Femtosecond laser machining of ITO films shows LIPSS orientation affects resistivity, with perpendicular structures raising resistance by a factor above two for 515 nm light while 343 nm light thins the film at boundaries.
Excimer laser micromachining of indium tin oxide for fabrication of optically transparent metamaterial absorbers
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Influence of edge Laser-Induced Periodic Surface Structures (LIPSS) on the electrical properties of fs laser-machined ITO microcircuits
Femtosecond laser machining of ITO films shows LIPSS orientation affects resistivity, with perpendicular structures raising resistance by a factor above two for 515 nm light while 343 nm light thins the film at boundaries.