026-05-18T00:02:52Z","supersedes":[],"prev_event":null,"signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"TCLP0wAAk1SDqXIItb/21dojpfRxrDkLIcLeDUVlpYC9fYadMjcmeVqLMQ+Uf4SWQNJiOfk9LDwcI35TQNN2DQ==","signed_message":"open_graph_event_sha256_bytes","signed_at":"2026-05-27T08:11:56.227711Z"},"content_sha256":"f9ec048a5ac96d7e937babc678f6efb4f6abe5676b2a7cb4c2851d059d037f37","schema_version":"1.0","event_id":"sha256:f9ec048a5ac96d7e937babc678f6efb4f6abe5676b2a7cb4c2851d059d037f37"}],"timestamp_proofs":[],"mirror_hints":[{"mirror_type":"https","name":"Pith Resolver","base_url":"https://pith.science","bundle_url":"https://pith.science/pith/ZRG7CMLOHJ5J7JVEASQP2VWWOH/bundle.json","state_url":"https://pith.science/pith/ZRG7CMLOHJ5J7JVEASQP2VWWOH/state.json","well_known_bundle_url":"https://pith.science/.well-known/pith/ZRG7CMLOHJ5J7JVEASQP2VWWOH/bundle.json","status":"primary"}],"public_keys":[{"key_id":"pith-v1-2026-05","algorithm":"ed25519","format":"raw","public_key_b64":"stVStoiQhXFxp4s2pdzPNoqVNBMojDU/fJ2db5S3CbM=","public_key_hex":"b2d552b68890857171a78b36a5dccf368a953413288c353f7c9d9d6f94b709b3","fingerprint_sha256_b32_first128bits":"RVFV5Z2OI2J3ZUO7ERDEBCYNKS","fingerprint_sha256_hex":"8d4b5ee74e4693bcd1df2446408b0d54","rotates_at":null,"url":"https://pith.science/pith-signing-key.json","notes":"Pith uses this Ed25519 key to sign canonical record SHA-256 digests. Verify with: ed25519_verify(public_key, message=canonical_sha256_bytes, signature=base64decode(signature_b64))."}],"merge_version":"pith-open-graph-merge-v1","built_at":"2026-05-27T08:11:56Z","links":{"resolver":"https://pith.science/pith/ZRG7CMLOHJ5J7JVEASQP2VWWOH","bundle":"https://pith.science/pith/ZRG7CMLOHJ5J7JVEASQP2VWWOH/bundle.json","state":"https://pith.science/pith/ZRG7CMLOHJ5J7JVEASQP2VWWOH/state.json","well_known_bundle":"https://pith.science/.well-known/pith/ZRG7CMLOHJ5J7JVEASQP2VWWOH/bundle.json"},"state":{"state_type":"pith_open_graph_state","state_version":"1.0","pith_number":"pith:2018:ZRG7CMLOHJ5J7JVEASQP2VWWOH","merge_version":"pith-open-graph-merge-v1","event_count":2,"valid_event_count":2,"invalid_event_count":0,"equivocation_count":0,"current":{"canonical_record":{"metadata":{"abstract_canon_sha256":"093ebaaaef6d4e5ed4636a4feb073301587ed2178eb3bb53e8b11174cf847781","cross_cats_sorted":[],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2018-10-18T12:32:24Z","title_canon_sha256":"b3a999262da8cad20e2ef022be6f2d855773b4563cda6b6fc6d9054e54bb43c3"},"schema_version":"1.0","source":{"id":"1810.08011","kind":"arxiv","version":1}},"source_aliases":[{"alias_kind":"arxiv","alias_value":"1810.08011","created_at":"2026-05-18T00:02:52Z"},{"alias_kind":"arxiv_version","alias_value":"1810.08011v1","created_at":"2026-05-18T00:02:52Z"},{"alias_kind":"doi","alias_value":"10.48550/arxiv.1810.08011","created_at":"2026-05-18T00:02:52Z"},{"alias_kind":"pith_short_12","alias_value":"ZRG7CMLOHJ5J","created_at":"2026-05-18T12:33:07Z"},{"alias_kind":"pith_short_16","alias_value":"ZRG7CMLOHJ5J7JVE","created_at":"2026-05-18T12:33:07Z"},{"alias_kind":"pith_short_8","alias_value":"ZRG7CMLO","created_at":"2026-05-18T12:33:07Z"}],"graph_snapshots":[{"event_id":"sha256:f9ec048a5ac96d7e937babc678f6efb4f6abe5676b2a7cb4c2851d059d037f37","target":"graph","created_at":"2026-05-18T00:02:52Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"graph_snapshot":{"author_claims":{"count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57","strong_count":0},"builder_version":"pith-number-builder-2026-05-17-v1","claims":{"count":0,"items":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"formal_canon":{"evidence_count":0,"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"paper":{"abstract_excerpt":"Lamellar gratings are widely used diffractive optical elements; gratings etched into Si can be used as structural elements or prototypes of structural elements in integrated electronic circuits. For the control of the lithographic manufacturing process, a rapid in-line characterization of nanostructures is indispensable. Numerous studies on the determination of regular geometry parameters of lamellar gratings from optical and extreme ultraviolet (EUV) scattering highlight the impact of roughness on the optical performance as well as on the reconstruction of these structures. Thus, a set of nin","authors_text":"Anal\\'ia Fern\\'andez Herrero, Frank Scholze, Mika Pfl\\\"uger, Victor Soltwisch","cross_cats":[],"headline":"","license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2018-10-18T12:32:24Z","title":"Characteristic diffuse scattering from distinct line roughnesses"},"references":{"count":0,"internal_anchors":0,"resolved_work":0,"sample":[],"snapshot_sha256":"258153158e38e3291e3d48162225fcdb2d5a3ed65a07baac614ab91432fd4f57"},"source":{"id":"1810.08011","kind":"arxiv","version":1},"verdict":{"created_at":null,"id":null,"model_set":{},"one_line_summary":"","pipeline_version":null,"pith_extraction_headline":"","strongest_claim":"","weakest_assumption":""}},"verdict_id":null}}],"author_attestations":[],"timestamp_anchors":[],"storage_attestations":[],"citation_signatures":[],"replication_records":[],"corrections":[],"mirror_hints":[],"record_created":{"event_id":"sha256:ed5292db50dd19a8d35059dc60f826f87698f6fbd26e86faf65f16b63c644ea0","target":"record","created_at":"2026-05-18T00:02:52Z","signer":{"key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signer_id":"pith.science","signer_type":"pith_registry"},"payload":{"attestation_state":"computed","canonical_record":{"metadata":{"abstract_canon_sha256":"093ebaaaef6d4e5ed4636a4feb073301587ed2178eb3bb53e8b11174cf847781","cross_cats_sorted":[],"license":"http://arxiv.org/licenses/nonexclusive-distrib/1.0/","primary_cat":"physics.app-ph","submitted_at":"2018-10-18T12:32:24Z","title_canon_sha256":"b3a999262da8cad20e2ef022be6f2d855773b4563cda6b6fc6d9054e54bb43c3"},"schema_version":"1.0","source":{"id":"1810.08011","kind":"arxiv","version":1}},"canonical_sha256":"cc4df1316e3a7a9fa6a404a0fd56d671fbe312134386ba7a5dc5da123a97e59a","receipt":{"algorithm":"ed25519","builder_version":"pith-number-builder-2026-05-17-v1","canonical_sha256":"cc4df1316e3a7a9fa6a404a0fd56d671fbe312134386ba7a5dc5da123a97e59a","first_computed_at":"2026-05-18T00:02:52.818135Z","key_id":"pith-v1-2026-05","kind":"pith_receipt","last_reissued_at":"2026-05-18T00:02:52.818135Z","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","receipt_version":"0.3","signature_b64":"/KFe+DwhC4ofwRuHPLS5ex7N7KlQ+OvHFXbVRK61/qjUbD4q7kq+3N5p05xpB3GfCTWpTOBSakrbxvu5u979AA==","signature_status":"signed_v1","signed_at":"2026-05-18T00:02:52.818835Z","signed_message":"canonical_sha256_bytes"},"source_id":"1810.08011","source_kind":"arxiv","source_version":1}}},"equivocations":[],"invalid_events":[],"applied_event_ids":["sha256:ed5292db50dd19a8d35059dc60f826f87698f6fbd26e86faf65f16b63c644ea0","sha256:f9ec048a5ac96d7e937babc678f6efb4f6abe5676b2a7cb4c2851d059d037f37"],"state_sha256":"73e77d24af3265290612954acad92e8bc283efaae66cfc2241052ffd57e52d1d"},"bundle_signature":{"signature_status":"signed_v1","algorithm":"ed25519","key_id":"pith-v1-2026-05","public_key_fingerprint":"8d4b5ee74e4693bcd1df2446408b0d54","signature_b64":"CMmSDyRH+HAuiHeW9yG78+DvKQYJiORjsKHVaCCFkmitei6oqOtJ0OeHkL1EWjDg+sw9XEfvWt0XB/ZWHeJjBg==","signed_message":"bundle_sha256_bytes","signed_at":"2026-05-27T08:11:56.230415Z","bundle_sha256":"bc654cb91c18028c02e79845a533ff5cff6b2d0ec22b27c898759cc3bf7e0e8b"}}