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S. Popovi\'c

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Papers (6)

  1. Cryogenic rf test of the first plasma etched SRF cavity physics.acc-ph · 2016 · author #3
  2. Apparatus and method for plasma processing of SRF cavities physics.acc-ph · 2015 · author #5
  3. Reversal of the Asymmetry in a Cylindrical Coaxial Capacitively Coupled Ar/Cl2 Plasma physics.acc-ph · 2015 · author #3
  4. Self-bias Dependence on Process Parameters in Asymmetric Cylindrical Coaxial Capacitively Coupled Plasma physics.acc-ph · 2015 · author #3
  5. Etching Mechanism of Niobium in Coaxial Ar/Cl2 RF Plasma physics.acc-ph · 2014 · author #3
  6. Plasma Processing of Large Curved Surfaces for SRF Cavity Modification physics.acc-ph · 2014 · author #3

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