A 16 GHz ScAlN-on-SiC solidly mounted resonator reports Qm=380, kt2=4.5%, FOM=17, claimed as the best Ku-band SMR to date.
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ScAlN-on-SiC Ku-Band Solidly-Mounted Bidimensional Mode Resonators
A 16 GHz ScAlN-on-SiC solidly mounted resonator reports Qm=380, kt2=4.5%, FOM=17, claimed as the best Ku-band SMR to date.