The authors reformulate the EUV scattering problem as scattering in a homogeneous background using recursive reflection and solve it with a pseudo-spectral method accelerated by a Green's function preconditioner, showing speedup on mask geometries.
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physics.optics 1years
2026 1verdicts
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Pseudo-spectral frequency-domain method with background field decomposition and Green's function preconditioner for electromagnetic scattering problem in EUV lithography
The authors reformulate the EUV scattering problem as scattering in a homogeneous background using recursive reflection and solve it with a pseudo-spectral method accelerated by a Green's function preconditioner, showing speedup on mask geometries.