Structured LG/HG beams plus AI analysis enable single-shot, alignment-free metrology of sub-wavelength nanostructure positions at lambda/110 (7.2 nm) precision.
Unlabeled Far- Field Deeply Subwavelength Topological Microscopy (DSTM),
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Alignment-Free Nanometric Optical Metrology Enabled by Structured Light
Structured LG/HG beams plus AI analysis enable single-shot, alignment-free metrology of sub-wavelength nanostructure positions at lambda/110 (7.2 nm) precision.