T. Akashi

Identifiers

• name variant T. Akashi 0.60 · backfill

Papers (1)

1. Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching cs.OH · 2008 · author #1

Mentions

• 0802.3085 #1 · backfill · confidence 0.70 T. Akashi

Frequent Coauthors

• Y. Yoshimura 1 shared papers