Developed pre-ionized pulsed magnetron discharges in the 1-50 μs range for ionized PVD, achieving high ion flux ratios, arc-free regime, and operation over wide pressure and current density ranges.
Deposition by magnetron cathodic pulverization in a pulsed mode with preionization
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
physics.plasm-ph 1years
2019 1verdicts
UNVERDICTED 1representative citing papers
citing papers explorer
-
High power fast pulsed magnetron discharges
Developed pre-ionized pulsed magnetron discharges in the 1-50 μs range for ionized PVD, achieving high ion flux ratios, arc-free regime, and operation over wide pressure and current density ranges.