O Yakushev
Identifiers
- name variant O Yakushev 0.60 · backfill
Papers (3)
- Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source cond-mat.mtrl-sci · 2014 · author #6
- Discharge-produced plasma extreme ultraviolet (EUV) source and ultra high vacuum chamber for studying EUV-induced processes physics.plasm-ph · 2014 · author #2
- Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas physics.plasm-ph · 2013 · author #8
Mentions
Frequent Coauthors
- A Dolgov 3 shared papers
- C J Lee 3 shared papers
- F Bijkerk 3 shared papers
- D Lopaev 2 shared papers
- V M Krivtsun 2 shared papers
- A Abrikosov 1 shared papers
- A Kovalev 1 shared papers
- A Vasilyeva 1 shared papers
- E Snegirev 1 shared papers
- E Zoethout 1 shared papers
- T Rachimova 1 shared papers
- V. Medvedev 1 shared papers