O. Yakushev

Identifiers

• name variant O. Yakushev 0.60 · backfill

Papers (1)

1. Numerical and experimental studies of the carbon etching in EUV-induced plasma physics.plasm-ph · 2015 · author #6

Mentions

• 1507.02705 #6 · backfill · confidence 0.70 O. Yakushev

Frequent Coauthors

• C.J. Lee 1 shared papers
• D.I. Astakhov 1 shared papers
• D.V. Lopaev 1 shared papers
• F. Bijkerk 1 shared papers
• K.N. Koshelev 1 shared papers
• V.M. Krivtsun 1 shared papers
• V.V. Ivanov 1 shared papers
• W.J. Goedheer 1 shared papers