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Zongqiang Yu

Identifiers

  • name variant Zongqiang Yu 0.60 · backfill

Papers (1)

  1. Holographic EUV Lithography at 40 nm Resolution physics.optics · 2026 · author #6

Mentions

  • 2605.21430 #6 · arxiv_oai · confidence 0.70 Zongqiang Yu

Frequent Coauthors