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F. Casset (LETI)

Identifiers

  • name variant F. Casset (LETI) 0.60 · backfill

Papers (3)

  1. 0-level Vacuum Packaging RT Process for MEMS Resonators cs.OH · 2008 · author #4
  2. Tuneable Capacitor based on dual picks profile of the sacrificial layer cs.OH · 2008 · author #2
  3. Silicon on Nothing Mems Electromechanical Resonator cs.OH · 2008 · author #4

Mentions

  • 0802.3093 #4 · backfill · confidence 0.70 F. Casset (LETI)
  • 0802.3078 #2 · backfill · confidence 0.70 F. Casset (LETI)
  • 0802.3051 #4 · backfill · confidence 0.70 F. Casset (LETI)

Frequent Coauthors