Tantalum damascene resonators on 300 mm wafers show modest loss reduction by replacing sidewall oxides with metal-substrate interfaces via buried oxide simulation.
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Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes
Tantalum damascene resonators on 300 mm wafers show modest loss reduction by replacing sidewall oxides with metal-substrate interfaces via buried oxide simulation.