Mats Hagberg (CHALMERS)

Identifiers

• name variant Mats Hagberg (CHALMERS) 0.60 · backfill

Papers (1)

1. Anisotropic Vapor HF etching of silicon dioxide for Si microstructure release cond-mat.mtrl-sci · 2012 · author #5

Mentions

• 1207.2402 #5 · backfill · confidence 0.70 Mats Hagberg (CHALMERS)

Frequent Coauthors

• Bengt Nilsson (CHALMERS) 1 shared papers
• Bert Du Bois (IMEC) 1 shared papers
• Christophe Krzeminski (IEMN) 1 shared papers
• Emmanuel Dubois (IEMN) 1 shared papers
• Goran Petersson (CHALMERS) 1 shared papers
• Jean-Pierre Raskin (ICTEAM) 1 shared papers
• Ulf Sodervall (CHALMERS) 1 shared papers
• Vikram Passi (ICTEAM) 1 shared papers