Florian Schlachter

Identifiers

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Papers (1)

1. Overlay Accuracy Limitations of Soft Stamp UV Nanoimprint Lithography and Circumvention Strategies for Device Applications physics.app-ph · 2018 · author #4

Mentions

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Frequent Coauthors

• Anna Lena Giesecke 1 shared papers
• Christoph Nowak 1 shared papers
• Jens Bolten 1 shared papers
• Jung Wuk Kim 1 shared papers
• Max Christian Lemme 1 shared papers
• Piotr Jacek Cegielski 1 shared papers
• Thorsten Wahlbrink 1 shared papers