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(2) Silvaco Inc.)

Identifiers

  • name variant (2) Silvaco Inc.) 0.60 · backfill

Papers (1)

  1. Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling physics.plasm-ph · 2025 · author #7

Mentions

  • 2509.03664 #7 · arxiv_oai · confidence 0.70 (2) Silvaco Inc.)

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