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O Yakushev

Identifiers

  • name variant O Yakushev 0.60 · backfill

Papers (3)

  1. Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source cond-mat.mtrl-sci · 2014 · author #6
  2. Discharge-produced plasma extreme ultraviolet (EUV) source and ultra high vacuum chamber for studying EUV-induced processes physics.plasm-ph · 2014 · author #2
  3. Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas physics.plasm-ph · 2013 · author #8

Mentions

  • 1411.4509 #6 · backfill · confidence 0.70 O Yakushev
  • 1411.4505 #2 · backfill · confidence 0.70 O Yakushev
  • 1310.4057 #8 · backfill · confidence 0.70 O Yakushev

Frequent Coauthors