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Radiation-induced crystal lattice damage and its recovery in wide bandgap oxides, in particular beta-gallium oxide (beta-Ga2O3), is a complex process. This paper presents the first study on the process of the defects accumulation in beta-Ga2O3 implanted with Rare Earth (RE) ions and the impact of Rapid Thermal Annealing (RTA) on the defects formed. (-201) oriented beta-Ga2O3 single crystals were implanted with Yb ions fluences ranging from 1 x 1012 to 5 x 1015 at/cm2. Channeling Rutherford Backscattering Spectrometry (RBS/c) was used to study the crystal lattice damage induced by ion implantation and the level of structure recovery after annealing. The quantitative and qualitative analyses of collected spectra were performed by computer simulations. The resulting accumulation curve reveals a two-step damage process. In the first stage, the damage of the beta-Ga2O3 is inconspicuous, but begins to grow rapidly from the fluence of 1 x 1013 at/cm2, reaching the saturation at the random level for the Yb ion fluence of 1 x 1014 at/cm2. Further irradiation causes the damage peak to become bimodal, indicating that at least two new defect forms develop for the higher ion fluence. These two damage zones differently react to annealing, suggesting that they could origin from two phases, the amorphization phase and the new crystalline phase of Ga2O3.